Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

AMG

AFF Port size 3/4B 1/8B 01 02 03 06 10 14 AMl 1B 1/4B Note) Please refer to p.4.7-7 about "How to Order" case assembly. 3/8B 11/2B Related products 2B 20 04 1/2B Option combinations Available Not available D J R AMG150 AMG250 AMG350 AMG450 Applicable model Accessories Options C C D J R Accessories/Optional specification AMG550 AMG650 AMG850 Symbol N.C. auto drain N.O. auto drain Drain guide

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

port Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133

VHS20/30/40/50

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Plate Cylinder with Lock Series MLU

MLU B 25 30 D F J79W S MDLU With Auto Switch Number of auto switches Built-in magnet 2 pcs. 1 pc.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

G SMC H F P . U S Can be locked with a padlock in the exhaust condition. E C Padlock mounting position C D D SUP SUP. A OUT IN A OUT IN 1 2 3 B B EXH. EXH.

3 Port Solenoid Valve

NPP-02-5 3 Port Solenoid Valve 3 Port Solenoid Valve Power Consumption (with power saving circuit) Temperature rise: 1C (with power saving circuit) V100 Specifications V100 Specifications V100 Specifications V100 Specifications Type With power saving circuit Standard Valves of specific power consumption can be manufactured to suit the f f f p f p p Power Consumption 0.1W 0.35W Temperature

S Couplers

Plug: Without check valve Socket: Without check valve KKA4S-02M-1 KKA4P-02M-1 40.2 KKA KKA KKA6S-04M-1 KKA6P-04M-1 76.0 KP How to Order LQ KKA 4 P M 02 MQR Built-in check valve Body size With check valve Nil -1 Socket/Plug designation 1/8 1/4 1/2 3/4 1 1 1/4 3 4 6 7 8 9 T Without check valve P S Plug Socket Note) KKA7/8/9 is not available without a check valve.

Air Suction Filter

ZFA10 1/8 50 Large filter element surface P.276 30 Adaptable for a manifold application ZFA20 200 1/4 Cartridge type allows element replacement ZFB Unrestricted 360 piping tube mounting on the IN side 4 10 ZFB10 Universal joint type 6, 3/16" , 1/4" 20 Easy installation and removal with One-touch fittings 6, 1/4" 30 Light and compact molded resin parts ZFB20 P.279 30 8 50 Cartridge

AMD

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMD850 1 2 13 42 348 220 57.5 220 10 14-20-27 7 Series AMD AMD801/901/800/900/1000 Dimensions AMD801/901 ORIENTATION Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Sensors (R) (P) 7.4 3 (13) M plug connector (M) L plug connector: 10-VQD1151-L-M5 M plug connector: 10-VQD1151-M-M5 5 5 5.5 2(B) 4(A) Direct manual override Lead wire length 300 mm 27 Indicator light 17.6 11.2 3 3(R) 9 0.3 3.8 10.9 3.5 5.5 9.1 2 x mounting hole 33.5 28.5 37 38 1(P) 1(P) 5.5 12 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 598 4 Port Direct

AC Servo Motor Driver (Pulse input type/Positioning type)

Select "P-1". U UP P D DO OW WN N b. When the "UP" and "DOWN" buttons on the driver operation are pressed, the display will be shifted as shown below, Select "P-3" and press the "SET" button. Point table No.1 No.2 No.3 No.4 No.5 No.6 No.7 c. The "UP" and "DOWN" buttons on the driver operation are pressed to Select "Spd", thenpress the "SET" button.

Air Cylinder NCM Series Stainless Steel Cylinders

S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .

lPSMt

To 140" F High Temperature 2Oo F To 212o F Low Temperature -2O F To 140' F Single Actino Double Actinq Single Actino Double Actino Single Actinq Double Actinq Supplv Pressure 20 to 1OO psi Siqnal Pressureo 3 to 15 psi (split ranqinq possible) Rotarv Anole (stroke 10" to 28'(10-85mm) (0.3" to 3.4" std.)5.9" max.)

lPSMt

To 140" F High Temperature 2Oo F To 212o F Low Temperature -2O F To 140' F Single Actino Double Actinq Single Actino Double Actino Single Actinq Double Actinq Supplv Pressure 20 to 1OO psi Siqnal Pressureo 3 to 15 psi (split ranqinq possible) Rotarv Anole (stroke 10" to 28'(10-85mm) (0.3" to 3.4" std.)5.9" max.)

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

For low speed control Port size 0 1 Port size Symbol M5 U10/32 01 02 Applicable series AS120M-M5 AS120M-U10/32 AS220M-01 AS220M-02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Cylinder side R Tube side Rc Symbol Nil Metric thread (M5) Unified thread (10-32 UNF) NPT P . 15-11-3 N Needle Valve/Flow Characteristics AS120M AS220M-01 AS220M-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet

VPA4

1 M3 x 0.5 x 32 VP300-2-1P (Rc 1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) VPA344 VP300-17-1 VP300-24-4 M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Mounting screw tightening torques VPA344 1/8 1/4 VPA544

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

Lube Unit Mounting thread M12 Float switch mounting position J (Bracket mounting dimensions) Panel (Option) Bracket (Option) A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 43 10 57 51 16 67 77 85 90 100 283 296 424 424 476 4 3 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1 1 2 615 615 682 419.2 209 4 1 250 125 33.2 33.2

-- NCM seies

S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .