Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 20, Stroke(mm): 30, Max. Load Mass (Horizontal Mounting)(kg): 5~9.2, Table Size Length L(mm): 92.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 60, Table Size Height H(mm): 46, Table Parallelism(µm): 40, Table Surface Treatment

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 30, Max. Load Mass (Horizontal Mounting)(kg): 5~9.2, Table Size Length L(mm): 105.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 74, Table Size Height H(mm): 55, Table Parallelism(µm): 45, Table Surface Treatment

Series VFM is a 5 port, compact, mechanical valve available in a rubber (VFM300) or metal (VFM200) seal style. This series has a large flow capacity (Cv 1.0) and a high cycle rate. The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 0.15 to 0.9MPa, Effective area (Cv): 18mm 2 (1.0), Maximum frequency

Table of Contents

ASR430F-02-08S(-F20) ASR430F-02-10S(-F20) ASR530F-02-06S(-F20) ASR530F-02-08S(-F20) ASR530F-02-10S(-F20) ASR530F-02-12S(-F20) ASR530F-03-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S

Table of Contents

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

1

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

AC

Y60 Interface G36-10-01 G36-10-01G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G36-10-01 1.0MPa G27-10-R1 Pressure gauge (G27-10-R1)(4) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 0.2MPa AD43 AD43 AD44 AD44 AD44 AD44 AD44 N.O.

2

03-A 02-A IS10E-3003-A 04-A Cross spacer Note 6) Y14-M5-A Y24-01-A 02-A Y34-01-A 02-A Y44-02-A 03-A Y54-03-A 04-A Note 1) in part numbers for a round pressure gauge indicates a pipe thread type.

AS

AS3301F-02 Meter-in type Meter-in type AS3211F-02 AS3311F-02 AS ASP ASN AQ ASV AK Component Parts Component Parts No.

Table of Contents

VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360

CATALOG

2 0.17 3 Water VX2330 0.7 0.45 0.45 0.7 VX2122-02 3 0.33 6 VX2340 1 0.8 0.7 1 VX2-02 3 0.33 6 Oil VX2250 1.6 1.2 1 VX2322-02 3 0.33 6 VX2260 VX070-029 0.3 0.2 0.2 0.3 1/4 VX2132-02 4.5 0.61 11 Air VX2350 0.45 0.3 0.3 0.45 (8A) VX2232-02 4.5 0.61 11 3 5 VX2360 0.8 0.6 0.6 0.8 VX2332-02 4.5 0.61 11 0.25 0.15 0.15 0.25 VX2242-02 6 1.05 19 0.45 0.35 0.35 0.45 VX2342-02 6 1.05 19 1 0.8 0.7

Table of Contents

O.D. 4 2.5 1 4 1 4 3 8 KFF04-02 KFF06-02 KFF06-03 KFF08U-02 KFF08N-02 KFF10U-02 KFF10N-02 KFF12U-02 KFF12N-02 10 33.5 26.8 15 15 17 1.6 25 27 30 17 17 19 15.5 1.5 33.2 26.5 6 15.2 3 12 6 4 35.2 28.5 5 6 11 17 21 30 35 45 4 5 5.5 6.5 7 8 Connection thread Applicable tubing 14 17 1 4 33.2 26.5 15 16.2 28 8 10 6.5 7.5 1 4 32 17 17 34.8 27.5 15 18.8 12 8 9 35 36 1 4 19 17 35.3 28.5 15 19.3 15

5 Port Solenoid Valve Series SY3000/5000/7000/9000

AS3001F-08 AN101-01 AN101-01 T1075 x 1 m AS4001F-10 T0604 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m SY7120-02 SY7140-03 AS4001F-10 AS3001F-06 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 T0604 x 1 m T1075 x 1 m SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN200-02 AN200-02 AN202-02 Conditions [When using SGP (steel

V100

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil no. PVT317-001GBPVT317-G PVT317-001GB-L06 PVT317-G-06 PVT317-001CBPVT317-C Coil assembly with terminal part no.

5-Port Solenoid Valve

Symbol Stations Note 02 2 stations All double wiring Symbol Stations Note 02 2 stations All double wiring 09 9 stations 02 2 stations All single wiring 04 4 stations 02 2 stations All single wiring The asterisk denotes the symbol for the assembly.

SY

plug (16.5) 56 L type plug connector (L): SY5 40(R)-L-02 M type plug connector (M): SY5 40(R)-M-02 DIN terminal (D): 3 4 5 3 4 5 3 4 5 SY5 40(R)-D-02 Applicable cable O.D. 3.5 to 7 81.7 74.2 157.8 Max. 10 62.9 Pg.7 18 18 159.6 28 58.1 9.5 22 Grommet .

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

DIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR2510L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-M01 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Grommet terminal: Double VFS2210-E-01 02 Closed center VFS2310-E-01 02 Exhaust center VFS2410-E-01 02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 With light/surge voltage suppressor 151 (3 position: 159) Lead wire O.D.

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

ZP

ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.