Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa), SUP: 03 (Screw-in Rc 3/8), VAC: 03 (Screw-in Rc 3/8)

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.

Stations: 03 (3 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.

SMC Pneumatic Clean Series

-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2008 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MT printing MT 16400SZ Printed in Japan.

Speed Controller: Standard Type Large Flow In-line Type AS Series

Free flow Controlled flow Weight (kg) Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio AS420-02 AS420-03 AS420-04 AS500-06 AS600-10 AS800-12 AS900-14 AS900-20 1/4 3/8 1/2 3/4 1 1 1 2 10 13.3 18.6 22.5 47 107 132 169 3,600 4,800 6,700 8,100 16,900 38,500 47,500 60,800 6.9

Battery-less

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

Round Type Hydraulic Cylinder

M30 x 1.5 1/8 18.5 87 20 160 178.5 40 34 f8 Up to 800 21 M33 x 2 M16 x 1.5 24 24 12 24 18 21 14 11 54 10 48 7.5 19 44 24 21 1/4 22.5 108 20 182 204.5 322 Round Type Hydraulic Cylinder: 3.5 MPa CHM Series Accessories (Standard) Rod end nut Mounting nut 30 30 d d CHQ C D D C CHK H B B H Material: Carbon steel Material: Carbon steel CHN Part no. d H B C D Applicable bore size (mm) NT-02 NT-03

Cylinder

Tel :03-3502-2740 Fax:03-5251-7240 August 1996, 14(RP)

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Tel: 03-3502-2740 Fax: 03-5251-7240 SMC CORPORATION 1st printing OctOfber 1988. O-

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

SMC Pneumatic Clean Series

-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2008 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MT printing MT 16400SZ Printed in Japan.

SMC Pneumatic Clean Series

-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2008 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MT printing MT 16400SZ Printed in Japan.

SMC

-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2008 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MT printing MT 16400SZ Printed in Japan.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

Cylinder with Lock

Auto switch model Bore size [mm] 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 D-A3/A44 D-G39/K39 BMB2-032 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT D-A5/A6/A59W BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 D-P3DWA BA10-032S BA10-040S BA10-050S BA10-050S BA10-063S BA10-063S D-P4DW BMB3T-040 BMB3T

Compact Cylinder with Solenoid Valve/

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NT printing NT 6000SZ Printed in Japan.