Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

12 30 10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x 1.0 x 18.5l 64 14 2-M6 x 1.0 2-11 counterbore depth 6.3 2-6.9 through CXS32 98 38 96 36 75 44 8 16 14 30 16 M8 x 1.25 x 23l 76 18 2-M6 x 1.0 2-11 counterbore depth 6.3 W X Y T TT U UU V Model PP Q QQ R 4-M5 x 0.8 thread depth 4.5 4-Rc 1/8 thread depth 6.5 4-Rc

Lubrication Equipment

A B 63 63 80 85 90 100 C Port size Rc(PT) INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model No. 1/4 15 15 15 20 22 22 141 164.5 170 180 230 251 3/8 1/4 , 3/8 , 1/2 3/4 B C D E F Port size Rc(PT) 3/4 , 1 1 Model No. A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

VM

Note 3) The handle of the selector (2 position and 3 position) cannot be removed or replaced alone. 5-6-12 11 2/3 Port Mechanical Valve Series VM100 How to Order S 01 01 3 1 VM1 Suffix for indicator light Suffix for actuator With miniature indicator light (Bottom piping type only) Actuator type R S Z G B Red Hard steel roller Port size Basic 00 Color of push button selector M5 01 M5 x 0.8

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

Series IDG

Unit Single Style/Standard Dew Point 20C (4F) Specifications How to Order 1l/min = 0.0353SCFM IDG 10 03 Flow rate by size Optional specifications Size Outlet air flow rate Purge air flow rate l/min (ANR) Symbol Contents Size 1 5 10 20 30 3 50 60 75 100 Nil P R None (standard) With fitting for purge air discharge Flow direction (rightleft) With dew point indicator 1 10/2.5 3 25/6 50/12

7

12 VXD23 to 29 136 Construction VXD Series Normally Open (N.O.) !

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

area (mm2) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) 08, 09 06, 07 Number of needle rotations Number of needle rotations 15-9-44 3 Speed

MXW Series Long Stroke Slide Table

13 11 14 Parts List Note Material No.

AC Servo Motor Driver (Pulse input type/Positioning type)

Servo amp lifier Driver (Note 7) (Note 7) CN1 CN1 (Note 2) 24VDC RA1 (Note 4, 9) 2 OPC 9 ALM Trouble (Note 6) 1 DICOM Travel completion 10 MEND RA2 13 DOCOM (Note 9, 11) (Note 13) Ready EM1 SON MD0 8 4 3 (Note 3, 5) Forced stop 11 RD RA3 Servo-on Electromagnetic brake interlock 12 MBR RA4 Automatic/manual selection DOG (Note 9, 10, 12) 25 Proximity dog 10m max. Point table No.

ZP

Form w 1 Material e Vacuum inlet Width across flats K r Connection thread Q A 10 A5 70 49 32.9 24 2.5 M5 x 0.8 21 8 4 10 8 M5 x 0.8 16 71 50 33.9 25 10 N S U F GN GS 75 49 32.9 24 2.5 M6 x 1 26 8 4 10 8 M5 x 0.8 16 76 50 33.9 25 25 89.5 63.6 45.8 35 3.5 12 12 M8 x 1.25 40 97 71.1 53.3 42.5 4 25 A8 79.5 63.6 45.8 35 3.5 M8 x 1 16 12 4 12 12 M8 x 1.25 40 87 71.1 53.3 42.5 4 04 06 08 D C B ZP

Antistatic One-touch Fittings Series KA

(mm) Weight (g) M A L D Part No. 3.2 4 33.5 34.5 36.5 18.5 KAR23-04 18.5 17.5 18 15.5 9.6 3.4 2.9 2.3 2.1 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 10 KAR04-10 39.5 37 39.5 3.6 3 KAR06-08 8 18.5 6 10 KAR06-10 17 12.8 KAR06-12 42 5.2 12 20 3.5 13.1 13.1 8 KAR08-10 41 4.5 18.0 18.0 10 20 18.5 15.2 KAR08-12 42 5.1 12 10 KAR10-12 42 33 32.8 32.8 12 20 21 17 139

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Rated voltage 5 6 24 VDC 12 VDC Note 1) Light/surge voltage suppressor is built-in.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

] Port 2 type Data[12] Port 3 type Data[13] Port 4 type -120No.EX-OMX1011 2-1.

Speed Controller with One-touch Fittings

57.2 59 65 70.8 76 76.9 81.3 3.4 4.4 5.1 6.1 5.2 6.3 6.7 8 7.4 8.2 9.8 10.9 10.3 11.3 7.9 11.1 11.8 12.8 12.3 13.4 16.3 17.6 19.3 20.1 21.7 22.8 22.7 23.7 20.9 23.8 24.5 25.5 28.9 30 33.2 34.5 38.6 39.4 41 42.1 51.6 52.6 11 9.8 5 6.7 9.8 10.1 12.3 11.5 12.3 15.7 16.1 8.8 2 3.2 4 6 4 6 6 8 6 8 10 12 10 12 6 8.4 9.3 11.6 9.3 11.6 12.8 15.2 13.2 15.2 18.5 20.9 18.5 21.7 12.7 3.3 5.5 9.1 11

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 E 14.6 20 24 29 35 40 52 EY 39.5 45.5 53.5 67 83 106 129 EB 30 32 38 50 57 66 77 EC 5.8 5.8 6.5 8.5 10 14 14 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 F 4 4 6 6 6 6 6 T 6 6 7 12 12

AC Servo Motor Driver (SSCNET Type)

(Default) Spare (SW2-2) Rotary axis setting switch (SW1) Description Display 0 Axis No.1 01 1 Axis No.2 02 2 Axis No.3 03 3 Axis No.4 04 4 Axis No.5 05 5 Axis No.6 06 6 Axis No.7 07 Down 7 Axis No.8 08 (Be sure to set to the 8 Axis No.9 09 "Down" position.) 9 Axis No.10 10 A Axis No.11 11 B Axis No.12 12 C Axis No.13 13 D Axis No.14 14 E Axis No.15 15 F Axis No.16 16 -12- 5.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

] 20 20 20 20 Pg7 127.2 [131.6] 107.6 [112] 22 22 22 22 147.2 Max. 10 145.4 110.6 125.4 97.6 65.6 63 63 63 63 22 22 22 22 31.5 31.5 31.5 31.5 11.5 11.5 11.5 11.5 12 12 12 12 25.5 25.5 25.5 25.5 Refer to the page 91 for dimentions with connector cable. 56 Series SYJ7000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 G H 01 02 Grommet (G), (H): SYJ7 4022 12 G: Approx

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

39.3 27.8 55 39.3 17 55 13.2 AS321F-03-08 AS321F-03-09 8 5/16" 15.2 18.5 29.5 41 23 29.5 57 41 18.5 57 19.8 45.4 40.4 40.2 35.2 15.2 3/8 45.4 40.4 40.2 35.2 19.8 23 3/8 AS321F-03-10 AS321F-03-11 31.8 43.3 21 59 17.9 10 18.5 21 43.3 31.8 59 3/8" AS321F-03-12 AS421F-04-11 12 3/8" 20.9 22 44.3 32.8 33.6 61 47.9 21 100 17.9 24 28.6 49.2 49.6 42.1 1/2 24.5 56.7 (23.8) AS421F-04-10 AS421F-04-13

Thermo-con/Rack Mount Type

Communication connector D-sub 9 pin (socket) Holding screw: M2.6 6 Contact a for output cutoff alarm (open when alarm occurs) 7 Common for output cutoff alarm 9 15 10 11 12 13 14 Pin no.

ZQ-OM01401

ZQ-OM01401-B / / ZQA No.ZQ-OM01401-B 2 1. 5 2. 9 3. 11 3.1. 11 3.2. 12 3.3. 13 3.4. 14 3.5. 16 4. 17 5. 19 6. 20 7. 21 8. 28 9. 32 10. 35 11. 37 12. 40 13. 42 1 - No.ZQ-OM01401-B /ZQA *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery