HRX-OM-W038

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

•

(mm) ~-' Mounting thread( Application: Refer to listfJ) 02 92 16-.16 04 04 20-'20 06 ffl 25-25 08 "8 32-"32 10 '10 40-140 13 " 1 3 50-. 50 Pad type Vacuum Entry Lisl8 Vacuum Entry Mounting ~10 .16 m . 32 1'4O 1'5!1, N4 ~4 Nylon tube li ~.

IDU/IDF

Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

HRX-OM-R005

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

HRX-OM-O021

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

SQ1000/2000

Nil M MB Note 1) For the double solenoid specification, the symbol for Function is "D". Note 2) Only rubber seal types are applicable.

125

. * The load ratio is obtained by the following formula: ((Load mass x 9.8)/Theoretical output) x 100% VEX VEX Conditions System Solenoid valve Speed controller Silencer Tubing diameter x Length A VEX31 22-02 AS4000-02 AN20-02 10 x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air

CL

(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

Table of Contents

L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

CV/MVGQ

MQQ M RHC 3.

CV/MVGQ

Electrical entry Grommet L plug connector M plug connector DIN terminal G L M D Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

air-filter-e

Pressure Control Equipment Industrial Filters Port size Port size FN1 FN4 Symbol 10 20 Rc1 Rc2 Applicable model Specifications FN1 FN1101 FN1102 FN1112 FN4102 65 x 250L 65 x 500L Model Element dimension Material Construction Stainless steel 304 Element Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Nominal filtration rating Differential

Air Preparation Equipment

Pressure Control Equipment Industrial Filters Port size Port size FN1 FN4 Symbol 10 20 Rc1 Rc2 Applicable model Specifications FN1 FN1101 FN1102 FN1112 FN4102 65 x 250L 65 x 500L Model Element dimension Material Construction Stainless steel 304 Element Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Nominal filtration rating Differential

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS2001FM-04-X12 Ex.) AS2001FM-04-X21 AQ Note 1) Not particle-free ASV Throttle Valve (Without Check Valve) X214 AK Ex.) AS2001FM-04-X214 VCHC ASR ASQ Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

CA2

Lead wire length symbols: 0.5 m Nil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z In addition to the models in the above table, there are some other auto switches that are applicable.

PF2A/PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

SMC's VP300/500/700 series solenoid valve, offers high flow capacity and reduced power consumption (1.55W standard, 0.55W with power saving circuit).  The series may be used as either a selector valve, or a divider valve.  It is vacuum applicable up to –101.2kPa.  Series VP3145/3165/3185 is a large size, 3 port solenoid valve with a rubber seal.  It is possible to use the series in vacuum