IDX-OM-U010

Option T . 11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter 13 Inspection record . 13-1 13.1 INSPECTION RECORD .

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

VCC

(Equivalent tightening torque: T) 18.8 13.8 11.8 5.8 2.8 0.5 8.6 11 G1/4 (mm) Part no.

ITV

(For details, refer to page 14-8-11 in Specific Product Precautions.)

Series VQ Metal Seal/Rubber Seal Body Ported

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

VQ

Part Material AXT662-11 (1: M5, 2: M3) 2 Sub-plate ZDC o Optional Parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

External pilot port 11 11 67 VQZ L plug connector (L) DIN connector (Y) VQD 148 (3 Position)<150> 135 (Double)<137> 300 155.5 (3 Position) MAX.10 (Lead wire length) VZS 142.5 (Double) 97.5 (Single)<98.5> Indicator light Pg.7 101.5 (Single) 65.5<66.5> VFS 69.5 Applicable cord O.D. 3.5 to 7 Indicator light VS 64<67.5> Cover diameter 1.5 R1 R2 5 3 1 P VS7 Cross section 0.23mm2 93.5 86 < >

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Rotary Actuator/Vane Type

, 6 11 to 22 X-2 3, 4, 5, 6 MSQ MSZ CRQ2X MSQX Symbol: A9 Symbol: A10 MRQ The long shaft can be further shortened by changing the length of the standard chamfer on the long shaft side.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Refer to pages 11-13-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 6 for Precautions on every series. External Stopper Unit Rotation Adjustment Caution Caution Order external stopper unit with the unit part numbers shown below.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Refer to pages 11-13-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 6 for Precautions on every series. External Stopper Unit Rotation Adjustment Caution Caution Order external stopper unit with the unit part numbers shown below.

MK

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) M + Clamp stroke R Q P O N M S Model With arm: MK -N 12 16 MKB12-N MKB16-N 4 20 29 8 18.5 M3 x 0.5 8 5 25 36 11 21.5 M4 x 0.7 11 20, 25 18-(0 to 10) R thread Auto switch Minimum bending radius of lead wire 10 In case of connector 2-M5 x 0.8 F (

Auto Switch Guide

Main circuit of switch OUT Black Weight DC () Blue (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 Lead wire length (m) 3 54 54 54 DC (+) Brown 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most

CXT

Q + Stroke (NA) Cylinder form 12 16 d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54 9

Compact

Acceleration [mm/s2] 0 250 1 500 2 1000 3 1500 4 2000 5 2500 6 3000 7 4000 8 5000 9 6000 10 7500 11 10 12 12500 13 15000 14 17500 15 20 Note) The factory default setting for the switch is No.0.

Thermo-con/Rack Mount Type

Communication connector D-sub 9 pin (socket) Holding screw: M2.6 6 Contact a for output cutoff alarm (open when alarm occurs) 7 Common for output cutoff alarm 9 15 10 11 12 13 14 Pin no.

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

CEx-OMQ0013

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

MHF2

11 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 34 12-3-13 14 Series MHF2 Dimensions MHF2-8D2 2.5H9 +0.025 0 depth 2.5 17 17 17 2.5H9 +0.025 0 depth 2.5 3 3.4 64.3 4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x 0.5 17 18 0.8 18 0.8 Finger closing

CUJ

Table 2 Applicable auto switch models Refer to pages 11 to 14 for detailed specifications.