IIIIIII

0 (172 9l 5 6 l (142 4l 1 5 7 (40) 1.20 (30 5) 0 0 6 (1 5) 1 0 9 27 7l 0 8 9 2251 1 5 7 r40) 1 4 2 (36) 1 2 6 (321 1 m (30 s) o24 r6t Millimaters in Parentheses Millimetsrs in Parenthess N\rzM450-N01-00 M5 xo.8 F O F 3.53 lbs (1 6 Ko) P.T. 0.04 in. (1.0 mm) A ts IJ E r G H K M N P R 5 T U X 3 7 2 94 5) 3.58 (91) 0.50 128 1 5 0 (38) 0 8 9 '22 5) 1 0 5 267 1 4 2 (36) 0.54 0 6 7 (17\ 0 9 2

HRX-OM-X071

4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List of parameters . 5-6 5.3.1 Main Menu . 5-6 5.3.2 Alarm display menu . 5-6 5.3.3 Notice for maintenance Menu . 5-6 5.3.4 Monitor Menu . 5-7 5.3.5 Standard setting menu . 5-8 5.3.6

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

OUT port size Material D side U side 1 2 3 4 5 n Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Body material C37 Symbol Nil H Seal material FKM FKM 02 : 10 2 stations : 10 stations Stainless steel All IN ports are 3/8. Refer to the "L" dimensions on page 6 regarding the maximum number of stations.

ZSE F/ISE

cord (0.15 mm2) Approx. 120 g (Each including 3 m lead wire) Hysteresis mode Window comparator mode Hysteresis Note 4) ZSP Response time Output short circuit protection Display Display accuracy Indicator light Analog output Auto shift input ISA2 IS Note 2) Output voltage: 1 to 5 V 5% F .S. or less Output voltage: 1 to 5 V 2.5% F .S. or less ZSM Note 3) PF2 Enclosure Ambient temperature range

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

AMR3000 to 6000 Series How to Order Adapter Assembly (Part number for one piece) 03 AMR 4 0 00 02 E 3 Auto-drain Pressure gauge mounting Port size 02 03 04 06 10 ARJ MR unit 1 None With auto drain 0 Flow direction: Right to left Nil Flow direction: Left to right Applicable model 1/4 3/8 1/2 3/4 1 Nil E2 E3 E4 E6 E10 R 3 4 5 6 AMR3 00-02 to 03 AMR4 00-02 to 04 AMR5 00-04 to 06 AMR6 00-10 AR425

HRL

40 HRS090 Standard type 0.5 5 to 35 Indoor use (400 V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 HRSH090 Inverter type 0.1 5 to 40 Indoor use (400 V as standard, 200 V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 (400 V as standard, 200 V as an option) (Only 200 V as an option)

Serial Transmission System Series EX250 Series EX500

Seal 0 1 Metal seal Rubber seal 12 SI unit Serial Unit (SI Unit) Dimensions/EX250 DeviceNet PROFIBUS-DP CC-Link SI SI SI PW PW(V) RUN PWR(V) MOD/NET PWR(V) PWR STATION NO.

HRX-OM-T004

5-5 5.4 Communication sequence. 5-11 5.5 Message configuration . 5-12 5.5.1 Message format . 5-12 5.5.2 Message example . 5-14 5.6 BCC . 5-15 5.7 Command . 5-15 5.8 Command explanation . 5-16 5.8.1 Command:PV1 Circulating fluid discharge temperature . 5-16 5.8.2 Command:SV1 Circulating fluid set temperature (R) . 5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W) . 5-18 5.8.4 Command

HRX-OM-R028

sequence .5-11 5.5 Message configuration.5-12 5.5.1 Message format .5-12 5.5.2 Message example.5-14 5.6 BCC .5-15 5.7 Command .5-15 5.8 Command explanation .5-16 5.8.1 Command:PV1 Circulating fluid discharge temperature.5-16 5.8.2 Command:SV1 Circulating fluid set temperature (R).5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W).5-18 5.8.4 Command:LOC Key-lock setting (R) .5-19

PF2A/PF2W

(Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Output for display unit Output Note 2) specifications Voltage output 1 to 5 V within the flow rate range Linearity: 5% F .S. or less; allowable load resistance: 100 k or more.

SL5200

Sub-atmospheric (A): 100 mm Hg absolute to 30 psig (-88kPa to 0.2 MPa) Code Bonnet Standard Panel installation 5) 02 FV4 MV4 TW4 FV6 MV6 TW6 No code P 06 10 1 to 60 psig (0.007 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5) Panel mounting hole: dia. 1.56 inch (39.6 mm).

HRX-OM-S004

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main Display . 5-7 5.3.1 Main Display . 5-7 5.3.2 Items on the main display . 5-7 5.4 Alarm Menu . 5-8 5.4.1 Alarm menu . 5-8 5.4.2 Items shown on the alarm menu display . 5-8 5.5 Check monitor menu . 5-9 5.5.1 Check monitor menu . 5-9 5.5.2

VFN2000N

*D-02* 9.4 32 2 x 6 M.T.G.

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

VQ7-6/7-8

Rc Nil EVS NPTF T G F VFN By mounting an individual EXH spacer on a manifold block, individual exhaust is possible from both R1 and R2. {3 (R2) and (R1) are individual ports.} 1 1 2 4 5' 5 3 3' 5 3 Conversion adapter plate VV72-V-1 This conversion adapter plate allows a VQ7-6 (size 1) valve to be mounted on a VQ7-8 manifold base.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

products. 7 3-Screen Display RoHS High-Precision Digital Pressure Switch: For General Fluids ISE70G/75G/76G/77G Series How to Order ISE70G 02 M L2 Pressure range Piping specification Symbol Description ISE70G 0 to 1 MPa ISE75G 0 to 2 MPa ISE76G 0 to 5 MPa ISE77G 0 to 10 MPa Symbol Description 02 Rc1/4 N02 NPT1/4 F02 G1/4*1 Option 3 Symbol Description Nil Operation manual Y None *1 ISO 1179

3 Port Air Operated Valve

Type 41/Common exhaust VFA VFRA Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF VPA4 SYJA VZA Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 VTA 02 03 04 VPA300 VPA500 VPA700 2 stations VGA 20 20 stations VPA VPA VPA3 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size

PFxx-OMO0004CN

) ZS-33-JS () ZS-33-M () (3.02 ) ZS-33-MS () (3.03 ) ZS-33-R DIN 1 2 3 4 5 DIN F02(G/14)DIN -12No.PF-OMO0004CN-E (OUT) (IN) 1 2 2 INOUT DIN 1 2: LCD LED (UP) (SET) SET (DOWN) UP DOWN 3 ON/OFF (UP) 3 ON/OFF (DOWN) LED (OUT1)/ (SET) OUT1OUT2 OUT1ON OUT2ON 3 -13No.PF-OMO0004CN-E F.S. () 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF ()

ZQ-OM01401

ZQ 05 1U A-K15L B-EA M G -3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10)(11)(12) (1) (7) 05 0.5 5) 07 0.7 M SI (kPa) 10 1.0 5) (:psi) P 5) (99 10 ) (2) (8) 1U 3M G (2m) (9) (10) (V ) 6) (3) 0 (M5x0.8) 7) K1 N.C. N.C. K 1 3.2 () K2 N.O. N.C. 6) 2 4 () J1 N.C. 3 6 () J2 N.O. 4 3.2 () 1) ()(N.C.)