KR

(mm) Weight (g) Note) D Applicable tubing Applicable tubing KGS04-M5 KGS04-01 KGS06-M5 KGS06-01 KGS06-02 KGS08-01 KGS08-02 KGS08-03 KGS10-01 KGS10-02 2.5 19 23 20 15.5 13 16 19 16.5 20 18 17 M5 x 0.8 9.5 9.8 11.5 11.8 13.8 4 4.1 4 4 2.6 8 3.6 4 4 1 8 3 2.5 M5 x 0.8 14 3.2 9 15 12 11 24 18 12 10.0 10.0 9.9 1 8 1 4 1 8 1 4 3 8 1 8 1 4 6 4 24 10.7 17.2 5 24 19.5 21 26 21.5 28 25.5 27.5

Valve Single Unit

How to Order Valves 5 L N SX 5 1 20 01 Thread type Series A, B port size Nil Applicable series Rc Symbol Port size M5 x 0.8 3 SX3000 5 SX5000 G F M5 One-touch fitting for 4 C4 N 7 SX7000 NPT SX3000 One-touch fitting for 6 C6 NPTF T Type of actuation 1 8 01 1 2 position single One-touch fitting for 4 C4 Rated voltage SX5000 2 2 position double One-touch fitting for 6 C6 5 24 VDC 6 12 VDC 3

JXCx-OMY0004

Moving force (5, 11, 14) 1% 20-23 DWORD Area1 Basic parameter "Stroke(-)" "Stroke (+)" (5, 11, 14) 0.01mm 24-27 DWORD Area2 Basic parameter "Stroke(-)" "Stroke (+)" (5, 11, 14) 0.01mm 28-31 DWORD In-Position Basic parameter "Stroke(-)" "Stroke (+)" (5, 11, 14) 0.01mm 5 Please refer to 20.

EXxx-OMU0020CN

Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01() 1 Valve 2, 3 diagnostics 01() 2 Valve 4, 5 diagnostics 01() 3 Valve 6, 7 diagnostics 01() 4 Valve 8, 9 diagnostics 01() 5 Valve 10, 11 diagnostics 01() 6 Valve 12, 13 diagnostics 01() 7 Valve 14, 15 diagnostics 01() 5.1.1.4.

60

G 5 1 01 G Bracket Model Refer to the Table (1) shown below for availability.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" O.D. 5/32" 5/32" 1/4" 5/16" Meter-out type Meter-in type Inch size 5/16" 3/8" 3/16"

E-P HYREG ® Series VY1

N AN101-01 AN210-02 AN120-M5 14-10-3 Series VY1 Characteristics SignalOutlet Pressure Characteristics (Characteristics of pressure setting) VY1A00 1/1B00 1 1 VY1100 1/1200 1 VY1D00 1 1 0.8 0.8 0.8 A port pressure (MPa) A port pressure (MPa) A port pressure (MPa) 0.6 0.6 0.6 0.4 0.4 0.4 0.2 0.2 0.2 VY1D00-5 VY1B0-5 VY120-5 1 0 1 2 3 4 5 V 0 1 2 3 4 5 V 0 1 2 3 4 5 V A VY1D00-6 VY1B0-6 VY120

SQ1000/2000

-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side 3m SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting D side Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D . 1 set: F kit 9 station manifold base SQ1130-5-C6 .

A

NAN110-01 NAN120-M3 NAN120-M5 Port Size 18* 18* M3 M5 Noise Reduction (dB) 16 21 13 18 Max Operating Pressure 1MPa / 145PSI Ambient & Fluid Temperature 5~150C / 40~300F Effective Orifice mm2 (Cv) 20 (1.1) 35 (1.9) 1 (0.05) 5 (0.27) Weight (gf) 9.5 20 1 3.3 H O W T O O R D E R SERIES AN SILENCER *Tapered thread ISO7/1 AN120-M3 (M3) AN120-M5 (M5) AN110-01 (1 8 PT) AN101-01 (1 8 PT) D I M E

Series KP/KPQ/KPG

Stopper Seal Bumper O-ring Drive bushing 5 Series KP Clean One-Touch Fittings Dimensions (mm) 1in = 25.4mm, 1g = 0.0353oz Male Connector: KPH Effective area mm Model L M TPH TPS A H (width across flats) Applicable tubing O.D. mm Connection threads R Weight g Applicable tubing 3 4 4 5 6 7 10 11 12 13 KPH04-01 KPH04-02 KPH06-01 KPH06-02 KPH08-01 KPH08-02 KPH10-02 KPH10-03 KPH12-03 KPH12-04

Series KP/KPQ/KPG

Stopper Seal Bumper O-ring Drive bushing 5 Series KP Clean One-Touch Fittings Dimensions (mm) 1in = 25.4mm, 1g = 0.0353oz Male Connector: KPH Effective area mm Model L M TPH TPS A H (width across flats) Applicable tubing O.D. mm Connection threads R Weight g Applicable tubing 3 4 4 5 6 7 10 11 12 13 KPH04-01 KPH04-02 KPH06-01 KPH06-02 KPH08-01 KPH08-02 KPH10-02 KPH10-03 KPH12-03 KPH12-04

KP/KPQ/KPG

M KPL04-01 KPL04-02 KPL06-01 KPL06-02 KPL08-01 KPL08-02 KPL10-02 KPL10-03 KPL12-03 KPL12-04 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 4 5 5 6 8 9 13 14 15 18 4 18 20.7 3.5 10.4 3.5 10 D1 6 19.5 22.8 9 12.8 9 L2 A D2 14 8 21.5 26.3 15 15.2 22 12 H Connection threads 10 24 29.4 25 18.5 35 17

AS-FG/ASD-FG

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tube O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 3/16" 1/8" 5/32" 5/16" 1/4" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow rate flow Controlled (Free) l/min (ANR) 100 180 230 260 390 460 660 790 920 1580

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled

KQ2

(inch) Mass (g) Applicable tubing D1 L M Model KQ2C03-00 KQ2C07-00 KQ2C09-00 KQ2C11-00 5 32 1 4 5 16 3 8 17 18 1 2 3 6 10.4 13.2 15.2 17.9 16 17 18.5 21 20.5 22.5 Plug: KQ2P, KQP Applicable fitting size d (inch) Mass (g) D L A Model Note) KQ2P-01 KQ2P-03 KQ2P-05 KQ2P-07 KQ2P-09 KQ2P-11 KQ2P-13 KQP-01 KQP-03 KQP-05 KQP-07 KQP-09 KQP-11 KQP-13 1 8 5 32 3 16 1 4 5 16 3 8 1 2 1 1 1 1 2 3.5 5

Rubber seal 5 Port Solenoid Valve Series SYJ5000

6 6 17 17 43.9 15 8.5 1/8 (P, R port) 32 24 45.5 L plug connector (L): SYJ5 40-L-01 3 4 5 M plug connector (M): SYJ5 40-M-01 3 4 5 DIN terminal (D): SYJ5 40-D-01 3 4 5 M8 connector (W0): SYJ5 40-W0-01 3 4 5 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 Max. 10 75.4 50.1 [57.1] 64.1 34.7 49 M8 x 1 54.6 37.1 61.2 [68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 65.8 103.4

HRX-OM-X071

4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List of parameters . 5-6 5.3.1 Main Menu . 5-6 5.3.2 Alarm display menu . 5-6 5.3.3 Notice for maintenance Menu . 5-6 5.3.4 Monitor Menu . 5-7 5.3.5 Standard setting menu . 5-8 5.3.6

VZ3000

override (Non-locking) (Mounting hole pitch) MAX. 11 VZ3540 (Mounting hole pitch) (Lead wire length) G: 300 mm H: 600 mm 2-M5 x 0.8 (PE port) 4-Rc 1/8 (Piping port) L plug connector (L) VZ3 40-L-01 M plug connector (M) VZ3 40-M-01 3 4 5 3 4 5 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor Built-in speed controllers VZ3 50DIN terminal (D) VZ3 40-D-01 3

Air Fittings & Tubing

KDM10-01 KDM10-03 KDM10-07 KDM10-09 KDM20-01 KDM20-03 KDM20-07 KDM20-09 1 8 5 32 300g 10 1 4 520g 5 16 1 8 5 32 1 4 Red 520g 20 950g 5 16 KDM20 Applicable Tubing Tube material Tube O.D.

JXCx-OMY0006

Safety Instructions 5 2.