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Relay connector Description IP rating Connector: RM15WTPZ-4P(71) Cord clamp: JR13WCC-5(72) (Hirose Electric) IP65 a) Relay connector for extension cable Numeral changes depending on the cable OD. Connector: RM15WTJZ-4S(71) Cord clamp: JR13WCC-8(72) (Hirose Electric) b) Relay connector for IP65 motor power supply cable Numeral changes depending on the cable OD. 3 58 3.

5.9 Saving/Loading Project . 61 5.9.1 Saving Project . 61 5.9.2 To Load saved Project . 62 5.10 Saving/Loading Point table . 63 5.10.1 Saving Point table . 63 5.10.2 To Load saved Point table . 64 5.11 Acquisition of motion waveform with graph monitor . 65 5.11.1 Under the setting Tab: Setting of the items to display the graph . 66 5.11.2 Trigger wait . 70 5.11.3 Operation Instruction . 71

(IP65) RM15WTPZ-4P(71) IP65 a) JR13WCC-572 () RM15WTJZ-4S(71) IP65 b) JR13WCC-872 ( ) 3 32 3 3.11 3.11.1 ALMOFF MBR (ALM)OFF (MBR)OFF RA B U DC24V DC24V 13 13 DC24VOFF ONOFF (1) DC24V MBR RA1 (ALM) B1 (2) RA2 DOCOM (1) DC24V DICOM U B MBR RA1 B2 1.DC24V 2. (2) 3.11.2No.PC02 OFF(Tb) 3 33 3 3.11.2 (1) ON()ON/OFF ONOFF,Tb[ms] Tb 0 r/min (95ms) Tb ON OFF (95ms) (1)ON MBR

-71- (2) Trigger Trigger is a condition which decides the display timing of the graph. If trigger conditions are not satisfied, waveform will not be displayed. Click of [Data] to set the condition. (In general, set the Motor speed.) Level / Condition / Position are displayed. Click of Level / Condition to set the condition.

77 4D M 109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X

Supply valve type (Index 71) Table 3-16. Supply valve type Sub Size Acc ess Default Content Description index [byte] 1 1 R/W 0x01 Supply valve type of CH0 Set the N.O./N.C. of the supply valve type for each CH. 0x00 : N.C. 0x01 : N.O. ... ... ... ... ... 16 1 R/W 0x01 Supply valve type of CH15 Note The setting must match the supply valve type fitted in vacuum manifold.

) RWw(n+71) IO-Link IO-Link : : Process data Process data Port 2 Port 2 RWr(n+7E) RWw(n+7E) RWr(n+7F) RWw(n+7F) Unit No.2 EX600-GILB RWr(n+80) RWw(n+80) RWr(n+81) RWw(n+81) IO-Link IO-Link : : Process data Process data Port 3 Port 3 RWr(n+8E) RWw(n+8E) RWr(n+8F) RWw(n+8F) RWr(n+90) RWw(n+90) RWr(n+91) RWw(n+91) IO-Link IO-Link : : Process data Process data Port 4 Port 4 RWr(n+9E) RWw(n+9E

(N) EPDM seal Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) For clean room specifications, refer to Pneumatic Clean Series catalog. 0.7 0.6 0.5 0.4 0.3 0.2 40 34 29 23 17 11 OUT IN 57 6 3 29 25 21 17 13 8 42 Standard Stroke 71 61 51 40 30 20 OUT IN 101 8 4 53 45 38 30 23 15 75 Model Standard stroke (mm) 158 136 113 90 68 45 OUT IN 226 12 6 10,

20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300

M8 connector 51 74 Grommet C [dm 3/(sbar)] b b Cv C [dm 3/(sbar)] Cv Single 46 64 0.47 0.41 0.41 0.13 0.13 0.47 2 position Double M5 x 0.8 M5 x 0.8 0.49 0.46 0.49 [0.39] 0.40 0.44 0.37 0.13 0.12 0.12 0.44 0.47 [0.39] 0.45 Closed center SYJ520--M5 77 119 85 0.43 [0.35] 0.42 0.13 [0.10] 0.12 Exhaust center 75 3 position 0.51 [0.38] 0.14 [0.10] Pressure center 54 73 75 115 58 81 Single 53 71

Auto switch model 0.3 (43) 0.4 (58) 0.5 (72) 0.6 (86) 32 40 50 63 241 (54) 322 (72) 402 (90) 482 (108) OUT (804) 1.29 D-C73, C76, C80 D-C73C, C80C Reed switch 12 32 207 (46) 276 (62) 346 (78) 415 (93) IN (691) 1.11 BMA2-032 BMA2-050 BMA2-063 BMA2-040 D-H7A1, H7A2, H7B, H7C D-H7NW, H7PW, H7BW D-H7LF, H7NF 378 (85) 504 (113) 630 (142) 756 (170) OUT (1260) 2.02 Solid state switch 16 40 318 (71

L k Imaginary stroke L' = (Stroke) + k + L k: Distance between the center and end of the plate 6 (Example) q When using CXSJM6-10 and L = 15 mm: Imaginary stroke L' = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 6 ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 w When using CXSJL25-50 and L = 10 mm: Imaginary stroke L' = 50 + 6 + 15 = 71

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 16 16 16 12 15 15 44 50 56

. : . l ' s s i 1070 lN=OlO2kql r(N.m) Bore size Modd to 20 r 3 B ' .50 75 .t( P , 0.29 o.24 o.21 0.18 0.16 0.48 o.39 0.31 o.37 0.33 -^ I McoM 0.51 o.43 0.35 o.31 o.27 MGaL 0.73 o.58 o.48 o.71 0.64 2 0 . .

Square embedded type pressure gauge (except for AR10) AW40K-06 3/4 Pages 63 through 66 Mist separator regulator Series AWM Round pressure gauge AWM20 1/8, 1/4 Panel mount 0.3m (95% filtered particle size) AWM30 1/4, 3/8 AWM40 1/4, 3/8, 1/2 Pages 67 through 70 Micro-mist separator regulator Series AWD AWD20 1/8, 1/4 0.01m (95% filtered particle size) AWD30 1/4, 3/8 AWD40 1/4, 3/8, 1/2 Pages 71

-06-08-01S-3 33 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5 76.5 77 78 41 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 44 45 67 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 10 8 KM14-08-10-02S-3 48 88 89 90.5 94 95 98.5 19 71 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19

direction A (Plug: M-5P) 49 46 38 5 22 12 19 4 40 25 Y Y 5.5 Operating port M5 ~0.8 24 84 Operation direction B (Plug: M-5P) Operation direction B A 7 6.5 13 10 10 13 A 14.8 30 7 24 A 15.8 Z Cross section AA (scale 50%) (N-1) x H G H 6 depth 4.5 5H9 +0.03 N-M4 x 0.7 thread depth 8 0 Bottom through hole 3.3 5H9 +0.03depth 4.5 0 F E Model J N H G F E Z MXW8-25 64 3 32 47 48 55 157 MXW8-50 71

When ordring both the vslve and conneclor assy, include bolh vsh and conneclor ass'y product o 24 inch(momm) Lever ', DC lndicator Example) 80 inch lead wire length rvJ31 20-sLo'*' vJ l G2lt-4r.20 , Socket i DXTI70-71-1 Note: 110VAc type valve must be used with connector wth rectiier only, Not voltage interchangable Lead Wt 39.5'65cmils 0.2-0.33mm, Maj( O.D. Max.

Example Theoretical Output Effective Cushion Length OUT IN Bore size (mm) Effective cushion length (mm) 50 20 25 32 40 Unit: N 7.1 5.8 6.1 6.6 6.6 Bore size (mm) Operating direction Operating pressure (MPa) 0.7 165 220 264 344 422 563 739 880 1150 1370 0.5 118 157 189 245 302 402 528 628 825 982 0.3 71 94 113 147 181 241 317 377 495 589 IN OUT IN OUT IN OUT IN OUT IN OUT 20 25 32 40 50 2

103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 36.5 21.5 18 4.5 10.5 6.5 19 63 9 3 Position Cylinder Series RZQ Foot type/RZQL Foot type (mm) B + Full stroke L Bore size (mm) A LH LS L LD LG B 30 18 6.6 4 107.7 82.5 66.5 32 Special cap bolt 33 18 6.6 4 92 76 117.2 40 39 22 9 5 96.5 73.5 126.7 50 LY 46 102 28 11 5 76 138.2 63 LH Bore size (mm) LX LY LZ X Y X Y X Y LS Full stroke LG LZ LX 4-LD 57 57 71