VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

ZFC Series

Metric size Type (recommended flow rate) Symbol Tubing size Applicable model 04 ZFC100 ZFC100 ZFC200 ZFC200 4 Flow rate l/min (ANR) (SCFM) Symbol Tubing size 100 200 101 201 Max. 20 (0.70) Max. 50 (1.75) Max. 20 (0.70) Max. 50 (1.75) Metric size (release button: light gray) 06 6 08 8 Inch size (release button: orange) Inch size Symbol 03 Applicable model ZFC101 ZFC101 ZFC201 ZFC201 Tubing

Pressure Sensor

kPa 0 -101 kPa 10.1 kPa For compound -100 to 100 kPa -100 kPa 100 kPa For positive pressure -0 to 1 MPa 0 1 MPa -0.1 MPa -13No.PS-OMG0004-D Dimensions PSE54(A)M3 M5 PSE54(A)-M3 PSE54(A)-M5 A 10.8 11.5 B 3 3.5 PSE54(A)01 N01 PSE54(A)R04 R06 PSE54(A)-R04 PSE54(A)-R06 A 4 6 B 18 20 PSE54(A)-IM5 PSE54(A)-IM5H -14No.PS-OMG0004-D Revision history A: For B: Complete revision C: Limited warranty

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

Metric size Type (Recommended flow rate) Symbol Tubing size Applicable model 04 ZFC100 ZFC100 ZFC200 ZFC200 4 Flow rate (/min (ANR)) Symbol Tubing size 100 200 101 201 Max. 20 Max. 50 Max. 20 Max. 50 Metric size (Release bushing: Light gray) 06 6 08 8 Inch size (Release bushing: Light gray) JIS Symbol Inch size Symbol 03 Tubing size 5/32" Applicable model ZFC101 ZFC101 ZFC201 ZFC201 Element

VXA31/32

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

Passage: Common SUP,Common EXH, Stations: 20 Stations, Thread: NPT

Piping: Body Ported, Bar Manifold, Individual Wiring, Stations: 20 Stations, Port Size: None, Thread: NPT

Manifold Type: Body Ported, Bar Manifold, Individual Wiring, Valve Stations: 20 Stations, A, B Port: NPT, Q: -

Piping: Body Ported/Common SUP Common EXH, Stations: 20 Stations, A B Port Size: NPT

Manifold Type: Body Ported, Valve Stations: 20 Stations, A, B Port: NPT, CE Marked: -

Manifold Type: Body Ported, Valve Stations: 20 Stations, A, B Port: NPT, CE Marked: -

Table of Contents

20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.

Electric Grippers

Basic Compact LEHZ10 LEHZ10L 100 100 80 80 Overhang H [mm] Overhang H [mm] 60 60 70%, 40% 40% Pushing force 100% 40 40 70% Pushing force 100% 20 20 0 0 20 40 60 80 100 0 0 20 40 60 100 80 Gripping point L [mm] Gripping point L [mm] LEHZ16 LEHZ16L 140 140 120 120 Overhang H [mm] Overhang H [mm] 100 100 Pushing force 100%, 70%, 40% 70%, 40% 80 80 Pushing force 100% 60 60 40 40 20 20 0 0 20

AC Servo Motor Driver (Pulse input type/Positioning type ）

B1 AWG 20 B2 Note.

TABLE OF CONTENTS

Series 20, 30 2 W.N.C. & All 3 W. 2 W.N.O. 30, 50, 70 Series 20 Series 20, & All 3 W. & E20 & 30 50, 70 & E20 Series 20 Media S.S. Body Brass Body S. S.

CXS

400mm/s 2 20 50 CXSM CXSL CXSM CXSL 10 Weight m (kg) Weight m (kg) 10 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph V = up to 800mm/s 4 Graph V = up to 600mm/s 3 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph

Electric Slide Tables

20 4 18 to 36 10 to 200 10 to 20 1.5 10 to 20 20 to 400 20 3 17.5 to 35 10 to 200 10 to 20 0.5 5 to 7.5 20 to 400 20 1 7.5 to 11 10 to 200 10 to 20 Servo Motor (24 VDC)/Step Motor (Servo/24 VDC) Actuator specifications Electric specifications Lock unit specifications Pushing force 50 to 100% [N] Note 2) LES LESH LECA6 LECP6 LEC-G LECP1 LECPA Speed [mm/s] Pushing speed [mm/s] Max. acceleration

Basic type / Direct mount type Series CY3B/CY3R

$2 are for 20 to 40.

MGG

25 32 40 50 20 25 32 40 50 20 25 32 40 50 Rc 1/8 100mm or more 88 250 to 400 157 80 30 40 12 26 48 12 21 14 82 Rc 1/8 125mm or more 88 350 to 500 175 80 37 13 46 57 31 12 21 14 100 Rc 1/8 150mm or more 90 350 to 600 201 82 37 52 16 38 65 12 21 14 114 Rc 1/8 200mm or more 101 350 to 800 238 92 44 62 20 47 84 12 25 15 138 Rc 1/4 250mm or more 116 350 to 1000 285 104 55 25 75 94 58 14 26 16

REA/REB

25 REAH15, 20, 25 REAH15, 20, 25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 High Precision Guide Type REAH 0.08 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.03 REAH25 0.02 0.06 0.02 0.04 0.01 0.01 0.02 Max.