Unit Size: 7 (75mm), Cup Flange Shape: A (42mm x 42mm), Manufacturer: 41 (OMRON, TECHMAN: TM5, TM12, TM14), Cup Series: ZP (Basic), Cup Diameter: 08 (ø8), Cup Form: U (Flat), Cup Material: S (Silicone Rubber, White), Attachment: with (Guide) Attachment

Piping: 1 (Bottom Direction), Body Color: W (Urban White), Piping Type: Rc, Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: 41 (Copper Extension Nozzle 100mm Length, VMG1-08-250-100)

Piping: 1 (Bottom Direction), Body Color: BU (Dark Blue), Piping Type: N (NPT), Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: 41 (Copper Extension Nozzle 100mm Length, VMG1-08-250-100)

Piping: 1 (Bottom Direction), Body Color: BU (Dark Blue), Piping Type: Rc, Connection Size: H10 (Metric Size One-touch Fitting, ø10), Nozzle: 41 (Copper Extension Nozzle 100mm Length, VMG1-08-250-100)

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note)

MXQ

x 16 M5 x 16 M5 x 12 4.4 4.4 4.4 M6 x 20 M6 x 18 M5 x 14 7.0 7.0 4.4 M8 x 20 M8 x 18 M6 x 18 18.0 18.0 7.0 Metal Stopper Caution 1.

CY1

x 0.8 39 31 51 17 8 CY1R32 7.5 9.5 4.5 21 34 17 M5 M6 x 1 50 41 3 76 6.5 62.5 22 10 CY1R40 7.5 9.5 25.5 7.5 19.5 M5 45 3 39 M6 x 1 60 74.5 28 90 10 6.5 CY1R50 7.5 11 9 M6 3 35.5 19.5 60 92.5 38 110 39 15 10 M8 x 1.25 78 CY1R63 7.5 18 10 M6 3 34.5 118 49 24.5 10 M8 x 1.25 90 70 104.5 39 15 Note 1) FE, FF and HB provide a clearance of 1mm between the body and the floating joint

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

x 6.5 15 15 2 x M5 x 6.5 CS: Conduit DS: DIN terminal DZ: DIN terminal with light Applicable cable 6 to 12 18 67 36 55.3 G1/2 48.9 500 18 36 NPT1/2 63 17.5 63 17.5 42.1 40.6 IN IN 8 8 28 30 30 28 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x M5 x 6.5 15 2 x M5 x 6.5 15 15 Direct Operated 2-Port Solenoid Valve JSX Series Dimensions: JSX20, 20U Port Size 1/8 Body

JA/JAH/JB/JS

-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07

JA/JAH/JB/JS

-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07

VHK

B Q L2 L3 L4 L5 L6 L1 H 1(P) 2(A) C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 1.2 26 23 11 3.5 41 18 54 51 11 M5 M5 M5 VHK-B1A 44.5 14.5 1 27 22 16.5 26 2.0 2.0 29.1 16.5 29 29.1 61.6 58.2 1 8 11 3.5 41 8.6 1.2 13 18 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 32.6 16.5 VHK-01S-01S 1 8 1 8 30 57 32.6 65.2 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

Modular F.R.L. Unit

M 2.8 P 26 T 0 B 104 AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 85 26 35 87 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 41.5 43 30 24 33 12 5.5 50 29.5 5.5 3.2 65 2 Note 1) 141 123 36 60 126 55 57 41 35 14 7 71 28.5 7 4 64 0 194 153 38 80 167 55 57 41 35 14 7 7 4 71 66 30.5 3.5 194 153 38 80 167 72.5 75 50 40 18 9 9 4 88 74 35 3.5 226 187 40 110 220 77.5 80 50

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

MGP

X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5 X 0.8 M5 X 0.8 Rc1/8 12.5 10.5 25 53.5 37.5 11.5 M6 X 1.0 M6

Battery-less

x 0.8 thread depth 10 5 +0.03 +0.01 depth 5 Auto switch mounting groove (2 locations)5 17 5 +0.03 +0.01 depth 5 6 7.5 A 53.4 46 45 44 29 45 24 A 32 C 22.5 51.7 0.3 46 (D/21) x C 65 51 Table operating range1 2 [2] Origin2 21 E D x M5 x 0.84 [Stroke end] 6.54 9 Stroke end [Origin]3 26 A-A G 116 + Stroke 23.5 Stroke F 4H9 ( +0.030 0 ) depth 4 41 29 5 4H9 ( +0.030 0 ) depth 4 42 6 x M5 x 0.8

Aluminum High Vacuum Angle Valve

Rc1/8 Pilot port size XLAV M5: Port 1(P), Port 3(R) Rc1/8: Port 1(P), M5: Port 3(R) XLA 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 Weight (kg) XLAV 0.29 0.49 1.14 1.64 2.96 5.06 10.7 18.6 Note 1) Conductance is the value for an elbow with the same dimensions.

Modular F.R.L. Units

Optional/Semi-standard specifications N.C.: Gray N.O.: Black B B B B B Dimensions Barb fitting Applicable tubing: T0604 Width across flats 14 1/8 Width across flats 17 1/4 M5 x 0.8 Thread type/Rc, G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Model Standard specifications Bracket mount P1 P2 A B C E F G J M 30 41 41 50 50 Q1 24 35 35 40 40 Q2 33 R 5.5 7 7 9 9 S 12 14 14

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 YA M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.062 0 +0.062 0 +0.074 0 +0.074 0 +0.087 0 MHSJ3-32D MHSJ3-40D MHSJ3-50D MHSJ3-63D MHSJ3-80D 34H9 42H9 52H9 65H9 Rc 1/8 (G 1/8, NPT 1/8) 82H9 569 Parallel Style Air Gripper

Rotary Actuator/Vane Type

14 0 0.043 1.5 1.5 8 7 10 0.5 25.5 14 13 21 M4 x 0.7 M4 x 0.7 4.5 4.5 M5 x 0.8 30 16 4 56 64.5 22 44 36 26 59 30 50 47.5 13 22 80.005 0.020 16 0 0.043 2 2 9 8 12 1.0 33.5 15.5 14 25 M5 x 0.8 M5 x 0.8 5.5 5.5 M5 x 0.8 42 21.5 4.5 71.5 82.5 24 52 42 29 69 40 63 53 15 30 100.005 0.020 25 0 0.052 3 4.5 10 9 20 1.0 39 21 20 31.6 M5 x 0.8 M5 x 0.8 5.5 5.5 M5 x 0.8 47.8 25 5 87.5 98 30 64 52 38