JXCx-OMT0062

Completed to move to 10mm away. 70 - 13.2 Pushing operation Example) Move the electric actuator from the origin to 100mm point with 100mm/s. (Using Step No.1) From the 100mm point, the electric actuator starts the pushing operation of 10mm/s speed and 50% or less force (the pushing distance is up to 5mm).

Modular/F.R.L. Units Series AC

Drain) PANEL FITTING IN OUT Z CC Bowl Detail EE (AW20) AA K L V U X W T J S Y Q F Bracket and Mounting Nut (Optional) H IN OUT Note: Sight glass not applicable to AW20.

Modular F.R.L. Units

Note 1) D Note 3) Option Attachment Semi-standard + r Nil G M b Without pressure gauge Round type pressure gauge (with limit indicator) Round type pressure gauge (with color zone) Pressure gauge Note 4) + Note 5) Nil K Check valve c Without attachment Mounting position: AF+AR+K+AL + Nil S Note 6) d Without attachment Mounting position: AF+AR+S+AL Pressure switch + t Nil T Note 6) T-interface

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

asilltr

Female lhread length {"1') is shonerfor the lollowing . 2o0 (2') 1/g & 1A st. 1/s & 1/a st. r/s & 1/a st. l=o.44 25O (2112')' I/s st. r/s st. '/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

Air Cylinder NCQ7 Series Compact Cylinder

Female lhread length {"1') is shonerfor the lollowing . 2o0 (2') 1/g & 1A st. 1/s & 1/a st. r/s & 1/a st. l=o.44 25O (2112')' I/s st. r/s st. '/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

ZQ-OM01301

5LF *ZQ000MAK1 5L*ZQ000MAK2 5LEC EE FC FE EA EB FA FB *ZQ000MAK1 5L--S *ZQ000MAK2 5L--S 34 - Doc.

Vacuum Module Series ZX

B Vacuum Pressure Switch Unit/Adsorption Confirmation Switch: ZSP1Adsorption Confirmation Switch Specifications Small diameter nozzle/0.3 to 1.2 ZSP1-S ZSP1-B Unit no.

Vacuum Ejector Series ZM

VJ10-36-1A-10 . 2 pcs.

ZX

Without connector None Nil G H Nil Grommet type Lead wire length 0.3 m (Applicable to DC only) Lead wire length 0.6 m (Applicable to DC only) Air operated Z With light/surge voltage suppressor S With surge voltage suppressor In the case of AC, S is not available. Note) In the case of K1 or J1 (combination of supply and release valves), M type plug connector can not be used.

Modular F.R.L. Unit

Description Symbol Nil None AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size AW + [S] + AL AC20A to 40A S Body size Port size Pressure switch AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AF + AFM + [S] + AR AC20C to 40C M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S]

C95Series

l S.

SYJ Series

When equipped with a light, be careful not to damage the light Surge Voltage Suppressor For AC (There is no S type because the generation of surge voltage is prevented by a rectifier.)

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod r t y Replacement Parts No. u Description Material Carbon steel NBR NBR Part no.

80

Use a fluid with a kinematic viscosity of 50 mm2/s or less.

Manifold Specifications

Electrical entry SC (T only) Type SU Type SC Type SC Type SU Type SC Type SU AXT622-5A AXT336-4AStations AXT336-5Stations Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod

E-P HYREG ® Series VY1

3% F .S. 5% F .S.

ZB-OM00301

2 20m/s 2/ 2 150m/s 2 100m/s 110500Hz XYZ 2 () 2XYZ 3 3 1 / 1 ZB1-VQ110UZB1-VQ120UZB1-VQ110LZB1-VQ110N.C. 1 N.C.

Ejector Valve Unit Series ZYY/ZYX

Note 2) V, S and R specifications are 45T, 45T1.