Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z y z M2 z Y m3 x g x X m4 x g x Y M3 m4 x g g: Gravitational acceleration Dynamic Moment z Mounting orientation Horizontal Ceiling Wall Vertical M1 x a x mn x g 1.4 100 Dynamic load FE 1 3 a Dynamic

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19 19 19 Weight kg 0.5 0.6 0.7 Weight kg 0.5 0.6 0.7 NAAMS code ACA206M ACA207M ACA208M NAAMS code ACA216M ACA217M ACA218M A B C D E F G H I A B C D E F G H I Part no.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

200 300 34 84 122 172 50 4 4.5 3 6 16 22 46 40 M8 x 1.25 92 24 48 124 200 300 36 86 124 174 66 5 6 4 8 20 24 48 50 M10 x 1.5 28 52 128 200 300 38 50 88 124 174 110 80 5 6 4 8 20 24 63 M10 x 1.5 MLGPM (slide bearing)/A, DB, E dimensions MLGPL (ball bushing)/A, DB, E dimensions A E A E Bore size (mm) Bore size (mm) DB st50 50200200

Vacuum Unit

g x 5 pcs. + 5 g x 5 pcs. + 141 g = 661 g 18 A ZK2mA Series Ejector Exhaust Characteristics/Flow Rate Characteristics (Representative value) The flow rate characteristics correspond to the standard supply pressure.

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p to 2.l soenoids poss ble A, B port size (inch) A, B port size (metric) o1l8 One{ouch 05/32' One touch flling o1,'4 One{ouch o52' One-touch or.a" one iouctr o5./16' One touch fl sv1000 One touch llting o 1 O One-touch l1t ng sv2000 o 1 2 Onelouch Ilt ng sv3000 o5./16' Onelouch o:'/8'One.touch o5./16' Onetouch o3' One touch o 1 2 One touch filting sv4000 Rc 3/8 Bc 3/a G 1i4 G 3 G 3,/8 B

Gun Type Ionizer

100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450

Compact Electric Actuator Series LG1

Motor specifications 100 200 300 400 500 600 700 800 900 1000 1200 100mm 200mm 300mm 400mm 500mm 600mm 700mm 800mm 900mm 1000mm 1200mm G R Y Matsushita Electric Industrial Co., LTD Mitsubishi Electric Corporation Yaskawa Electric Corporation Motor output 2 100W Power supply voltage 1 2 0 100/115VAC 50/60Hz 200/230VAC 50/60Hz Without motor Feed screw lead (Refer to Table 1 below for applications

VXP21/22/23

Add 10 g for conduit type, 30 g for DIN terminal type, 60 g for conduit terminal type respectively. Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

How to Order Valve T 5M N7 VQZ2120 SY Example/Valve C6 5M VQZ2120R SYJ External pilot specification Thread (Cylinder ports and P, R ports) SX VK Rc(PT) External pilot port N NPT VZ M3 x 0.5 (VQZ2000) M5 x 0.8 (VQZ3000) T NPTF F G(PF) VF Note) R port of VQZ2000 is only G(PF) 1/16 VFR Cylinder ports VP7 Symbol M5 02 N1 N3 N7 N9 N11 Applicable tube O.D.

ASR

mm/sec Cylinder stroke: 200 mm AQ The set pressure can be either fixed or variable.

3 Position Cylinder Series RZQ

C A B Full stroke Entire stroke extension by pressurizing A, B and C ports. 3 Position Cylinder Series RZQ 32, 40, 50, 63 How to Order RZQ 32 200 100 A F9N Mounting Number of auto switches A B L F G D Nil Both ends tapped 2 pcs.

CYV

x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide

HRX-OM-S004

(with a handle) *2 : Unit : MPa/ C(degree Celsius) Piping thread type Power supply 20 3phase 200VAC(50Hz) Nill Rc 3phase 200 to 230VAC(60Hz) F G (Rc-G thread adapter set is included) 40 3phase 380 to 415VAC(50/60Hz) N NPT (Rc-NPT thread adapter set is included) 46 3phase 380 to 415VAC(50/60Hz) 3phase 460 to 480VAC(60Hz) Fig. 2-1 Product model number HRS Series 2.1Model number of product 2

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A B C D E F G H J 1.6 M5 2.3 3.2 For other special options, refer to page 462.

Compact

l Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

CLS

500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa ) P 0.5 MPa ) P 250 4000 4000 3000 3000 200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed:

Mechanically Jointed Rodless Cylinder Series MY1

X Z Y m x g x X x m x g Vertical mounting Mounting orientation Ceiling m Wall m Vertical m Note) Static load m Horizontal m M M m x g x X m x g x X m x g x Z M Static moment z y Y m x g x Y m x g x Y m x g x Z M Z m x g x X m x g x Y m x g M Note) m is a mass movable by thrust.

HRX-OM-R005

Model number: HRS060-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

piping 2-Rc 1/4 (Hexagon socket head taper plug) VV VV 2-Rc 1/4 (Hexagon socket head taper plug) S 1.1 WX 17.5 Bottom port (ZZ) (Applicable O-ring) 2-10 Y Bore size (mm) 50 63 GC 12 15 J M14 x 2 M16 x 2 MM M8 x 1.25 A 212 245 B 17 19 C 10.5 12.5 CH 41.5 47.0 G 27.0 29.5 GA 25.0 27.5 GB 37.5 39.5 H 124 149 K 28 32 L 250 290 LD 11 14 LH 57 65 LL LW 168 200 M 15 16 N 47 50 NC 44 60 NE 122 147

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S F S + m g S F S m g S Absorbed energy E E1 + E2 E1 + E2 E1 + E2 E1 + E2 Note 2) E 2 2 E 2 2 E 2 2 E 2 2 Equivalent mass Me Note 1) This is the momentary speed at which an object is impacting against a shock absorber.