Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

Dimensions/40 to 100 Basic/CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(mm) H I J K L B U Z A N O P S C D E F M Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 65 31.5 14 82 5.5 9 depth 7 Rc 1/8 58.5 12 16 45 20 34 40 M10 x 1.5 69 5 14 8.5 67 35 14 84 5.5 9 depth 7 Rc 1/8 66 12 16 52 22 40 50 M12 x 1.75 86 7 18 11 76 41 19 98 6.6 11 depth 8 Rc 1/4 80 15 20 64 25 50 63 M12 x 1.75 103 7 18 11 80 47.5 19 102 9 14 depth 10.5 Rc 1/4 93 15 20 77 27 60 80 M16 x 2 132 6 22

Rubber seal 5 Port Solenoid Valve Series SYJ5000

position 0.4 [0.37] 0.15 [0.10] Pressure center 54 73 75 115 58 81 Single 53 71 0.70 0.47 0.40 0.12 0.36 0.19 2 position Double C6 (One-touch 0.72 0.67 0.82 [0.44] 0.44 0.41 [0.41] 0.41 0.34 0.12 0.37 0.54 0.19 0.19 Closed center M5 x 0.8 SYJ520--C6 fitting for 6) 0.38 [0.38] 0.36 0.11 [0.11] 0.11 84 126 92 Exhaust center 82 3 position 0.41 [0.39] 0.23 [0.12] Pressure center 81 (47) 100 (66) 102

SMC Basic Pneumatics

magnetic coupling, unguided Guided types, with magnetic coupling Guided, with mechanical coupling Slide Units Hollow Rod Cylinder linear Rotating Cylinder Air Chuck (GrippeO Non-Retum Valves Speed Conlrollers Shutlle Valve Quick Exhausl Valves 88 88 88 90 58 59 60 63 63 63 63 63 66 66 66 66 67 67 68 68 69 69 91 91 ol 91 o, 92 93 94 94 94 95 96 96 96 96 97 97 98 98 98 99 oo 101 1 0 1 101 101 102

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

I = I + I kgm m, m: Mass of loads I and I kg r, r: Diameters of loads I and I m L: Distance from the rotational axis to load I center of gravity m Calculation example When m 2.5kg, m = 0.5kg, r = 0.1m, r = 0.02m, L = 0.08m I = 2.5 x = 1.25 x 102 0.1 kgm 2 0.02 I = 0.5 x + 0.5 x 0.08 = 0.33 x 10kgm I = (1.25 + 0.33) x 10= 1.58 x 10kgm 16 Technical Data/Moment of Inertia Specific Application

Plate Cylinder with Lock Series MLU

Cylinder with Lock Series MLU Dimensions Axial foot type LY (mm) LH LS LH ZZ LT 114 132 140 166.5 LX 3.2 4.5 4.5 5 LY 11 12 15 18 LZ X 6 8 10 11 Y LD Model LT 29 37 46 57 56 71 89 109 5.5 6.6 9 11 23 27 31 37 12 16 18 21 144 164 177 209.5 MLUL25 MLUL32 MLUL40 MLUL50 LS + Stroke X Y X Y LX LZ 4-LD ZZ + Stroke Front flange type 2-FD FY FV (mm) FV FT FX 76 94 118 144 FY 14 16 18 22 FZ 66 82 102

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

YC RB RB NA B XA, depth XB NB Q 4-M6 x 1, thread depth 12 (mounting threads) O 20 20 FX FY FZ (Open DO) (Closed DC) WA, depth WB 4-M5 x 0.8, thread depth 10 Attachment mounting threads CB CA M5 x 0.8 (finger opening port) Open EO Closed EC K L J M5 x 0.8 (finger closing port) G I M (mm) I 9 11 Model MHS2-50D MHS2-63D G 37.5 44 FZ 6 7 FX 31 38 FY 28 34.5 EC 22 30 EO 34 46 DC 70 86 DO 82 102

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

26.3 12.8 35.6 20 20 21.9 28.5 15.2 37 33 33 18.4 27.8 10.4 18.2 37 33 33 19.4 27.8 12.8 29.8 34.8 35.8 40.8 18.5 17 R 1/4 39.6 35 35 21.9 30.4 15.2 20 47.5 38 38 23.8 38.3 18.5 41.9 55 59 19.4 30.4 12.8 44.4 57 61 21.9 32.9 15.2 35.6 40.6 41.9 46.9 23 19 R 3/8 20.9 46.1 59 63 23.8 34.6 18.5 47.3 61 65 25 35.8 20.9 50.9 100 107 23.8 36.6 18.5 25.4 42.4 47.4 50.6 55.6 28.6 24 R 1/2 52.5 102

Ambient Dryer Series AMG

1 I.{ 50 114 139 13 100 10 t 15 5 9 5.5 v 74 4.5 AMG25O 3/8 '152 13 1 1 3 6 10 '| 69 n '12 4 84 a 5 2 n Ai/lc350 1/2 144 16 145 s s '10 198 m 2 14 7 80 100 g 2.3 ANtG450 314 205 19 147 106 106 JO s 10 14 88 1 1 0 3.2 AMG55O 239 200 10 257 100 s 10 't6 102 130 m 10 4.5 AIVG&5O 1 112 291 c 253 r60 160 10 364 150 .10 20 1 1 s 136 180 4.5 2 48 a 348 220 ?

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

FZ H 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 23 10 60 60 44 18 45 25 9 14 17.5 M8 x 1.25 18 16 20 M14 x 1.5 30 1/4 17 10 77 44 95 66 50 25 9 73 73 53 20 50 28 11 17 17 M10 x 1.5 20 22 22 M16 x 1.5 30 3/8 19 10 95 53 115 73 63 28 8 80 80 60 22.4 55 30 11 17 17 M10 x 1.5 22 20 25 M18 x 1.5 30 3/8 21 12 102

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

light 3 1 5 Indicator light 5 1 3 39 36.5 Manual override 2-5.5 mounting holes Manual override 39 36.5 44 41.5 2-5.5 mounting holes 44 41.5 M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102

Filter for Cleaning Solvent Quick Change Filter Series FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only

Series H, DL, L, LL Self-align Fittings

Principal Element Material Body Nut C36004BD, C3771BE C3604BD Sleeve C2700T 102 Series H, DL, L, LL Self-align Fittings Model Male connector Male run tee P. 104 H Use to pipe in the same direction from female thread portion. Most general type. P. 105 DY Use to branch line in the same direction from female thread and in 90 direction.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

The center of the stroke is aligned with the center of the clean bench. 250 730 300 620 102 Made to Order Specifications Series LJ1 Dust Seal Specification (-X70) The dust seal (dust cover) prevents the entry of dust, paper dust and scraps, etc. Dust Cover Without dust seal With dust seal Note 1) Dust seal material: Polyurethane Consult P/A for details.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Polypropylene resin Stud Chuck SUS304 stainless steel Guide, Stopper, Drive bushing SUS304 stainless steel Collet, Release button Polypropylene resin Seal, O-ring, Bumper EPDM Particulate Generation Grade Classifications Relationship of Operating Temperature and Maximum Operating Pressure 1.2 104 Average particle concentration Particles/ft3 Maximum operating pressure MPa Grade 4 1.0 103 0.8 102

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

O-ring) Y Bore size (mm) 16 20 J M5 x 0.8 M6 x 1 MM M4 x 0.7 M5 x 0.8 A B 6.0 7.5 C 3.5 4.5 CH 25 26 G 13.5 12.5 GA 8.5 GB 16.2 20.0 H 52 58 K 10 12 L 110 130 LD 3.6 4.8 LH 38 39 LL 35 45 LW 84 88 M 6.0 7.5 N 20 25 NC 14 17 NE 49.5 55.5 NH 16.5 21.7 NW 56 60 090 110 Bore size (mm) 16 20 PA 40 50 PB 94 100 PG 3.5 4.5 PP Q 153 191 QQ 9 10 QW 48 45 RR 11.0 14.5 TT 15 18 UU 14 12 VV 10.0 12.5 W 102

Series MXP Precision Air Slide Table

26.7 10.5 5.5 46 35 34 8.5 4-M61 4-M50.8 Bottom hole diameter 5.1 7 deep 30 19 6.5 A W 320.05 0.50.05 8 D B Piping port 2-M50.8 47 13 J Mounting base side B D 16.5 14.5 Across AA MXP16-30 Without magnet and switch rail 2-M20.4, 3 deep For magnet mounting 2-M30.5, 3.5 deep 8 For rail mounting 10.7 8.5 6-M50.8 20 20 7 deep L (mm) Model G H J K L M S V W Z MXP16-20 18 58 93 40 36 40 20 82 65 102

Air Slide Table Series MXQ

(Unit: N) Cylinder bore size (mm) Rod size (mm) Piston area (mm) Operating direction Operating pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 15 23 30 38 45 53 75 OUT IN 45 68 90 113 136 158 226 12 6 34 51 68 85 102 119 IN 170 80 121 161 201 241 281 OUT 402 16 8 60 91 121 151 181 211 IN 302 OUT 628 126 188 251 314 377

Series MXQ Air Slide Table

95 Series MXQ Air Slide Table Dimensions MXQ 8 96 Air Slide Table Series MXQ Dimensions MXQ 8 97 Series MXQ Air Slide Table Dimensions MXQ 8L/Symmetric Type 98 Air Slide Table Series MXQ Dimensions MXQ 8L/Symmetric Type 99 Series MXQ Air Slide Table Dimensions MXQ 12 100 Air Slide Table Series MXQ Dimensions MXQ 12 101 Series MXQ Air Slide Table Dimensions MXQ 12L/Symmetric Type 102

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A A A B B B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C C C D D D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133