Hydraulic Cylinders

depth 6.5 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 40 M16 x 2 14 depth 8.6 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 50 M20 x 2.5 17.5 depth 10.8 71 60 11 28 24 24 8 58 11 81 1/4 22 10 63 M27 x 3 20 depth 13 80 67 13 35.5 30 33 9 69 13 97 1/4 25.5 10 80 M30 x 3.5 23 depth 15.2 95 78 17 45 41 36 14 86 15 117 3/8 30 15 100 M39 x 4 26 depth 17.5 122 96 26 56 50 45 21 106 17 142 3/8 36 15 Note

IDG

(Refer to page 14-19-11.)

MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

MLGP

120 148 162 M6 34 35 38 34.5 27 32 39 16 20 20 14 44 52 64 77 40 46 58 12 16 16 10 11 13 16.5 27 32 39 44 47 50 14 54 64 78 6.5 6.8 7.5 14 19 19 4 7 6.5 40 50 63 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 107 M8 39.5 14 44 11 12 115 M10 46 16.5 49 13.5 16.5 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st25 25

MLGP

120 148 162 M6 34 35 38 34.5 27 32 39 16 20 20 14 44 52 64 77 40 46 58 12 16 16 10 11 13 16.5 27 32 39 44 47 50 14 54 64 78 6.5 6.8 7.5 14 19 19 4 7 6.5 40 50 63 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 107 M8 39.5 14 44 11 12 115 M10 46 16.5 49 13.5 16.5 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st25 25

Rotary Cylinder Series MRQ Size: 32, 40 1

DGraph (2) Cylinder Output on the Retracting Side (Double acting) 20150 1500 Tube bore size [mm] 100 1000 40 Side load Balance weight 40 50 400 500 32 20 25 30 200 250 300 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 15 150 Allowable Side Load on the Piston End (Nm) 10 100 Stroke of linear part Size 40 5 10 15 20 25 30 40 50 75 100 4 5 40 50 32 40 14 14 13 13 13 12 12 11

VHK

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

VHK

L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 L2 Q 18 61.6 58.2 2.0 2.0 29 29.1 44.5 14.5 1 27 22 16.5 26 41 29.1 16.5 3.5 11 1.2 26 23 11 30 54 51 11 M5 M5 M5 VHK-B1A VHKm-01S-M5 VHKm-M5-M5 1 8 18 41 32.6 16.5 3.5 11 44.5 14.5 1 27 22 16.5 26 8.6 1.2 13 57 13 VHK-B1A VHKm-01S-01S 1 8 1 8 32.6 65.2 VHKm-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5

CL

11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 4-13-10

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

136 128 12 146.5 138.5 13 157 149 14 167.5 159.5 15 178 170 16 188.5 180.5 17 199 191 18 209.5 201.5 19 220 212 SS5YJ3-32, S32Stations -C4 Station n L1 L2 Station 2 42.5 33.5 Station 20 231.5 222.5 3 53 44 4 63.5 54.5 5 74 65 6 84.5 75.5 7 95 86 8 105.5 96.5 9 116 107 10 126.5 117.5 11 137 128 12 147.5 138.5 13 158 149 14 168.5 159.5 15 179 170 16 189.5 180.5 17 200 191 18 210.5 201.5 19

Lubrication Equipment

level gauge B B AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 81.5 122 142 177 177 254 268 162 197 197 274 288 Model Port size A B C D LL M P E F G H J K Bracket mounting dimensions N 324(374) 334(384) 334(384) 336(386) 336(386) 38 41 39 45 45 106 106 106 106 106 53 70 75 90 95 70 70 70 70 70 66 66 66 66 66 25 18 16 35 35 11 11 11 11 11 3.2 3.2 3.2 3.2 3.2 13 13 13 13 13 90 90 90 90

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 Parts included 11 Gasket 1 11 Gasket 1 11 Gasket 1 11 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 in seal kit 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 Please refer to P19 to 21 for the product construction.

AC Servo Motor Driver (Pulse input type/Positioning type)

Servo amp lifier Driver (Note 7) (Note 7) CN1 CN1 (Note 2) 24VDC RA1 (Note 4, 9) 2 OPC 9 ALM Trouble (Note 6) 1 DICOM Travel completion 10 MEND RA2 13 DOCOM (Note 9, 11) (Note 13) Ready EM1 SON MD0 8 4 3 (Note 3, 5) Forced stop 11 RD RA3 Servo-on Electromagnetic brake interlock 12 MBR RA4 Automatic/manual selection DOG (Note 9, 10, 12) 25 Proximity dog 10m max. Point table No.

MXW Series Long Stroke Slide Table

11 14 Parts List Note Material No.

ML2B

Reed switch D-X 20Data 10-13-17

ML2B

Reed switch D-X 20Data 10-13-17

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

44.5 28 37 54 71 80 22 34 43.5 58 73 9 12.5 16.5 20 24.5 6 7 10 12 15 -X M8 x 1.25 20M10 x 1.5 M12 x 1.25 Data RE 12.5 14 22.5 26 33 RF RG SA SB 4 6 12 15 20 SC 1.4 1.8 2.2 2.8 3.4 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 8.5 8 10.5 11 13 33 43 62 82 93 14.5 18.5 27 36 42 10-11-13 13 Series MIW/MIS Dimensions: Single Finger Type MIS-D GC GB GD PE FC LB FA B JA FB LC 2-GA EB JB Scraper

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

16.5 20 24.5 22 34 43.5 58 73 28 37 54 71 80 14.5 19 28.5 35.5 44.5 -X M8 x 1.25 20M10 x 1.5 M12 x 1.25 Data RE 12.5 14 22.5 26 33 RF RG SA SB 4 6 12 15 20 SC 1.4 1.8 2.2 2.8 3.4 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 8.5 8 10.5 11 13 33 43 62 82 93 14.5 18.5 27 36 42 10-11-13 13 Series MIW/MIS Dimensions: Single Finger Type MIS-D GC GB GD PE FC LB FA B JA FB LC 2-GA EB JB Scraper

ZR

(Refer to page 13-3-37.)