Vacuum

Flat wlth rib 1 0 1 2 21 29.946 5 6 1 . 7 1 3 1 5 't2 21 29.946 5 6 3 1 . 8 '19 20 1 6 1 8 12.5 215t301 46.S 5 3.5 Dep type 23 23 22 23 23 22 50 48 50 Applicable Tube 56 54 56 54 57 co 57 '5l3e" lube may be subslituled for 4mm.

Vacuum Pad

-A12 V V ZP3PA-T2-AG2 V V ZP3PA-T2-AG3 V V p. 11 w T female thread adapter Pad diameter Part no. 20 25 35 50 Dimensions w T male thread adapter assembly w T female thread adapter ZP3PA-T1-B5 V V ZP3PA-T2-B8 V V p. 11 q Pad unit Dimensions Part no.

Fluoropolymer Piping Equipment

Symbol Symbol Applicable tubing size (inch) 2 3 4 5 6 Fitting type Symbol T1 T2 T3 T4 Class No.

HRL

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 70 x 4.186 x 103 x 4.0 60 = = qm x C x (T2 T1) 860 Q = = 19535 [J/s] 19535 [W] = 19.5 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 19.5 [kW] x 1.2 = 23.4 [kW] 1 x 70 x 60 x 1.0 x 103 x 4.0 860 = Thermo-chiller T1: Outlet temperature Q: Heat generation amount 1680 [cal/h] 860 Users equipment = T = T2 T1

Thermo-chiller

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation T1: Outlet Thermo-chiller temperature amount Customer equipment T = T2 T1 7325 [W] = 7.3 [kW]

Thermo-chiller/Rack Mount Type

Q = qm x C x (T2 T1) r x qv x C x iT 60 = 1 x 10 x 4.2 x 103 x 2.0 60 = Q = qm x C x (T2 T1) 860 = 1400 [J/s] 1400 [W] g x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 1400 [W] x 1.2 = 1680 [W] 1 x 10 x 60 x 1.0 x 103 x 2.0 860 = qv: Circulating fluid flow rate Q: Heat generation amount Users equipment T2: Return temperature 120 [cal/h] 860 = 1400 [W]

Lightweight and Compact

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation amount T1: Outlet temperature Thermo-chiller Users equipment T = T2 T1 7325 [W] = 7.3 [kW] Cooling

HRS100/150

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Thermo-chiller qv: Circulating fluid flow rate Q: Heat generation amount T2: Return temperature Users equipment 7325

33

Q = qm x C x (T2 T1) r x qv x C x iT 60 = 1 x 10 x 4.2 x 103 x 2.0 60 = Q = qm x C x (T2 T1) 860 = 1400 [J/s] 1400 [W] g x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 1400 [W] x 1.2 = 1680 [W] 1 x 10 x 60 x 1.0 x 103 x 2.0 860 = qv: Circulating fluid flow rate Q: Heat generation amount Users equipment T2: Return temperature 120 [cal/h] 860 = Thermo-chiller

energy saving effect

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 70 x 4.186 x 103 x 4.0 60 = = qm x C x (T2 T1) 860 Q = = 19535 [J/s] 19535 [W] = 19.5 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 19.5 [kW] x 1.2 = 23.4 [kW] 1 x 70 x 60 x 1.0 x 103 x 4.0 860 = Thermo-chiller T1: Outlet temperature Q: Heat generation amount 1680 [cal/h] 860 Users equipment = T = T2 T1

53

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation amount T1: Outlet temperature Thermo-chiller Users equipment 7325 [W] = 7.3 [kW] T = T2 T1 Cooling

Thermo-chiller

Q = qm x C x (T2 T1) x qv x C X T 1 x 35 x 4.186 x 103 x 3.0 60 = = 60 qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x T = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 860 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Thermo-chiller qv: Circulating fluid flow rate Q: Heat generation amount T2: Return temperature Users equipment 7325

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

RLQ

Bore size (mm) 32, 40 50, 63 T2 T1 M F E D B Part No.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L : Stroke [mm] (Operating condition) T2 = T1 T2 T3 T4 200 0.5 300 (0.1 + 0.1) 300 = V : Speed [mm/s] (Operating condition) T1 = V/a1 [s] T3 = V/a2 [s] = 0.57 [s] a1: Acceleration [mm/s2] (Operating condition) T2: Constant speed time can be found from the following equation.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

= = 0.90 [s] T4 = 0.05 [s] T2 can be found from the following equation.

Air Pilot Operated Series NVSA

OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .

Compact Cylinder with Air Cushion and Lock Series RLQ

T2 Approx. Max. T2 Approx. T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

Compact

SS-T T2: Constant speed time can be found from the following equation.

SMC Basic Pneumatics

In the case of characteristic a, time delav to switch a valve with switching pressure ps will be lt, b it will be increased lo t2.