5

V V V V V V V MB 20 V V V V V V Tie-rod V CA2 25 V V V V V V V CS2 32 V V V V V V V Compact V V V CQS 40 V V V V V V V V V V CQ2 Free mount V V CU 50 V V V V V 63 V V V V V v: Standard 80 V V V V V 100 V V V V V 125 V 140 V D160 V P. 141 P. 155 P. 172 P. 198 P. 212 P. 183 P. 225 P. 233 P. 251 P. 265 P. 285 P. 294 P. 309 -X 137 Smooth/Low Speed Cylinders CQlY/CQlX Series Added compact foot

High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 B XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

Smooth Cylinder/Low Speed Cylinder

V IC circuit 12 V 5 V, 12 V 5 V IC circuit IC circuit IC circuit MQ With diagnostic output (2-color indication) A96V A93V A90V 100 V 100 V or less 100 V, 200 V 200 V or less 24 V or less 3-wire (NPN equivalent) Yes RHC No Yes No Yes No Grommet 12 V Relay, PLC RZQ Connector 24 V 2-wire IC circuit PLC 12 V Terminal conduit Yes 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

Vacuum Unit

Symbol Type Note Nil Without option V V B V None (SI unit only) C V V D V None (SI unit only) E Pressure switch for vacuum 0 to 101 Screwdriver operation type long lock nut Screwdriver operation type long lock nut Cannot be selected when e is J Can be selected only for the combination of J and K E Vacuum break flow adjusting needle V V F V None (SI unit only) H V V J V None (SI unit

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

K K K J K, T K K XA51 K K J J J K K J J J K K K J J J J XA52 MSZ XA53 J J J J J J J XA55 CRQ2X MSQX J XA57 J Reversed shaft, Change of double shaft length A combination of up to two XAs are available.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

J79W F7BA 200 V 100 V Relay, PLC Yes 2-wire 12 V Connector 24 V Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Yes Relay, PLC 24 V Water resistant (2-color indication) 12 V 2-wire Grommet With diagnostic output

Hydraulic

V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA a A MA a Air release R (max.)

Table of Contents

Type V regulator (AR) is modified to produce the micro mist separator regulator (AWD).

•

(NPN) 1 5' . 12 V L3w" . (PNP) 2wi,e 1"-" 24 V , 5 V, 12V M9NA G rommet 13-wlre (NPN) M9PA I( ( l 3-wire (PNP) . , IWaler reSlS lanl (2color 1 nc!lCaIlQ Il) 12 V M9BA I C ( . 5 V. 12 r~~~r-+~~ -~ ' IC Cii~""ili 2wire 14wIr. (NPN) 5 V , 1. 1; "'co" 1"-~"-:':""2-' Vf"'I~..,.) ~ V"c cr),: ,+;--,1~:o~-+_~ = -+~-+:=-+,1: =~__f'I C,-,;;~ = I or"'""'.j,"ili Relay.

Air Cylinder

) Note 13) v v v v v XC9 Note 15) Note 14) Note 14) v v v v v v v XC10 v v v v v v v XC11 v v v v v XC12 v v v v XC13 v v v v XC20 Note 15) v v v XC22 Note 2) v v v v v v XC27 v v v v v v v XC29 v v v v XC35 v v v v v v v XC37 v v v v v XC42 v v v XC85 X446 Note 8) Copper-free for the externally exposed part.

TABLE OF CONTENTS

H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

Best Pneumatics Vol. 14

AC20A to 40A AW + AL + [V] Residual pressure relief 3 port valve V AC20B to 50B AF + AR + [V] Accessory AC20C to 40C AF + AFM + AR + [V] AC20D to 40D AW + AFM + [V] Description Symbol Applicable model [V] + AF + ARK AC20B to 50B Nil C D E Residual pressure relief 3 port valve V1 [V] + AF + AFM + ARK AC20C to 40C AC10 to 60 Float type auto-drain (N.C.) (4) [V] + AWK + AFM AC20D to 40D

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

5 V Grommet (NPN equivalent) Yes Yes 100 V 12 V 24 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Relay, PLC 3-wire (NPN) 2-wire IC circuit 5 V, 12 V 3-wire (PNP) Relay, PLC 12 V 2-wire Grommet 24 V IC circuit 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) 5 V, 12 V 12 V 2-wire Solid state switches marked with are produced upon receipt of order.

Modular F.R.L. Unit

J G A OUT IN OUT IN A G H H M M AR50, 60 AR30, 40 J G J G A A IN OUT IN OUT H M M H Parts list Material Note No.

MY1

(L) 5 (Z) Z76 Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Reed switch IC circuit 5 V Yes Yes Grommet Relay, PLC 12 V 100 V 24 V Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V Solid state switch Relay, PLC 12 V Grommet 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

IC circuit A56 5 V Reed switch Solid state switch A53 12 V Grommet Yes Relay, PLC 24 V A54 2-wire 100 V, 200 V Diagnosis indication (2-color) A59 W F59 3-wire (NPN) 5 V, 12 V IC circuit F5P 24 V 3-wire (PNP) J59 12 V 2-wire J51 100 V, 200 V Relay, PLC Yes Grommet F59 W 3-wire (NPN) 5 V, 12 V IC circuit Diagnosis indication (2-color) F5PW 3-wire (PNP) J59 W 24 V 2-wire F5BA

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

IC circuit A56 5 V Reed switch Solid state switch A53 12 V Grommet Yes Relay, PLC 24 V A54 2-wire 100 V, 200 V Diagnosis indication (2-color) A59 W F59 3-wire (NPN) 5 V, 12 V IC circuit F5P 24 V 3-wire (PNP) J59 12 V 2-wire J51 100 V, 200 V Relay, PLC Yes Grommet F59 W 3-wire (NPN) 5 V, 12 V IC circuit Diagnosis indication (2-color) F5PW 3-wire (PNP) J59 W 24 V 2-wire F5BA

CJ2

V 100 V 2-wire Yes Yes 12 V Relay, PLC Connector 24 V With diagnostic output (2-color indication) A79W Grommet 3-wire (NPN) 3-wire (PNP) F79 F7P J79 F79W F7PW J79W F7BA F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 5 V, 12 V IC circuit Relay, PLC Diagnostic indication (2-color indication

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

conduit 3-wire (NPN) Solid state auto switch G39C G39 2-wire K39C K39 12 V M9NW V V V v v G59W V V v v 3-wire (NPN) 5 V, 12 V IC circuit Diagnostic indication (2-color indication) Relay, PLC Yes 3-wire (PNP) M9PW V V V v v G5PW V V v v 2-wire 12 V M9BW V V V v v 24 V K59W V V v v Grommet 3-wire (NPN) 5 V, 12 V M9NA** v v V v v 3-wire (PNP) M9PA** v v V v v Water resistant (2