Electric Actuators

a = 3000 2000 m L1 10 20 30 0 Transfer load m (kg) L2 600 400 L2 (mm) Mer m Rolling Yawing 200 L2 Mer m 0 10 20 30 Transfer load m (kg) 4000 a=1000 L3 (mm) L3 a = 2000 2000 a = 3000 Mey m a 0 10 20 30 Transfer load m (kg) Refer to page 183 for deflection data. 150 Standard Motor/Horizontal Mount Specification Series LG1H20 Dimensions/LG1H202PC 110 4-M6 x 1 thread depth 10 67 4-M8 x 1.25

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Pad Type Lislf} Vacuum Entry"Mounling SmIxj TlTeEif ~~zeJ n .s ."0-"16 'DiiltiMi) j 04 4 Tube 06 6 Tube ~I 08 B Tube ~20 ':" 32 140-5Il : I 4 h 2 4 6 8 10 13 16 20 25 32 40 50 Ast type T Rat with rib DNptype Bellows type M5 x Q.8 '1\6' M6 x 1 2' U A8 Ma XI I ~1 B4 M4 x 0.7 B5 M5 x O .8 J~ 86 M6 X' , ,'. , Bjj M8xl.25 AS j!

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Modular F.R.L. Unit

J G A OUT IN OUT IN A G H H M M AR50, 60 AR30, 40 J G J G A A IN OUT IN OUT H M M H Parts list Material Note No.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft types: J, K, T (mm) (mm) L2 + (3 x P) L2 = L2 + (3 x P) L2 = Q1 Q2 Shaft type Shaft type J K T J K T Q1 = M Size Size L1 + (3 x P) L1 = 10 10 Not available Not available M3 M3 15 15 M3, M4 M3, M4 20 20 Q2 = M Q2 = M M3, M4, M5 M3, M4, M5 30 30 K axis (T axis) J axis M3, M4, M5 M3, M4, M5 40 40 Symbol: A37 The long shaft can be further shortened by machining it into a stepped

Smooth Cylinder/Low Speed Cylinder

-X 1235 Series CS2Y Dimensions Center trunnion: CS2YT With rod boot Z + 1/2 stroke Port V W G G 2 x P (Rc, NPT, G) 4 x J Cushion valve Width across flats KA Z1 + l + 1/2 stroke MM TDe8 R TY D E e AL l f K A F N N TT C h + l B ZZ1 + l + Stroke TX H M S + Stroke TZ ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) B C MM A AL D E F G J V W K KA M N 125 140 160 M30 x 1.5 50 47 143 115 32 71

LX

(mm) D E Model LXPBAB50S--X LXPBAB75S--X LXPBAB-100S--X LXPBAB-125S--X LXPBAB-150S--X LXPBAB-175S--X LXPBAB-200S--X 44 52 120 90 Note) The overall length of an actuator is Stroke + 124 (141) + Motor dimension.

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P (Rc, NPT, G) 4 x J Cushion valve REA MM REB D E e REC Smooth Smooth H K A AL ZZ + Stroke M S + Stroke N N ZZ1 + l + Stroke h + l l f F B C Low Speed MQ (mm) RHC Bore size (mm) A AL lB lC D E F G J V W K KA M MM RZQ 125 50 47 143 115 32 71 43 15 M14 x 1.5 15 17 15 27 27 M30 x 1.5 140 50 47 157 128 32 71 43 15 M14 x 1.5 15 17 15 27 27 M30 x 1.5 160 56 53 177 144 38 78.5 42 18 M16 x 1.5 15

ZP3

Basic Type ZP Series Model Connection thread Tightening torque [Nm] ZP(2 to 8)(J/K)--A8 M8 x 1 1.5 to 2.0 ZP(10 to 32)(J/K)--A10 M10 x 1 2.5 to 3.5 ZP(40/50)(J/K)--A14 M14 x 1 6.5 to 7.5 Lock ring Adapter Compact Type ZP3 Series Model Connection thread Tightening torque [Nm] ZP3-(015 to 035)JM6 x 0.75 1.5 to 1.8 ZP3-(015 to 035)KM8 x 0.75 2.0 to 2.5 ZP3-(04 to 16)(J/JB/K)Pad 2.

ZSE20(F)_ISE20

Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

B + Stroke A + Stroke K M E J 2 x 4-OA counterbore depth RA L S Rod end male thread Rod End Male Thread H1 Bore siz e (m m) A C1 1 H1 L1 X 125 140 160 141 141 155 42 42 47 M30 x 1.5 M30 x 1.5 M36 x 1.5 58 58 64 45 45 50 Rod end nut C1 X L1 Switches in the above figure are the case for the reed switches D-A73 type and D-A80 type.

Possible to transfer a workpiece at low-speed.

L1 L1 = L1 = L1 L1 = Q1 = M Q1 = M Q1 = M Q1 = M L1= L1 L1= Q1 = M Q1 K axis Q1 T axis (mm) Q1 Q1 L1 L1 Size Thread M 3 x 0.5 M 4 x 0.7 M 5 x 0.8 M 6 x 1 M 8 x 1.25 M10 x 1.5 Rc 1/8 Q1 J axis Z axis (mm) 15 20 30 40 10 (mm) Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 4.2 5 6.8 8.5 8.2 2.5 2.5 3.3 2.5 3.3 4.2 5 20 10 15 40 30 Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 3.3

Best Pneumatics Vol. 14

VBA Spacer with Bracket (Z) VE G VY1 Center of F.R.L. body G C BB (Y100T, Y200T only) E 1 PPA X-X EE (Y100T, Y200T only) RELEASE X B 2 AL E X G Seal Y400T Y200T J F A H K Spacer width D (mm) Applicable model G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 K 25 30 41 50 50 70 F 6.8 12 14 18 18 20 J 2.8 3.2 4 4 4.6 6.4 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86

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El F B Ie (mm) (mm) (mm) 3 o o J I v K KA M N P W MM 5 :7 M1 6 x 1.5 17 34 30.5 M36 x l .S 3/4 C. 78.5 1 42 18 15 20 34.5 106 0160 Up to 1200 53 177 144 38 56 o 15 27 27 15 M14 x 1.5 15 M30 x 1.5 30.5 112 98 Up to 1000 47 143 115 32 17 0 125 50 7t ' 43 ':5.

MY1

head plug) 2-M5 x 0.8 (Hexagon socket head plug) MY1CG MY1CG (mm) LH A B C G GA GB H K J LD L LL LW M MM N NC Model A B C G GA GB H K J LD L LL LW M MM N NC LH 6 16.2 6 M4 x 0.7 MY1C16 22.5 80 3.5 13.5 8.5 40 10 M5 x 0.8 3.6 80 40 54 20 14 7.5 20 7.5 MY1C20 23 100 4.5 12.5 12.5 46 12 M6 x 1 4.8 100 50 58 M5 x 0.8 25 17 (mm) NE NW PA PB PG Q PP QW QQ RR SS TT UU W WW MY1C16 MY1C20 NE NW PA

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

), 2(OUT) port B B1 G G 2 x M thread depth N 2 x M thread depth N WN: M12 connector D K F C J E IN B1 B 2 x Port size 1(IN), 2(OUT) port A G 2 x M thread depth N Glossary of Terms [mm] Size Port size A B B1 C D E F G M N 20 1/8, 1/4 19 43 21 64.3 36 9.5 18 12.8 M4 6 30 1/4, 3/8 24 45 22.5 80.7 42 12 21 19 M5 8 Size Port size DIN terminal DIN terminal without connector M12 connector J K L

Modular F.R.L. Unit

Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 25 Air Filter AF10 to 60 Dimensions L AF10, 20 AF50, 60 A G D Bracket (accessory) L Bracket (accessory) F D M G K K F M J J B E E B OUT IN H C OUT IN H C Port size OUT OUT Port size o s Drain A P Min. clearance for maintenance 25 AF30, 40, 40-06 L Bracket (accessory) A D G F M K J 40 B E Drain Min.

2 Phase Stepper Motor/Without Motor Brake Series LXS

m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 268 5 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH5BD Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 5H9 D-5.1 through Refer to Cross section C-C, bottom view.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (1.5 m) With cable (1.5 m) G kit F kit F kit P kit J kit P kit J kit 2 to 24 2 to 24 2 to 16 2 to 16 With cable (3 m) With cable (3 m) With cable (3 m) stations stations stations stations With cable (5 m) With cable (5 m) With cable (5 m) T L kit (Serial transmission) kit (Circularconnector) S M kit (Terminal block box) kit

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (1.5 m) With cable (1.5 m) G kit F kit F kit P kit J kit P kit J kit 2 to 24 2 to 24 2 to 16 2 to 16 With cable (3 m) With cable (3 m) With cable (3 m) stations stations stations stations With cable (5 m) With cable (5 m) With cable (5 m) T L kit (Serial transmission) kit (Circularconnector) S M kit (Terminal block box) kit