Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: C4H (ø4 One-touch Fitting, Straight Type)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread)

10

Bore size [mm] Dd9 L l m d Part no.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Lead wire length symbols: 0.5 m Nil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z Since there are other applicable auto switches than listed, refer to page 6-9-30 for details.

Direct Solenoid

:r:'ir . ,,,lri:,,j:li:.l'..i.,i',i.].'..i'1.'rt...i.i.1,.j,.: j..i riir',: .,,, I . .:t::;il..: li:aj;Ir:'ri.iii:r:l..::.::..l:lai,l.''.'''

ML2B

9 N K M 1 RE A B O 1 H REC O H PP CX NN NN MM MM CY KK LL KK LL 2-PA J J MQQ M 2-PA (Port for operating cylinder) (Port for operating cylinder) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F I F RHC (mm) (mm) MK(2) M 30.5 32 41.5 K 46 58 68 J 40 46.5 55 I 76.5

ML2B

9 N K M 1 RE A B O 1 H REC O H PP CX NN NN MM MM CY KK LL KK LL 2-PA J J MQQ M 2-PA (Port for operating cylinder) (Port for operating cylinder) F I F RHC (mm) (mm) MK(2) M 30.5 32 41.5 K 46 58 68 J 40 46.5 55 I 76.5 91 110 N 16 15 19 H 73 88 106 F 93.5 107.5 130.5 O 18.5 19.5 21.5 N 16 15 19 M 13 15 19 K 46 58 68 J 40 46.5 55 H 73 88 106 F 76.5 91 110 Applicable cylinder ML2B25 ML2B32 ML2B40

MB1

When replacing brackets, use the hexagon wrenches shown below. ) m m ( e z i s e r o B t l o B s t a l f s s o r c a h t d i W e u q r o t g n i n e t h g i T 0 4 , 2 3 7 4 2 1 C 8 4 2 3 B M 4 1 . 5 3 6 , 0 5 9 4 2 1 C 8 4 0 5 B M 5 1 1 0 0 1 , 0 8 t o o F 1 5 2 1 C A 8 4 0 8 B M 6 5 2 r e h t O 1 5 2 1 C B 8 4 0 8 B M 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK ASIA CHINA

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

H thread depth C LEJ LEL U M M LEM D 4 x O1 thread depth R Y L B + Stroke A + Stroke LEY K Note 2) M EH M S 4 x O1 thread depth R LES XA H9 depth XA 6 x MO thread depth MR LEPY LEPS Note 1) Range within which the rod can move.

CNA

GL GR D E MLGC Q T H1 AL A H S + Stroke ZZ + Stroke CNG N K F M M BN W V MNB C B CNA CNS With rod boot CLS CLQ e MLGP 8 f l RLQ ZZ + l + Stroke h + l MLU ML1C DBore size (mm) Stroke range (mm) A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA -X 40 50 63 80 100 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 52 16 12 12 10 8 M8 x 1.25 6 14 Up to 500 35 32 70 27 108 1/4 1/8 52 20 40 10 95

CNA

Chromated Tie-rod Carbon steel @8 Bushing Lead-bronze casted @9 9-7-27 28 Series CNAW Dimensions Basic style (B): CNAWBN Rc BP unlocking port Rc BQ Rc P Plug with breathing hole GA Rc P Rod side cylinder port GB M GD GC 4-J Width across flats KA Cylinder port W Width across flats B1 With rod boot MM MM GL GR Q GL1 D e E D E T H1 8 f l AL AL F N F h + l W V K A M BN ZZ + l + 2 stroke C K A

Thermo-chiller/Rack Mount Type

height: 1 m, stable with no load, Other conditions R See 4.

Air Pilot Operated Series NVSA

Jr., l,t, 3 . j ':;',14 . , : ; , , I r , ' ' . , I I I I r . . , , r , , , , . . , , . . r l r l , r r t r t r r _ : , r r r t , r ' : , ' , , , r , , , . , , . ' 1 1 1 i , , 1 : : : ; , , , , 1 ' . 1 i , , , " " ' . , : : ; : : l i , : , : : . l i : : ; , , , , : : , : , , ; , , , " . : : : ; ; : : , : . : . 1 ; i : : : : : : : : : ; ; " ' . 1 , , r 1 1 i , r r " : : " ' l i , ' r . : 1

Thermo-chiller

Applicable model HRL-BB002 HRLE050-m-m HRL-BB001 HRLE090-m-m y u t Parts List r i No. Description Material Applicable model Size Qty.

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: NPT 1/8, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: NPT 1/8, Lead Wire: w/o Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -