Vacuum Unit

HIROSE ELECTRIC CO., LTD. 3M Japan Limited Fujitsu Limited Cable length (L) Assembly part number Note 1.5 m AXT100-DS25-015 Cable 0.3 mm2 x 25 cores 3 m AXT100-DS25-030 5 m AXT100-DS25-050 * For other commercial connectors, use a 25-pin type with female connector conforming to MIL-C-24308. * Cannot be used for movable wiring Electrical Characteristics Connector manufacturers example Item

ZP

50 40 60 60 50 50 NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR Conductive silicon rubber 0 to 120 30 to 200 0 to 60 0 to 250 0 to 100 10 to 200 X X X X X X X X X X X X X X X X X X X X X X X The above table covers only general characteristics of subject rubber materials.

High Purity Fluoropolymer

Description Body class Symbol Bracket assembly LQ-GBL J K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L M L type M type (for short piping) Table 1 Tubing size symbols Part No.

CJ5-S

GA GB H H1 I J K KA M MM NA P S ZZ MQQ M 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 1/8 83 118 25 Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 1/8 83 123 RHC 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 125

CJ5-S

S Dimensions R V Head side flange style (G): CG5GNS GA GB FT Width across flats KA 2-Rc P H1 Width across flats B1 D I RE A B AL A MM Width across flats NA K REC C0.1 8-J 4-FD M S + Stroke ZZ + Stroke H FX0.15 B CX CY Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 MQQ M Up to 200 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25

5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm193 g101 gN01NPT 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores, ?

5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm193 g101 gN01NPT 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores, ?

5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm193 g101 gN01NPT 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores, ?

OUT1, OUT2: OrangeIP65Operating: 23 to 122F, Stored: 14 to 140F (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/

5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm193 g101 gN01NPT 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores, ?

OUT1, OUT2: OrangeIP65Operating: 23 to 122F, Stored: 14 to 140F (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/

5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm193 g101 gN01NPT 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores, ?

5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm193 g101 gN01NPT 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores, ?

5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm193 g101 gN01NPT 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores, ?

5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm193 g101 gN01NPT 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores, ?

5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm193 g101 gN01NPT 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores, ?

5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm193 g101 gN01NPT 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores, ?

5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm193 g101 gN01NPT 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores, ?

OUT1, OUT2: OrangeIP65Operating: 23 to 122F, Stored: 14 to 140F (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/

5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm193 g101 gN01NPT 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores, ?