High Vacuum Angle Valve

1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

5 Port Air Operated Valve SYA3000/5000/7000 Series

fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 x 2.2 (For manifold mounting) Manual override (Non-locking) SYA3 20-M5 3 4 5 M5 x 0.8 (A, B port) 1.3 (Ventilation hole) 2 x 1.5 die-cast hole (For manifold gasket positioning) M5 x 0.8 (P , EA, EB port) 1463 SYA3000/5000/7000 Series Dimensions/SYA3000 Series: Base Mounted 2 position single SYA3140-01 2

VK3000

(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) VK VK A port: Rc 1/8, M5 x 0.8 A, B port: Rc 1/8, M5 x 0.8 VV5K3 21 05 VT VK3120 Valve stations Thread type VK332 Q CE-compliant Nil CE-compliant 01 1 station Nil Rc Applicable blanking plate assembly VK3000-7-1A F N T G 20 20 stations R1 port: M5 x 0.8 R2 port: M5 x 0.8 P port: Rc 1/8 NPT Note) Applicable only for DIN terminal type NPTF 1421

SYA3000/5000/7000

4" 6, 5/32" 2 x 2.2 (For manifold mounting) Manual override (Non-locking) SYA3220-M5 M5 x 0.8 (A, B port) 1.3 (Ventilation hole) 2 x 1.5 die-cast hole (For manifold gasket positioning) M5 x 0.8 (P , EA, EB port) 3 position closed center / exhaust center / pressure center SYA3 20(-F2) C4, N3 C6, N7 3 4 5 SYA SYJA One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

1 M5 x 0.8 10 to 16 6 tube Pad dia.

MHF2

+0.030 0 depth 3 36 36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (Mounting hole) 27 37 1.2 37 M5 x 0.8 Finger opening port 4-7.5 +0.1 0 Close: 0 E-E Open: 641 8-M4 x 0.7 thread depth 4 106 Attachment mounting thread 4-M5 x

MHF2

Area: (800) 258-9200-www.stevenengineering.com M5 x 0.8 Finger closing port 50 72 2-M5 x 0.8 thread depth 5.5 Mounting thread 26 52 10.6 E 20 20 24 33 E 0 -0.1 2-4.3 through (Mounting hole) 27 25 25 M5 x 0.8 2-7.5 1.2 1.2 Finger opening port E-E +0.1 0 Close: 0 Open: 161 4-M5 x 0.8 thread depth 5.5 Mounting thread 36 8-M4 x 0.7 thread depth 4 Attachment mounting thread Auto Switch Mounting

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Standard Specifications Weight Table (g) Pad diameter (mm) Vacuum entry (One-Touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Connection Vacuum entry Connection M5 x 0.8 19 18 Female thread One-Touch fitting 10 to 16 M5 x 0.8 22 23 4 tube M5 x 0.8 20 to 32 10 to 16 M8 x 1.25 21 22 6 tube Pad diameter M5 x 0.8 58 60 6 tube M5 x 0.8 40, 50 (mm) M8

CL

x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Piping port M5 x 0.8 Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 71 46 6 Head cover port in axial direction (R) M5 x 0.8 Rod side cylinder port 31 Lock nut M14 x 1.0 M5 x 0.8 Head side cylinder port 5 5 32 34 48.5 6.5 M6 x 1.0 6 20 18 Width across flats 10 18 9.5 11.5 65 39 20 14

Slide Tables MX Series

Lateral Mounting (Through Holes) Lateral Mounting (Tapped Holes) l1 12.7 15.6 20.6 24.0 l1 12.7 15.6 20.6 24.0 l 9.4 11.2 16.2 16.0 Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Max. fastening torque in lb (N m) Bolts M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 Model MXH6 MXH10 MXH16 MXH20 22 (25) 45

SMC Electronic Switch Series Variations

M5 X 0.8 0XY: M6 X 1 58 ISA ZSE1 ISE1 6.5 10.2 ZSE2 ISE2 8 10 17.6 10 5.5 ZSP 2-3.3 Mounting hole ISl ZSM PFl Connector style/ZSE2-0Xl-15C IFl Pressure setting Indicator light trimmer L H Vacuum Vacuum pad connection port 20 supply port 7 35.6 Circuit Lead wire length 600 (3000) 50 9.5 Vacuum pad connection port 0X: M5 X 0.8 0XY: M6 X 1 58 Vacuum supply port 0X: M5 X 0.8 0XY: M6 X 1 6.5

CL

MLU E D P ML1C CLJ2D16D19 16 8 Silencer -X 12 2 20Head cover port in axial direction (R) 25.5 Data M5 x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Lock nut Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 5H9 +0.030 0 71 46 6 Clevis pin (5d9 ) 0.030 0.060 M5 x 0.8 Rod side cylinder port 31 M14 x 1.0 28 23 5 M5 x 0.8 Head side cylinder

42

Note) 4(A) and 2(B) port at the bottom of the terminal block box are 1/4". 462 Base Mounted Plug-in Unit VQ4000 Series Bottom ported drawing M5 x 0.8 Ground screw SV 10.7 SYJ 129.5 126.5 U side 96.2 106 47 SZ 1/4" 4(A), 2(B) port 71.7 9 9 VF 2 x G3/4 27 37.6 Conduit port VP4 X 12 X 12 n VQ 1/2 B A 8 2 4 VQ 4/5 VQ 4/5 B A 7 2 B 2 B 2 B 2 B 2 B 2 B 4 VQC 1/2 6 A A A A A A B B B B B B VQC 4/

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

8 Note) Brass for 6 to 20 8-15-30 30 Series CY1B Magnetically Coupled Rodless Cylinder Basic Type Dimensions Basic type CY1B6/10 MX MTS (mm) MY D 7.6 12 B 17 25 F 9 9 G 5 5 H 14 12.5 K 5 4 L 35 38 N 10 11 NA 14 14 MM x J M3 x 0.5 x 4.5 M3 x 0.5 x 4.5 NN M10 x 1.0 M10 x 1.0 S 63 63 W 25 30 X 10 16 ZZ 81 81 Model CY1B6 CY1B10 Port size M5 x 0.8 M5 x 0.8 CY MG Courtesy of Steven Engineering,

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

x M5 x 0.8 B LH Width across flats B1 (This drawing shows the cases of 20 and 25.)

LX

Top mount type Guide l Model Bolt Max. tightening torque Nm Body thickness (l mm) Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) LXS M5 x 0.8 4.4 28 LXS M5 x 0.8 4.4 10 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body. Caution 3.

E-P HYREG

Individual external pilot port: P1 M5 (VY1201-00 only) ARJ Pilot EXH port: P2 AR425 to 935 2 x 6.5 Mounting hole ARX AMR Blanking plate ARM Common external pilot port: See Note for P1. 2 x M5 (VVEX2-2-n-02 only) Port 1(P): 2 x 1/4 Pressurize from the both sides for 5 stations or more. ARP IR-A IR Port 2(A): n x 1/4 Port 3(R): 2 x 1/4 Exhaust from the both sides for 5 stations or more.

MXW

MXW20 M5 x 0.8 M4 x 0.7 MXW8 2.1 8 0 0 8H9 + 0.036 depth 9 5H9 + 0.030 depth 4.5 18.5 7.4 MXW25 M6 x 1 M5 x 0.8 MXW12 4.4 10 0 0 6H9 + 0.030 depth 5.5 M6 x 1 6.

Tamper Proof and Flat Head Screw

(mm) 1in=25.4mm L4 D3 H (width across flats) T2 A L2 D1 L3 D2 T1 L1 Dimensions A Model T2 H D1 T1 D2 D3 L3 L1 L4 L2 AS12 0-M5-T M5 x 0.8 8 9 M5 x 0.8 9 4.5 10 31 10.3 0.7 28.4 AS12 0-U10/32-T 10-32UNF 10-32UNF AS22 0-01-ST Rc 1/8 12 14.3 R 1/8 AS22 0-F01-ST PF 1/8 14.6 7 18 35.6 14.1 1.5 32 AS22 0-N01-ST NPT 1/8 12.7 NPT 1/8 AS22 0-02-ST Rc 1/4 17 18 R 1/4 AS22 0-F02-ST PF 1/4 19.5 7 27.2

smcmaintenancepartslist

0.5 x L M2.5 x 0.45 x 6L M3 x 0.5 x L M2.5 x 0.45 x 6L M5 x 0.8 x L M3 x 0.5 x 10L M5 x 0.8 x L M4 x 0.7 x 10L M5 x 0.8 x L Without auto switch 12 With auto switch Without auto switch 16 With auto switch Without auto switch 20 With auto switch Without auto switch 25 With auto switch 32 40 50 63 M4 x 0.7 x 4L Truncated cone point M4 x 0.7 x 6L Truncated cone point M4 x 0.7 x 6L Truncated cone