ML1C

OO PP QQ RR SS TT UU VV Model Applicable gasket ML1C25 ML1C32 ML1C40 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C11.2 17 23.5 12.5 10 53 40 34 26 C14 A B C D E F G H I J K L M N O P Q R S T U V W Y Z Model ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 M5 x 0.8 8.5 M6 x 1 9.5 11 M8 x 1.25 322 306 161 160 108 131 101 99.5 64 92 118

PA3000/5000/PAX1000

P-80 (D)

VQ

SY SYJ (L5) Plug assembly (L4) VK 2-4.5Mounting hole 1 2 3 VVQ100-12A(L3) 88 (8.5) L2 VZ 48.7 L1 VT VT (45) (35) 33 25 (5.5) VP 23.5 12.3 VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43

VDW

M5 LVC 2 (OUT) port M5, 1/8 1 (IN) port M5, 1/8 1 (IN) port 2 (OUT) port LVA 15 LVH 2-M2.5 x 0.45 2-M3 x 0.5 thread depth 5 LVD Thread depth 3.5 VDW31 LVQ 36 (27.6) LQ 300 Lead wire LVN 40 30 SMC SMC 1 1 TI/ TIL AC type Rectifying device PA 4-5 25 PAX 34 28 PB Bracket assembly part no.

IC

0.5 x 9.5 48 6 (Sensor breathing port) PRESSURE OUT CONTOROLLER 45 45 RUN 4 3 2 1 CH kPa 4 3 2 1 SW D-IN RUN UP SET P-ON READ DOWN STOP 105.5 M5 x 0.8 x 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Sensor pressure port) External sensor type 123 100.5 70 M3 x

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

1 Rod end nut 2-M5 x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F F S + Stroke H ZZ + Stroke (mm) P Bore size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22

Smooth Vent Valve

mount 40 Holding screw for main air supply (M2.5) 16 Main air suppy flow adjustment screw Initial air supply flow adjustment nut 11 Holding screw for initial air supply (M5) 82.5 9 MODEL M port M5 x 0.8 PRESS. 0.2MPa~10Pa 0.4~0.7MPa OPERATING PRESS IN Main air supply valve port TEMP. 5~60C S port M5 x 0.8 Initial air supply valve port MADE IN JAPAN (32) M S 52 (Body dimension) 65.8 (XVD2-

SFOD-OMT0009CN

() 7.1 XX X 512 2048 X 0 1 0 1 X 1 () X 1 INP ON INP ON() X 1 () X 1 () X 1 X 14 1 4 [] (1) 1 12 23 24 3 1 2 3 4 (2) 1 12 13 14 1 14 X 14 4 1 2 1++ X 2+ 1) 48 No.SFOD-OMT0009CN-B 7.2 XX X -= ID 1) +[ mm] XX (+) 1) -[ mm] XX (-) 1) [ mm/s] [mm/s] HOLDRESET 1) 1) INP [ mm] XX [ mm] 0mm M (0mm) 100mm 1) XX M (100mm) (+) (-) 1) XX 1 1) 49 No.SFOD-OMT0009CN-B

JXCx-OMT0001CN

2 Y ()() (CIR-R)(CIR-L) ( ) 34 2 (Y ) (X2, Y2) CIR-R CIR-L (Xc, Yc) 1) 1) (X1,Y1) 1 (X ) 1) 0.7 1.1 X Y Y (Xa,Ya) (Xc,Yc) X (0,0) -67No.JXC-OMT0001CN-C 3.6 CIR-R/L CIR-R/L 1-2 ABS 1)( ) 2) 3)(0,0) -68No.JXC-OMT0001CN-C ) 100mm/s 1 30mm2 10mm(No.1 ) 100mm/s 10mm 240mm( No.2 :1 0mm2 20mm) 100mm/s (No.31 0mm 2 0mm) Area 1 Step No.

Soft Start-up Valve

M P X Built-in silencer (Option) 3(R) Q S L K R AV5000-A Flow adjustment needle at low speed air supply D D 2 x W 4 x W Y V Y U H H U Dimensions [mm] Standard specifications Port size A B C D E F G H J 1(P) 2(A) 3(R) Model AV2000-m02-1 to 6D/Y(Z)m-A 1/4 1/4 1/4 66 97 47 24.5 40 96 33 Width across flats 22 58 AV3000-m03-1 to 6D/Y(Z)m-A 3/8 3/8 3/8 76 97 50 29.5 40 96 38 Width across flats

CLK1

P-80 (YG)

KR

3.18, 2.18 x M5 6, 4 x M5 MS-5ATHU-3 MS-5H-6 3.18, 2 x M5 P . 27 Hose elbow 4, 2.5 x M5 4, 2.5 x M5 For soft nylon and polyurethane tube MS-5ATHU-4 MS-5HLH-4 For nylon, soft nylon, and polyurethane tube Body rotates at 360 around the stud axis 6, 4 x M5 6, 4 x M5 MS-5ATHU-6 MS-5HLH-6 P . 28 P . 27 Gasket Gasket (H) MS-5ALHU-6 MS-5HLH-4 MS-5HLH-6 MS-5ATHU-6 only To seal M5 thread Material

Slider Type Ball Screw Drive/11-LEFS Series

M4 x 0.7 thread depth 6.4 24 28 3.5 39.4 ( ) +0.025 0 3H9 depth 3 L Cable length 250 (37) A (Table traveling distance) Note 2) (110) 37 40 (41) [39] 39 [(41)] Stroke (2.4) 7 65 [Origin] Note 4) Origin Note 3) 27 4 [2] 2 [4] 9.2 Motor cable (2 x 5) 46 6 20 33 40 Vacuum port M5 x 0.8 x 5 6.5 5.5 M4 x 0.7 thread depth 7 (F.G. terminal) Motor option: With lock Step motor Servo motor Cable length

Booster Regulator Series VBA1110 to 4200 1

Then, the charging time (T) for a 100 l tank, T = t x = 49 x = 49 (s). V 10 10 10 T = t x = 110 x = 110 (s). V 10 10 10 T = t x = 2.4 x = 24 (s).

EXxx-OMY0006CN

LED 3 P LED FS LED Fig. 10-5 EX245-FPS1/2/3 LED 10.9.3.1. FS LED Table 10-27 FS LED LED F-iSI 10.9.3.2. P LED Table 10-28 P LED LED Acknowledgement 64 No.EX##-OMY0006CN 10.10. MAC FW/HW Firmware version (FW): 2.1.X Hardware version (HW): 03 and higher Fig. 10-6 10.11. DIP 10.11.1.

MHL2

M5 X 0.8 (Finger opening port) Auto switch mounting groove (4 locations) 4-M5 X 0.8 44 (Piston rod and rack screw) 5.5 H M5 X 0.8 18.2 (Finger closing port) 12.4 0.5 9 8 8.4 16.8 15 31 Width across 12.5 A flats 8 (4 locations) (46) 20 15 15 7 Closed 7 7 34 20 10 10 Open G 4-M4 X 0.7 through (Thread for mounting attachment) Model MHL2-10D MHL2-10D1 MHL2-10D2 J 80 108 146 A B C D E F G H 38

Compact Cylinder with Air Cushion Series RQ

Mounting bolt Model C Mounting bolt M5 x 65l x 70l x 75l x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l Model C Mounting bolt M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l D 65 70 75 85 95 120 145 85 95 105 130 155 D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 R(D)QB20-15 -20 -25 -

1

6 1/8 1/4 3/8 Internal External Female thread (Rc, NPT) XSA1 1 x 106 1.3 x 109 1.3 x 1011 XSA2 XSA3 Face seal fitting Compression fitting Female thread (Rc, NPT) 1 Normal Close High Vacuum Solenoid Valve XSA Series *1 *1 Excluding grommet/AC How to Order Face seal fitting Compression fitting XSA 2 1 1 2 S 5 G Face seal fitting Compression fitting 1 1 1 P 5 G XSA 2 Female thread type Female

Serial Transmission System Series EX250 Series EX500

EAPEB 3 position exhaust center A B 4 P EA EB 3 position pressure center A B 5 EB P EA Kit type S S Kit (Decentralized wiring type serial kit) Kit (I/O serial kit) series EX500 IP67 protection Serial unit: EX500 IP67 protection Serial unit: EX250 Note) A separate gateway unit and communication cable are required.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

M5 x 0.8 thread depth 8.5 45 38 3.5 50 3H9 (+0.025 0 ) depth 3 [Origin]4 Origin3 (56) [54]4 Stroke 54 [(56)]4 (52) 10 A (Table traveling distance)2 52 (115.5) 65 L Cable length 250 Auto switch groove (1 row per side) 58 38 24 (4) [2]4 2 [(4)]4 (57.5) 6.5 24 Motor cable 6 48 38.5 (2.4) M4 x 0.7 thread depth 8 (F.G. terminal) 120 D x 120 (= E) B F 10 3H9 (+0.025 0 ) depth 35 n x 4.5 48 5 4