10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

Copper-free Actuators

Refer to p.0-36 to 0-37 for detailed information. Note) Dimensions Note 1) Refer to the catalog since overall length of series CQ2 is different from that of CDQ2 for auto switches. Note 2) Refer to the catalog since overall length of series CQS is different from that of CDQS for auto switches.

ZISE20C.eng

Bracket C MPa ISE20C(H) ISE20C: 0.050 MPa/ZSE20C: 5.1 kPa/ ZSE20CF: 5.0 kPa/ISE20CH: 0.100 MPa "Nil" or M Hysteresis Self tapping screws: Nominal size 3 x 8L kPa ZSE20C(F) Self tapping screws: Nominal size 3 x 10L Safety Instructions Bracket A ISE20C(H) Delay time 1.5 ms or less psi P ZSE20C(F) Display color OUT1 ON: Green/OUT1 OFF: Red : Arbitrary display These safety instructions are intended

ZISE20C-L.eng

Bracket C Units specification Pressure range Default setting ISE20C: 0.050 MPa/ZSE20C: 5.1 kPa/ ZSE20CF: 5.0 kPa/ISE20CH: 0.100 MPa Hysteresis ISE20C(H) MPa Self tapping screws: Nominal size 3 x 8L "Nil" or M Self tapping screws: Nominal size 3 x 10L ZSE20C(F) kPa Delay time 0.00 sec.

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: R 1/8, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: w/o Lead Wire, Bracket: A1 (Bracket A, Vertical Mounting)

Environment

Wall x y x z x 2. Bottom 4. Vertical z y x y z Example 1. Operating conditions Model: LEFS40 Size: 40 Mounting orientation: Horizontal Acceleration [mm/s2]: 3000 Work load [kg]: 20 Work load center position [mm]: Xc = 0, Yc = 50, Zc = 200 2. Select the graphs for horizontal of the LEF40 on page 43. 3. Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

ZISE30A.eng

Bracket A (Model: ZS-38-A1) Bracket B (Model: ZS-38-A2) Bracket C (Model: ZS-38-A3) CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: w/o Lead Wire, Bracket: A1 (Bracket A, Vertical Mounting), Operation Manual: T (w/o Operation Manual, Calibration Certificate)

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A)

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6H (ø6 One-touch Fitting, Straight Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N7L (ø1/4" One-touch Fitting, Elbow Type), Lead Wire: w/o Lead Wire, Bracket: A1 (Bracket A, Vertical Mounting)

LECA6_C

SVRE OFF [BK RLS]DC24V [BK RLS] [BK RLS]DC24V [BK RLS] EMG /LEC 58 - 15. 15.1. / 15.2 ON 59 - 5 () 60 - 15.3 50mm 15.4 ( ) 61 - 15.5 15.6 D 100 15.7 62 - 16. , , (), 16.1 /P.16 4. LED() /P.18 5.CN1: PLC /P.24 6.3 CN1 CN5 DC24V /P.16 4. /P.27 6.4 I/O /P.48 12. ONOFF /P.11 3. /P.48 12. CN1 CN5 DC24V /P.16 4. /P.27 6.4 I/O /P.14 3.4 63 - /P.28 7. (CN1:EMG ) /P.11 3.

LECP6_C

LED() /P.18 5.CN1: PLC /P.24 6.3 / / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.48 12. ONOFF /P.11 3. /P.48 12. / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.14 3.4 63 - /P.28 7. (CN1: /P.11 3. EMG ) SV1.00 INP ON INP OFF (INP PLC ) /P.24 6.3 / /P.11 3.

SFOD-OMT0005CN

(P.12) ) INP ON (INP 9.1 (P.32) PLC ) 5 3.(P.12) PLC (PLC) 2 11.4 (P.49) () 10.(P.41) 3.(P.12) -81- 5(P.23) 9.1 (P.32) 3.(P.12) PLC (PLC) 2 11.4 (P.49) () () 3.2 (P.13) USB 10.(P.41) 5 10.(P.41) 10.(P.41) 3.(P.12) ( EMG ) 3.

CQS

B + Stroke L + Stroke A + 2 (Stroke) Rod end male thread 20, 25 Width across flats K Rod end nut L1 + Stroke A1 + 2 (Stroke) Rod End Male Thread Without auto switch A1 50 53 63 74 With auto switch A1 55 58 73 84 Bore size (mm) H1 L1 X C1 10.5 12 14 17.5 14 15.5 18.5 22.5 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 12 16 20 25 9 10 12 15 Basic Style Without auto switch With auto switch Bore size

240

0 14 Step motor (Servo/24 VDC) 380 Electric Actuator Miniature Rod Type LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY6 C D LEF A B 3.5 2 x M4 x 0.7 x 7 2 x 3.3 through LEJ 19 LEL +0.025 0 2.5H9 ( ) depth 2.5 +0.025 0 2.5H9 ( ) depth 2.5 LEM LEY Note 4) LES 20 LEPY LEPS LEPY LEPS 12 13 LER LEH Motor cable mounting direction: Nil (Top entry) Rod operating range Note 1) 2 x M4 x 0.7

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Maximum tightening torque (Nm) Maximum screw-in depth l (mm) Maximum tightening torque (Nm) 1.2 1.2 2.1 Maximum screw-in depth l (mm) Bolt Model Bolt Model 6 6 6 5 8 2.1 2.1 2.1 4.4 7.4 M4 x 0.7 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 MXPJ6 MXP6 MXP10 MXP12 MXP16 MXP10 MXP12 MXP16 3 4 6 M3 x 0.5 M3 x 0.5 M4 x 0.7 Caution Side mounting with shock absorber is not available. 8-8-4 4 Series MXP Specific