SMC CORPORATION OF JAPAN

Using the Help Files . 3-1 3.1 The F1 Key .3-1 3.2 The Context Help.3-1 3.3 The Help Pull Down Menu.3-1 3.3.1 The Contents Command or Tab. 3-2 3.3.2 The Index Tab . 3-3 3.3.3 The Find Tab. 3-3 3.3.4 Search for Help On . 3-3 3.3.5 How to Use Help . 3-3 3.3.6 About VLS . 3-3 4.

Electric Slide Table / High Precision Type 《 AC servo motor 》

Product weight [kg] Model Stroke Additional weight Size Motor type 50 100 150 with lock 16 T6 2.02 2.41 0.30 25 T7 3.77 4.37 5.77 0.40 -6- 1.2 LECY series driver 1.2.1 How to order L E S Y H 16 D V6 A 50 S 3 M2 (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (3)Motor type (2)Motor mouting position (1) Size Symbol type Output D In-line 16 25 Size Compatible driver [W] R Right side parallel LECYM2

Lightweight and Compact

Note) 200 V type only. 400 V type is provided with an earth leakage breaker as standard. 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) HRZ Specifications HRZD Model HRS090-Wl-20-l HRS090-Wl-40-l Cooling method Water-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.15 Control method PID control Ambient temperature1 C 5 to

VP300-OMP0001

1. 2. 3. 4. 2 No.VP300-OMP0001 / / / / 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) *3) *3) *3) *3) 1 1 1 1 1 1 1 1 3 No.VP300-OMP0001 VP Series VP Series VP Series VP Series 3 3 3 3 / / / / () C-R ( ) C-R DC 3% AC 8% (SSR (SSR (SSR (SSR ) ) ) ) AC AC AC AC 1) (C-R ) OFF 2)() 1V / / / / () ( ( ( ( ) ) ) ) () 1 N.O.() 3 4 No.VP300-OMP0001 VP Series VP Series VP Series VP Series 3 3 3

Ejector Valve Unit Series ZYY/ZYX

X 3 SS5 45 SY3000/SX3000 Same as ordering manifold.

VFR5000 Series

Set pressure range 0.1 to 0.83 MPa (2) Terminal block -5 to 60 (No freezing) (3) Ambient and fluid temperature marking Model A B + B Port size fo connection of pressure gauge Rc 1/8 VFR5100 A side COM Weight (kg) 0.83 Effective area at supply side (mm 2) PA 44 38 32 VFR5200 A side COM B side VFR5400 3 5 A side COM B side S at P 1=0.7 MPa/P 2=0.5 MPa PB 38 40 31 Effective area at exhaust side

Pressure Relief 3 Port Valve with Locking Holes

Dimensions Standard specifications Model P1 P2 A B C D E F G H J Single Double VHS20-D 1/8, 1/4 1/8 48.5 51.7 23 40 37 28 42 17.5 40 21 VHS30-D 1/4, 3/8 1/4 55 58.2 32 53 49 38 53 20 53 26.5 VHS40-D 1/4, 3/8, 1/2 3/8 69.7 73.9 41.3 70 63 52 71 29 70 35.5 VHS40-06-D 3/4 1/2 71.7 75.9 43.3 75 63 52 71 29 70 35.5 VHS50-D 3/4, 1 1/2 86.5 90.7 44.5 90 80 72 90 33 90 45 Options specifications With

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Press the button for between 1 and 3 seconds.

0.5

Number of pages from 28 to 32. US Edition B Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Process Pump

Refer to air operated reset circuit example (3).

3

Digital display allows visualization. 3-color/2-screen display, Improved visibility Remote control is possible with accumulated pulse. 1 Flow Switch Flow Rate Variations Applicable flow range [L/min] Series Minimum setting unit Detection method Applicable fluid 1 2 3 3 2 1 0.5 0 0.5 PFMV 0 0.5 0 1 0 3 Thermal type (MEMS) Air N2 0.5 0.5 1 1 3 3 Applicable flow range [L/min] Minimum setting

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Note 3) Operation manual is included.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Note 3) Operation manual is included.

Non-contact Gripper

: 150 3.5 (7.3) (7.3) 3.5 54 70 54 120 to 132 (Adjustable) 3 70 150 to 162 (Adjustable) 3 With adjustment bolt assembly Size: 150 Size: 120 ZP3 ZP3E ZP2 ZP2V ZP ZPT ZPR XT661 XT661 3 (1) (Adjustable) 90 3 (1) (Adjustable) 114 745

LV50-OMQ0004

Option Part number Remarks Weight With lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.

Solenoid Valve

Double solenoid type SQ1000/2000 3 position type SQ1000/2000 4 position dual 3 port type SQ1000/2000 Note) With quick response type, approximately -40 V of coil surge voltage is generated when the valve is switched OFF.

SY3000-OMH0002

1. 2. 3. 4.2 2 No.SY3000-OMH0002 / / / / 1 1 3) 3) 1 1 () 3 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / 1 DC VQ (DC ) N.O.( ) 3 () 0.1 2 C-R ( ) C-R ( ) 3 3 EXH ( ) ( ) 3 DC 3% AC 20% (SSR )AC 1) (C-R ) OFF 2)() 4 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / -10 1V () (1) ()COM COM ( 2) 5 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / 2)Rc ( )

XL-OMY0002

1. 2. 3. 4. 2 XL-OMY0002 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0002 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0002 2.2 A6063SUS316LSUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0002 /H0 H4 H5 () 510% O 0.1mm0.2mm O 9 P15 3 3P7P8 5 P11 O 10 P16 P19 6 XL-OMY0002 3. 3 5 P11 25 40 50 XLD25-30-1 XLD40-30-1 XLD50-30-1 XLD25-30-1H XLD40-30-1H XLD50-30-1H 63 80 100

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Ejector: ZM103H-J5LZ (3 pcs.)

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Connections AK3 AK4 4T 1/4 inch compression 4BR Rc 1/4 4BRN R 1/4 4 NPT 1/4 female 4N NPT 1/4 male 6T 3/8 inch compression Material Code Body material S 316 SS 6BR Rc 3/8 6BRN R 3/8 6 NPT 3/8 female 6N NPT 3/8 male Ports Code Ports 2P 2 ports Note) Only available with same type ttings inlet and outlet.