Series LX Acceleration Time Guide

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 1 2 3 4 5 6 8 9 7 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

5 Port Solenoid Valve Series SQ1000/2000

, B port 43.5 58 P = 11.5 Dimensions Formulae L1 = 11.5n + 55.5 L2 = 11.5n + 73 n: Stations (max. 16 stations) L n 1 67 84.5 112.5 123 2 78.5 96 125 135.5 3 90 107.5 137.5 148 4 101.5 119 150 160.5 5 113 130.5 150 160.5 6 124.5 142 162.5 173 7 136 153.5 175 185.5 8 147.5 165 187.5 198 9 159 176.5 200 210.5 10 170.5 188 212.5 223 11 182 199.5 225 235.5 12 193.5 211 237.5 248 13 205 222.5 250

Clean Room Regulator/Fluoro Resin Type Series SRF30

Outlet pressure 0 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 Time sec Test circuit/Conditions P1 P2 Pump SRF30-m 2 Clean Room Regulator/Fluoro Resin Type Series SRF30 Flow-through Characteristics Particulate Generation Characteristics Particle concentration (particles/ml) Particle diameter: 0.1m or larger 400 1000 Value of specific resistance to that of supplied DI water 350 300 Resistivity (km) 100 250

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) MPa Downstream pressure of valve (P2) MPa 0.8 Subsonic Critical pressure 0.9 0.6 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 VX211 VX22 VX23 VX2 4 VX2 5 VX2 60-02 VX2 602 50 100 150 200 250 300 350 3 100 200 300 400 500 600 4.5 200 400 600 800 1,000 1,200 3 2 3 2 3 2 3 2 03 04 6 500 1,000 1,250 8 500

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

122 171 191 225 235.5 n: Stations(Max.18 stations) Equation : L1=10n+32 L2=10n+43 n L 2 52 101 121 150 160.5 3 62 111 131 162.5 173 4 72 121 141 175 185.5 5 82 131 151 175 185.5 6 92 141 161 187.5 198 7 102 151 171 200 210.5 8 112 161 181 212.5 223 10 132 181 201 225 235.5 13 162 211 231 262.5 273 14 172 221 241 275 285.5 11 142 191 211 237.5 248 16 192 241 261 287.5 298 12 152 201 221 250

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 5 Series XMC, XYC Dimensions XMC/Angle type C D L2 (KF flange) Fd Fc Fn C (Fc) L1 (K flange) (CF flange) J H B G A A L2 (mm) Model A 110 120 171 183 209 250 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H J P.C.D L1 6-4.4 6-6.6 8-8.4 XMC

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

conditions X: Not suitable Solvent resistance (benzene, toluene) Oil resistance (gasoline) Oil resistance (benzol) Item Material Durometer HS( 5) Operating temperature range C Alkali resistance Acid resistance Weather resistance Ozone resistance Abrasion resistance Water resistance X 0 to 120 50 X X NBR X X X 30 to 200 40 X X Silicon rubber X X X X 0 to 60 60 X Urethane rubber X 0 to 250

from three sides.Energy saving multistage vacuum ejector w/o valve , Nozzle diameter: ø1.2mm , Maximum suction flow rate: 100 /min (ANR) , Air consumption: 63 /min (ANR) , Exhaust specifications: built-in silencer (standard), port exhaust , Vacuum pressure sensor options: digital vacuum pressure switch, vacuum pressure gauge, vacuum adapter, Multistage Ejector w/o valve, VACUUM EJECTOR, 250

IDX-OM-W026

R410A 2,088 2,090 (1) (2) IDF Series 6-1 6 1 IDX-OM-W026 6 6-3 IDF22E, IDF37E Guige Guige ( 10) Guige (10) (820) 17 4-13 (17) [] mm A B C D E F G H J K L M N P IDF22E R1 775 6001 IDF37E R11/2 855 6801 85 340 (698) (93) 46 25 290 623 (134) (405) 13 314 IDF55E, IDF75E Guige Guige 10 (10, 1m 1m) 4-13 17 (911)[] mm A B C D E F G H J K L M N P Q R IDF55E 800 (868) IDF75E 900 (968) 526 (250

IDX-OM-M051

AC200,220V (60Hz) specifications Electric Power consumption (50/60Hz) kW 2.4 / 2.8 2.8 / 3.3 Operating current (50/60Hz) A 8.5 / 9.0 10.2 / 11.5 Applicable ground fault circuit interrupter capacity Note 4) A 20 30 Refrigerant R407C (HFC) Auto drain Float type (N.O) Timer controlled auto drain for option V JIS Flange JIS Flange 65A 10K 80A 10K Port size R2 (For Option K16K) Weight kg 226 250

IDX-OM-W023

IDX-OM-W023 5 () 60cm 1 2 INOUT INOUT () IDU Series 5-1 5 2 IDX-OM-W023 6 6-1 IDU8E-10/20 IDU11E-10/20 IDU15E1-10/20 50Hz 1.1 1.5 2.6 3/min (ANR)1 m 60Hz 1.2 1.7 2.8 0.7MPa 55 32 10 580 0.151.0MPa 240 (85%) AC100V 50/60Hz AC100/100110V10%(4) AC200V 50/60Hz AC200/200220V 10%(4) AC100V 50/60Hz 3.4/3.5 5.7/6.0 4.6/4.9 (2) A AC200V 50/60Hz 1.7/1.7 3.5/3.2 3.6/3.4 AC100V,AC200V 50/60Hz 250

IDX-OM-W035

3.7 1.8 1 0.5 12.4 13.4 [290] [623] [134] [405] [698] [93] [46] [25] [13] [314] [85] [340] 26.8 33.7 IDFB37E 1/2 [855] [680] R IDFB55E/75E Q A B H G E D F C (0.4 (39.4[1000]) J L K M N P 4x0..5 [4x13] (M10) Unitinch [mm] A B C D E F G H J K L M N P Q R 31.5 34.2 IDFB55E 2 1.4 [800] [868] 18.5 33.7 5.0 17.9 4.3 9.8 2 0.5 19.70.1 3.0 27.60.04 20.7 20.40.2 [470] [855] [128] [455] [110] [250

ITV-E

Anal ogue out put Vol t age t ype Anal ogue out put Current ( si nk) t ype I TV 0 1 I TV 0 4 O nl y use equi pm ent w i t h a m axi m um l oad i m pedance of 250 . O nl y use a equi pm ent w i t h a m i ni m um l oad i m pedance of 1k .

VBA-OM-O005

VBA-OM-O005-A ()IN OUT VBA 10A / 20A / 40A IN EXH EXH OUT 1/8 1/4 3/8 1/2 4 79Nm 1214Nm 2224Nm 2830Nm SMC VBA1A M5 3Nm 1/4 VBA2A, 4A M10 24Nm OUT / VBAT IN IN OUT VBA10A VBA11A VBA20A VBA22A VBA42A VBA43A VBA40A MAX. 2 24 MAX. 2 0.22.0MPa 0.21.0MPa 0.21.6MPa () 0.11.0MPa 3MPa 1.5MPa 2.4MPa IN AM -23 IN OUT () 250 VBA1A AMC310-03 200mm VBA2A AMC510-06 270mm VBA4A AMC610

PSxx-OMV0003CN

10.000 -1.05 10.50 Psi 0 145.04 -15.2 152.3 (PD) 1000 5000 580 5200 MPa 0 1.6000 -0.105 1.680 kPa 0 1,600.0 -105 1680 Kgf/cm 2 0 16.315 -1.07 17.13 ISE71 Bar 0 16.000 -1.05 16.80 Psi 0 232.06 -15.2 243.7 (PD) 1000 5000 738 5200 ISE70 MPa (PD) PD [MPa] (PD)(ISE70 MPa) -62No.PS-OMV0003CN-G Pr = a (PD) + b (PD) = (Pr b) / a Pr PD a b [] a b MPa 0.00025 -0.25 kPa 0.25 -250

PSxx-OMV0008CN

101.97 -5.1 107.1 bar 0 100.00 -5.0 105.0 ISE77G psi 0 1450.4 -73 1523 (PD) 1000 5000 800 5200 MPa 0 16.000 -0.80 16.80 kgf/cm 2 0 163.15 -8.2 171.3 bar 0 160.00 -8.0 168.0 ISE78G psi 0 2320.6 -116 2437 (PD) 1000 5000 800 5200 ISE70G MPa (PD) PD [MPa] (PD)(ISE70G MPa) -65No.PS-OMV0008CN-E Pr = a (PD) + b (PD) = (Pr b) / a Pr PD a b [] a b MPa 0.00025 -0.25 kPa 0.25 -250

PSxx-OMF0005CN

kPa 12 22 DC1224 V10 (p-p)10() 15 mA NPN PNP NPN PNP 1 1 1 80 mA 30 V(NPN ) 1.5 V 0.01 mm 0.01 mm () (0.010.15 mm (0.030.15 mm 100200 kPa) 100200 kPa) 1 0.01 mm 0.01 mm (0.010.15 mm) (0.30.15 mm) 2 1 2 LED (11+2) LED 1 2 () IP66 IP40 060 -2070 () 3585RH() AC1000 V 50/60 Hz 1 2 M(DC500 V ) Rc1/8 NNPT1/8 FG1/8 2)5m () M12 4 4 (0.64 mm () (21) ()253 g()250

EX180-SDN3_4_5_6_eng

No.7 No.8 0 0 125 kbps PWR(V) PWR MNS 1 0 250 kbps To obtain more detailed information about operating this product, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. 0 1 500 kbps 1 1 Invalid 2 3 Factory default setting is125 kbps.

EX260-SDN_eng

No.4 No.3 125 kbps 0 0 1 0 250 kbps Communication speed 0 1 500 kbps Caution 1 1 After maintenance is complete, perform appropriate functional inspections. Stop operation if the equipment does not function properly. Safety cannot be assured in the case of unexpected malfunction.

EX250-SDN1(-X102)_eng

Individual grounding should be provided close to the product with a short cable. 2 V+ Power supply for DeviceNet (-) 3 VCommunication speed (Baud Rate) Communication line (High side) CAN_H 4 Communication speed 125 kbps 250 kbps 1 0 SW1-7 0 SW1-8 NOTE Accessories Communication line (Low side) 5 CAN_L When conformity to UL is necessary the SI unit must be used with a UL1310 Class 2 power supply