Standby Regulator

It is intended to reduce air consumption in facilites. 3.

AMPSeries

37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Exhaust Cleaner for Clean Rooms AMP Series

37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

VT315-OMH0005

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VT315**-OMH0005-A / / / / 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) * * * *3) 3) 3) 3) 1 1 1 1 1 1 1 1 () 3 VT315**-OMH0005-A VT315 Series VT315 Series VT315 Series VT315 Series 3 3 3 3 / / / / / / / / 3 () C-R ( )C-R DC 5% () () () ( ( ( ( ) ) ) ) () AC 15% (SSR (SSR (SSR (SSR ) ) ) ) AC AC AC

LFE-OMZ0012

Remarks Weight Lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.

SY3000V-OMY0001

SY7000 16 No.SY3000V-0MY0001 2 2 2 2 3 // 3 3 3 SY3000 SY5000/ SY7000: /HNBR SY3000 SY5000 SY7000 P.145 17 No.SY3000V-0MY0001 (E) () () (PE) 18 No.SY3000V-OMY0001 No. 1(ISO VG 32) (R) 19 No.SY3000V-OMY0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to

VQ1000V-OMV0001

-2No.VQ1000V-OMV0001 / / / / 1 1 1 1 1.5 1.5 1.5 1.5 * * * *3) 3) 3) 3) * * * *3) 3) 3) 3) 1 1 1 1 1 1 1 1 () -3No.VQ1000V-OMV0001 VQ1000/2000 VQ1000/2000 VQ1000/2000 VQ1000/2000 5 5 5 5 / / / / 0.1 2 C-R () C-R DC 3 AC 8% (SSR (SSR (SSR (SSR )AC )AC )AC )AC 1) / / / / () 3 (C-R ) OFF 3 2)() 3) AC ,, SSR SSR 1) 2) ,1V -10 EXH Assy ( ( ( ( ) ) ) ) () 3 () 4 No.VQ1000V-OMV0001

Large Bore Compact Cylinder Series CQ2

Reed switch Relay, PLC 24V 2 wire Z80 No 5V, 12V 100V or less IC circuit Y59A Y69A 3 wire (NPN) IC circuit 5V, 12V P.10 Y7P Y7PV 3 wire (PNP) IC circuit Y59B Y69B 2 wire 12V Relay, PLC Solid state switch Y7NW 3 wire (NPN) Y7NWV Grommet Yes 24V Diagnostic indication (2 color indicator) 5V, 12V IC circuit P.11 Y7PW 3 wire (PNP) Y7PWV Y7BW Y7BWV 12V 2 wire Water resistant (2 color indicator

LX Series Compact Electric Actuators

o"o+ oeep 3 o 3 l "!l Cross section C-C Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

How to Order Valves How to Order Manifold Assemblies Example 4 0 5 SY 3 1 FU Single solenoid 2 position single Supply/Exhaust block (U side mounting) SY3140-5FU (3 sets) Double solenoid 5 FU Double/3 position 5 SY 3 2 4 SY3245-5FU (1 set) Series 3 SY3000 5 SY5000 Type of actuation 2 2 position double 3 3 position closed center 24VDC +COM + 1 2 3 Stations D side U side 4 3 position exhaust

AMP

37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

VFR3000-OMJ0001

1. 2. 3. 4. 2 VFR3000-OMJ0001-A / / / / 1 1 1 1 1 1 1 1.5 .5 .5 .5 *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () 3 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 5 5 5 5 / / / / / / / / () ( ) () 1 DC 3 3 () 3 EXH (VVFS3000-R-03-12 ( ( ( ( ) ) ) ) 0.1 2 () C-R () C-R DC 3% AC 125% 3 4 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 5

Process Pump

Flow characteristic is measured based on necessary minimum piping. 3.

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

,,: ,.

/t08 c/6 3/8 718-14 7ls t.79 .408 5/8 1t2 718-14 7t8 1.98 .501 Tube To Male Pipe: 90' ELBOW 1i8 1ts 3/16 1t8 3/16 'v4 Consult factory for iniormation 114 1t8 114 114 114 3/8 1t4 1t2 vl6 1/8 112-20 .90 .220 5/16 114 1t2-20 qt .vc .220 5/16 318 1t2-20 .98 1 .01 .219 5/16 'v2 Consult iactory lor iniormation 3i/S 1/8 5/8-18 1.01 .220 3/8 1t4 5/8-18 1.01 1.O5 .283 3/8 3lS y8-18 1.O4 1.07 .28'l

Manifold Specifications

For details, refer to pages 3-7-19 and 3-7-20.

VFRA3000, 4000 Series

Effective area at supply side (mm2) PA 44 38 32 4 2 (A)(B) 4 2 (A)(B) Single Double S at P1=0.7MPa/P2=0.5MPa PB 38 40 31 Number of pilots Effective area at exhaust side (mm2) AEA 5 1 3 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 90 4 2 (A)(B) 4 2 (A)(B) 77 S at P2=0.5MPa BEB 5 1 3 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) How to Exchange Air Operated Valves Loosen set screw and take air operated valve out vertically

VK3000

Construction Symbol (B) 2 (A) 4 5 (R1) 1 (P) 3 (R2) Component Parts No.

AMF

4 , 9 36 205 19 100 106 3 106 10 AMF450 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 1 Misc. , , , 1 1 4.5 4.5 6 3 4 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AMF550 AMF650 AMF850 1 2 1 2 1 2 1 14-20-47 7 Series AMF Dimensions AMF801/

MHC2

3 weui!0!1!8!9@0 w!0!1 e !