Brake mechanism added

10 10 150.5 15 26 54 10 8 M8 x 1.25 6 11 25 to 800 25 to 650 35 50 32 80.5 27 70 46 21 52 24 20 28.5 10.5 40 10 12 162.5 17 27 59 13 11 M8 x 1.25 9 11 25 to 800 25 to 650 35 60 32 98.5 27 85 23 64 24 20 28.5 13.5 40 10 15 17 26 67 18 11 M10 x 1.25 9 48.5 174 14 25 to 750 25 to 600 40 70 37 32 23 78 25 15.5 52 14 17 21 30 72 23 13 M12 x 1.75 11 117.5 102 55 26.5 36 189 17 25 to 750 25 to

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

4 5 3.5 32 + Stroke 15.5 35.5 + Stroke 25 16 Lead wire minimum bending radius 10 Auto switch 17.5 5 2 x 2 x 6.5 counterbore M4 x 0.7 effective depth 8 2 x 2 x M4 x 0.7 effective depth 7 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 5.5 2 x 3.5 through 38 8 20 29 0.5 Flat washer 6 10 4 4 20 32 + Stroke 3.5 29 35.5 + Stroke 20 Lead wire minimum bending radius 10 Auto switch 18 5.5 2 x

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

5.9) 6.7 (4.2) 10.6 (8.1) 15.5 (13) 3.6 (1.1) 4.9 (2.4) 6.4 (3.9) 6.7 (4.2) 10.6 (8.1) 15.5 (13) 3.6 (1.1) 3.9 (1.4) 16.4 (13.9) 16.7 (14.2) 20.6 (18.1) 25.5 (23) 3.6 (1.1) 8.9 (6.4) 26.4 (23.9) 26.7 (24.2) 30.6 (28.1) 35.5 (33) 13-/22-MXS6 13-/22-MXS8 13-/22-MXS12 13-/22-MXS16 13-/22-MXS20 13-/22-MXS25 5.9 4.5 5.6 5.6 5.6 17.6 23.6 45.9 (43.4) 39.4 (36.9) 36.7 (34.2) 29.6 (27.1) 34.5 (32

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

Slit Valve

CAUTION 184 49 Valve seat side (XGT222, 223, and 224 common) Cassette type Full MESK/XGT224 305 50 85 36 (mm) A B C D Valve type Model XGT221-32 XGT221-46236 XGT222-32 XGT222-46236 XGT223-46236 XGT224-46236 222 32 235 45 Non-cassette type 236 46 249 59 222 32 Cassette type Standard 236 46 236 46 Cassette type Half MESK !

CLS

The lock is released by screwing in the manual release bolt until the white mark of the lock monitor on the top of the brake cylinder moves to the FREE position. 140 160 180 200 250 Bore size (mm) 125 M6 x 1.0 x 35l M6 x 1.0 x 40l M8 x 1.25 x 40l M10 x 1.5 x 50l M10 x 1.5 x 55l M12 x 1.75 x 70l Manual release bolt Screw depth 30 32 35 40.5 45 55 In the case the manual release bolt is not

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

32 14 2-M2.5 x 0.45, depth 4 MXP8-20 50 20 82 36 36 41 20 74 65 90 50 20 8-8-27

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

, 40 How to Order w y e r t u i q LEKFS 32 E A 300 R1 CD17T q Size w Motor mounting position e Motor type r Lead [mm] 25 32 40 Nil In-line R Right side parallel L Left side parallel Symbol LEKFS25 LEKFS32 LEKFS40 H 20 24 30 A 12 16 20 B 6 8 10 E Battery-less absolute (Step motor 24 VDC) y Motor option t Stroke*1 u Actuator cable type/length Robotic cable [m] Nil None R8 8*2 R1 1.5 RA 10*

Heat Resistant 2-Color Indicator

Ambient temperature Sensor section: 32 to 302F [0 to 150C] Amplifier section: 32 to 140F [0 to 60C] Most sensitive position 7 40 Impact resistance Sensor section: 1000 m/s2 Amplifier section: 300 m/s2 3000 Standards CE marking, RoHS Applicable Cylinder Cylinder with Heat Resistant Auto Switch: -XB14 (Made to Order) Series Description Model Action Applicable bore size [mm] Note 16 20 25 32

Wireless System

E 16 outputs D-sub connector (25 pins) F 16 outputs Spring type terminal block (32 pins) * For specifications, refer to the Fieldbus system EX600 series in the Web Catalog.

Fluoropolymer Tubing Variations

" 1/4" 6.35 5/32" 3.95 TILM11 3/8" x 1/4" 3/8" 9.53 1/4" 6.33 TILM13 1/2" x 3/8" 1/2" 12.7 3/8" 9.5 TILM19 3/4" x 5/8" 3/4" 19.05 5/8" 15.85 TILM25 1" x 7/8" 1" 25.4 7/8" 22.2 TILM32 11/4" x 11/10" 11/4" 31.75 11/10" 27.95 KQB2 O.D. 3.18 1/16" 1.58 0.086" 2.18 KS KX I.D.

Series AP500

PTFE (Option: PCTFE) 20 0.14 Dimensions inch (mm) 15 0.10 AP500 10 0.07 1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30 psig (0.21 MPa) Inlet pressure: 45 psig (0.31 MPa) 35 0.24 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32

EXxx-OMS0026CN

W.S. 032767 032767 +0+32767 3276865535 -0-32767 -0-32767 15 V()50001000 4 V PLC 4000 -57No.EX-OMS0026CN EX600 byte EX600 byte EX600 byte byte EX600-SEN3/4 (32 ) 0 4 SI EX600-SEN3/4 (32 ) 4 4 () EX600-DXB (8 ) 1 0 EX600-DXC (8 ) 1 0 EX600-DXC1 (8 ) 1 0 () EX600-DXD (16 ) 2 0 EX600-DXE (16 ) 2 0 EX600-DXF (16 ) 2 0 EX600-DYB (8 ) 0 1 EX600-DYE (16 ) 0 2 EX600-DYF (16 ) 0 2 EX600-DME

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

MHT2

Bore size 32 mm 32 40 mm 40 50 mm 50 63 mm 63 Action Double acting D Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

CYV

Laser marking Hexagon wrench Features 2 Rodless Cylinder for Vacuum Series CYV How to Order CYV 15 200 Rodless cylinder for vacuum Standard stroke Bore size 15 32 15mm 32mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) 15, 32 Specifications 15 32 Bore size (mm) Atmosphere to 1.3 x 10Pa (ABS) Operating environment pressure Air and inert gases Operating

MHT2

Bore size 32 mm 32 40 mm 40 50 mm 50 63 mm 63 Action Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Double acting D Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

3 Port Air Operated Valve Series SYJA300 1

Function plate (DXT060-32-4A) 6 Valve Functions Available by Changing of Piping Port 3 port N.C. 3 port N.O. 2 port N.C. 2 port N.O.

VZ100/300/500

Valve series A port location M5 1 8 1 4 5 16 " " " 5 32 8 6 4 M5 x 0.8 VZ100 Top 1 8 Body Ported Base Mounted VZ300 Top 1 8 Note) 1 8 VZ500 Top Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 4 Bottom VZ300 1 8 Side Note) 1 8 1 4 VZ500 Bottom Side 1 4 Note)

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 5 Port Air Operated Valve Series SYA3000/5000/7000 How to Order SA One-touch fitting (Inch size) A, B port size Thread type VA Thread piping Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N7 N9 G F SA 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 One-touch fitting for NPTF T VA 5 32" One-touch