Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

x 0.8 Thread depth 7.5 14 8-M5 x 0.8 thread depth 7.5 (same on reverse side) 4-Rc 1/8 thread depth 6.5 (piping port) (same on reverse side) 30 (Z) 15 6 13 8.5 Model S ZZ Z SS CXS25-10-XB19 10 106 82 CXS25-15-XB19 15 111 87 46 9 30 CXS25-20-XB19 20 116 92 CXS25-25-XB19 25 121 97 CXS25-30-XB19 30 126 102 (30) (Z) 2-M5 x 0.8 Thread depth 7.5 2-M8 x 1.25 Thread depth 12 CXS25-35-XB19 35 131

Ionizer

(c)When a sensor is not connected.

JCRB-OM00003

Table 1 Model Solenoid valve (CV) Speed Controller Tubing CRB10 CRB15 0.05 AS-M5 4/ 2.5 6/ 4 AS-M3(Type270) CRB20 CRB30 CRB40 0.1 to 0.2 AS-M5 4/ 2.5 6/ 4 Note) The speed controllers must be used in a meter-out control. (Do not use a speed controller for slow speed.) 9 4.

AR Series Modular Type Regulator

Modular Type Regulator AR Series AC-A Regulator AR Series AF-A Model Port size Options AF-A AR10-A M5 x 0.8 AR-A AR-A AL-A AR20-A 1/8, 1/4 AW-A Bracket AC-B AF-A AR25-A AF-A 1/4, 3/8 Round type pressure gauge AR -A -B AR30-A AL-A Set nut (for panel mount)* AW -A -B AR40-A 1/4, 3/8, 1/2 AW AG AR40-06-A 3/4 * For AR20-A to AR40-06-A, panel fitting dimensions are different from those of the

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

CHKD/CHKG

CHKGL--XC64 A C C B 293

Environment

Nil Without cable 2 2 5 5 A 10 !

Series IDG

When very clean air is required, install a separator as mentioned above on the downstream side, or instead of a regulator, use the order made specification (refer to page 35) fitted with a micro mist separator regulator (series AWD). 3.

F/ISE

A and D.

Compact Cylinder with Air Cushion Series RQ

This produces an air cushion cylinder which retains the merits of a compact design. Operating principle q When the piston is retracting, exhaust is discharged from both A and A' until piston seal H passes the air passage A. A + A' A' w After piston seal H has passed the air passage A, exhaust is discharged only from A'.

3

to 63 32 to 63 A B U B A U D-P3DWA 32 to 63 U B A Auto Switch Proper Mounting Position D-F7/J79 D-F7V D-J79C/F7W D-F7WV D-F7BA D-F7BAV D-F79F/J79W D-A7H/A80H D-A73C/A80C D-A72 D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-A79W D-A73 D-A80 D-F7NT D-P3DWA Bore size (mm) A 25.0 24.0 26.0 19.5 23.5 24.0 A 28.0 27.0 29.0 22.5 26.5 27.0 A 30.5 29.5 31.5 25.0 29.0 29.5 B 10.0 12.0 13.0 13.0

Modular Type Regulator Series AR

A y OUT 2 I N 1 SMC A t e IN OUT r q w Parts list Material Note Description No.

Lubrication Equipment

Through the use of a booster, a pressure that is higher than that of the main air passage can be supplied.

DOC1001947

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

CV/MVGQ

Even if a proper tool is used, it is likely to inflict damage to a human body or peripheral equipment, as a snap ring may be flown out of the tip of a plier. Be much careful with the popping of a snap ring. Besides, be certain that a snap ring is placed firmly into the groove of rod cover before supplying air at the time of installment.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

The cylinder should be operated using a connection method which allows for shaft alignment variations and deflection due to the cylinder's own weight. A drawing of a recommended mounting method is shown in Figure 1.

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

CG1

HS A A A B 19.5 (27.5) 19.5 (27.5) 20.5 (28.5) 23 (32) 27.5 (39.5) 27.5 (39.5) A HS A HS B 15 (22.5) 15 (22.5) 15.5 (23.5) 18 (27) 22.5 (34.5) 22.5 (34.5) 31 (45) 31 (45) 30 24.5 27 27.5 29 24 27 25.5 27.5 20 30 27 27 27.5 29 24 29.5 25.5 30 25 31 30.5 28 28.5 30 25 33 26.5 33.5 32 35.5 35 32.5 33 34.5 29.5 37.5 31 38 40 43 40.5 40 40.5 42 37 43 38.5 43.5 50 43 47.5 40 40.5 42 37 50 38.5

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Vacuum Saving Valve

Caution: Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.