Series MXP Precision Air Slide Table

80 Load (N) 20 40 60 80 Load (N) 20 40 60 100 Load (N) 12 12 12 L=100mm L=100mm L=100mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

Magnetic Holding Power (lbs. force Series NCY2B Cylinder Theoretical Output 06, 410 100 o'15, 025,032, Q40 ^1100 3rooo I s00 I eoo g 7oo i m o 90 80 70 60 50 40 z 3 E .9 !

Compact Cylinder with Air Cushion Series RQ

Mounting bolt Model C Mounting bolt M5 x 65l x 70l x 75l x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l Model C Mounting bolt M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l D 65 70 75 85 95 120 145 85 95 105 130 155 D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 R(D)QB20-15 -20 -25 -

Compact Vacuum Ejector Series ZQ

0.3 0.4 0.5 0.6 Suction flow (l/min(ANR)) Supply pressure (MPa) ZQ110 Exhaust characteristics ZQ110 Flow characteristics Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15

Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow rate Note 8) (50/60 Hz) (l/min)Power supplyApplicable

Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow rate Note 8) (50/60 Hz) (l/min)Power supplyApplicable

Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow rate Note 8) (50/60 Hz) (l/min)Power supplyApplicable

Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow rate Note 8) (50/60 Hz) (l/min)Power supplyApplicable

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

seal 2.2 (0.12) VQZ1350 20 or less 26 or less Closed center VQZ1000 56 Rubber seal 3.6 (0.2) VQZ1351 25 or less 33 or less VFS Metal seal 3.6 (0.2) VQZ1450 3 position 20 or less 26 or less Exhaust center Rubber seal 6.3 (0.35) VQZ1451 25 or less 33 or less VS Pressure center Rubber seal 3.6 (0.2) VQZ1551 25 or less 33 or less Metal seal 10.8 (0.6) VQZ2150 14 or less 18 or less VS7 Single 60

ZQ

Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15 10 5 0 0.1 0 0.2 0.3 0.4 0.5 0.6 Supply pressure (MPa) 13-9-3 4 Series ZQ Specifications Ejector Weight Switch and suction

ZR

50 60 D1 100 VAC ( Hz) Lead wire length 0.6 m (Applicable to only DC) Light/Surge voltage suppressor D2 110 VAC ( Hz) 100, 110 VAC (With rectifier) Nil None Caution L LO Lead wire length 0.3 m Plug connector type Z With light/surge voltage suppressor (Possible only solenoid valve connector type.)

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NCY2 series

Magnetic Holding Power (lbs. force Series NCY2B Cylinder Theoretical Output 06, 410 100 o'15, 025,032, Q40 ^1100 3rooo I s00 I eoo g 7oo i m o 90 80 70 60 50 40 z 3 E .9 !

Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow rate Note 8) (50/60 Hz) (l/min)Power supplyApplicable

Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow rate Note 8) (50/60 Hz) (l/min)Power supplyApplicable

Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow rate Note 8) (50/60 Hz) (l/min)Power supplyApplicable

17

MY2 H/HT m MY3A MY3B 60 MY3M (1550) MY1B40 50 L (1350) 40 MY1B32 Mass m (kg) (1100) 30 MY1B25 m L 20 m 10 0 5000 4500 4000 3500 3000 2500 2000 1500 1000 500 0 Support spacing L (mm) L L Caution D1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting it.

80

DC Specification Power consumption (W) Note 1) Temperature rise (C) Note 2) Size Apparent power (VA) Note 1) 2) Temperature rise (C) Note 3) Size Size 1 Size 2 2.5 3 60 60 Size 1 Size 2 2.5 3 60 60 Note 1) Power consumption, Apparent power: The value at ambient temperature of 20C and when the rated voltage is applied.

CE

Wiring of power source for driving counter For power source for driving counter, use the one with 90 to 264 VAC, 50/60 Hz or 21.6 to 264 VDC, 0.4 A or more. 3. Output circuit There are two outputs, the NPN open collector and the PNP open collector. The maximum rating is 30 VDC, 50 mA. Operating the controller by exceeding this voltage and amperage could damage the electric circuit.

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22