Low Profile Guide Type

head bolt Chrome molybdenum steel Chromate Nickel plated Hexagon socket head bolt Chrome molybdenum steel Rolled steel Carbon steel Hexagon socket head bolt Flat washer Square nut Hard anodized Chrome molybdenum steel Hexagon socket head plug Nickel plated (Hexagon socket head taper plug for 25) 41 Chrome molybdenum steel Hexagon socket head plug Cylinder tube gasket Piston seal Scraper 42

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

3 Port Air Operated Valve VPA3145/3165/3185 Series

Precautions. 3 (EXH) 1 (IN) 3 (EXH) 1 (IN) Pilot Pressure Range Vacuum/Low Ordinary pressure Pilot pressure (MPa) Operating pressure (MPa) 1574 3 Port Air Operated Valve VPA315 Series Flow Rate Characteristics/Weight Flow rate characteristics Weight (kg) Port size 12(INOUT) 23(OUTEXH) Valve model C[dm3/(sbar)] C[dm3/(sbar)] 1(IN), 2(OUT) 3(EXH) b Cv b Cv 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 42

E-P HYREG

Proper tightening torque (Nm) Connection thread size (R, NPT) 3 to 5 8 to 12 15 to 20 20 to 25 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 1 8 1 4 3 8 1 2 3 4 Ground nut 1 1 1 2 Washer Retaining screw 1 4 1 2 Grommet (Rubber) Housing Operating Fluid Caution 1.

VZM400

3 Stainless steel y POM u POM 5-6-42 5 Port Mechanical Valve Series VZM500 Series VZM500 Basic VZM550-01-00 Accessory mounting hole (Pilot exhaust port) SA JIS Symbol VA SA VA 0.5 MPa supply VM 1.0 mm P.T. 16 N F.O.F. VR 2-3.2 mounting hole 2.0 mm O.T. 3.0 mm T.T.

Aluminum High Vacuum Angle Valve

Power/Voltage At the Rated Voltage Model Starting Power (W) Current (A) Power (W) Current (A) Holding G/C/D/T, P5G 1.5 36 4.8 14.8 10 4.9 2.3 5.3 20 13.5 6.7 3.0 0.38 0.35 0.27 0.11 0.10 0.5 0.46 0.36 0.15 0.12 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.47 30.5 XLS-16P2G 0.24 30 G/C/D/T, P5G 2.0 47 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.62 42 XLS-25P2G 45 0.35 XLA Construction/Operation XL XL Internal control

High Vacuum Angle Valve

Power/Voltage At the Rated Voltage Model Starting Power (W) Current (A) Power (W) Current (A) Holding G/C/D/T, P5G 1.5 36 4.8 14.8 10 4.9 2.3 5.3 20 13.5 6.7 3.0 0.38 0.35 0.27 0.11 0.10 0.5 0.46 0.36 0.15 0.12 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.47 30.5 XLS-16P2G 0.24 30 G/C/D/T, P5G 2.0 47 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.62 42 XLS-25P2G 0.35 45 XLA Construction/Operation XL XL Internal control

Air Suction Filter

ZFA200 Description Gasket Element AL-204H AL-205H EJ001H-030N EJ101H-030N Element size Element size (mm) 43 x 42 x 12 43 x 40 x 22 Element Replacement 1) Stop operation and reduce the filter's internal pressure to atmosphere. Element 2) Loosen the stop pin and open the cover. 3) Hold the knob on the top of the element and take it out.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 42 24.5 11 6 48 27 14.5 10 58 31 20.5 N S U F GN GS J K A ZP3 Y 04 06 08 B B5 15 61 44.5 10 20 68.5 52 JB K Dimensions Per Vacuum Inlet: One-touch Fitting 20 B Model 4 D E F Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Safety Instructions

Fluid Note 1) Translucent (material color) Air, Water, Inert gas Fluoropolymer fitting LQ1 series 20C 100C 200C 260C Applications: Food, semiconductor, medical, automobile and machine tools fields Applicable fittings Note 2) 1.4 0.7 0.35 0.2 15 9 1.6 0.9 0.45 0.23 25 15 260C Modified PTFE (Polytetrafluoroethylene resin) 1.4 0.7 0.35 0.2 20 10 1.4 0.7 0.35 0.2 40 23 0.9 0.5 0.25 0.15 75 42

NCQ8

1-1/4 to 2"st 1/4" to 1"st Z W R Q P O N M2 M1 K J I H E D 150 (1-1/2") 200 (2") 250 (2-1/2") 0.56 0.63 0.50 0.70 2.38 2.00 1.75 3/8-24UNF 2.63 0.19 0.50 1.55 2.19 0.22 0.34 0.25 0.20 2.19 NPT1/8 0.56 0.75 0.70 2.31 2.53 1.69 1/2-20UNF 3.13 0.20 0.63 1.90 2.69 0.22 0.34 0.25 0.20 2.73 NPT1/8 0.69 0.75 0.70 3.06 2.84 2.19 1/2-20UNF 3.75 0.39 0.63 2.30 3.25 0.28 0.41 0.33 0.26 3.23 NPT1/4 42

AFF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Maintenance space female thread Drain M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AFF75B 1 2 13 42 348 220 57.5 220 10 AFF75A to AFF220A/

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Degree of quality 1 0.04 mg/m3 (ANR) (0.0032 ppm) Series AMF Non oil odor 14-20-42 Degree of quality 1 HA HA With pressure differential gauge It,s possible to control product,s life cycles by watching the degree of a clogging element. Auto-drain type, drain guide specifications With auto-drain, drain piping is possible.

AMD

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMD850 1 2 13 42 348 220 57.5 220 10 14-20-27 7 Series AMD AMD801/901/800/900/1000 Dimensions AMD801/901 ORIENTATION Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

AME

mounting bracket Model Port size (Nominal size B) A H B C D E F G AM I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 36 9 205 19 100 106 3 106 10 1 2 3 4 , AME450 Misc. 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 1 , , , 1 1 3 4 4.5 4.5 6 257 314 406 30 40 30 10 15 15 16 20 24 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 9 11 13 239 291 403 22 32 42

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

AMH

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35

CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD 0.6 TC (mm) Rotating angle A AU B BA BB D (g6) DD (h9) Size BC BD BU H 90, 180 10 15 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 12 14 5 6 6.7 10.6 2.2 16.7 23.1 18 20 90, 180 Rotating angle TC TD W Q S US UW ab M Size TA 90 4.5 17 56 69 65 82 10 35 15.5 44 6 9 8 15.4 90 180 15 5.5 20 40 16 50 7 10 9 17.6 180 AU dimension is not the dimension

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

CE2 IN 84.8 59 42 25 CQSY16-PS 12 6 OUT 113 79 57 34 CQSY20-PS ML2B IN 151 106 75 45 CQSY25-PS 16 8 OUT 201 141 101 60 When only grease for maintenance is necessary, please order by the following part numbers.

REC

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 11 17 19 21 0.3 RHC G 7 11 13 13 0.5 10 10 50 100 200 300 400 (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 MK(2) Rod side trunnion style: U Head side trunnion style: T 32 42 48 52 0.3 Clevis style: C, D RS Q G C 22 30 35 37 0.5 Graph (2) Applicable