Compact Electric Actuator Series LG1 ) () 110 95 20 95 B (140) () () Dimensions A Stroke Model B C D Note) LG1H202100-F LG1H202200-F LG1H202300-F LG1H202400-F LG1H202500-F LG1H202600-F LG1H202700-F LG1H202800-F LG1H202900-F LG1H202-1000-F LG1H202-1200-F 100 200 300 400 500 600 700 800 900 1000 1200 245.7 345.7 445.7 545.7 645.7 745.7 845.7 945.7 1045.7 1145.7 1345.7 400 500 600 700 800 900 1000 1100 1200 1300 1500 50 150 250
The center of the stroke is aligned with the center of the clean bench. 250 730 300 620 102 Made to Order Specifications Series LJ1 Dust Seal Specification (-X70) The dust seal (dust cover) prevents the entry of dust, paper dust and scraps, etc. Dust Cover Without dust seal With dust seal Note 1) Dust seal material: Polyurethane Consult P/A for details.
Rotating Torque/Permissible Number of Rotations Applicable tube O.D. 5/32/4 1/4/6 5/16/8 3/8/10 12 Rotating torque in-lbf (Nm)NOTE 1) 0.053 0.106 0.124 0.177 0.195 (0.006) (0.012) (0.014) (0.020) (0.022) Permissible number Series KS 500 500 400 300 250 of rotations Series KX 1500 1200 1200 1000 1000 Note) Value under pressure 73psi (0.5MPa).
ball screw Lead 12mm 0.02 5 600 Rolled ball screw Lead 12mm 0.05 Ground ball screw Lead 10mm 0.02 30 500 High rigidity direct acting guide Rolled ball screw Lead 10mm 0.05 Horizontal Vertical 1) Horizontal Vertical 1) Horizontal Ground ball screw Lead 20mm 0.02 30 1,000 LJ1H Rolled ball screw Lead 20mm 0.05 LJ1H 20 Slide screw Lead 20mm 15 500 100 0.1 Ground ball screw Lead 5mm 0.02 15 250
Mounting With Limited Space Options MXW MXS Long Stoke Slide Table Slide Table Good Precision And Ideal For Transfer And Many Options Pressing Applications MXQ MXP Precision Slide Table Compact Slide Table Better Precision Extreme Precision And More Options 4 Versatile Sizes Bore sizes and stroke lengths to provide the movement you need. 5 10 15 20 25 30 40 50 60 75 100 125 150 175 200 225 250
socket head taper plug) Rc 3/8 (Port) XX XX Centralized piping Centralized piping 2-Rc 1/4 (Hexagon socket head taper plug) VV VV 2-Rc 1/4 (Hexagon socket head taper plug) S 1.1 WX 17.5 Bottom port (ZZ) (Applicable O-ring) 2-10 Y Bore size (mm) 50 63 GC 12 15 J M14 x 2 M16 x 2 MM M8 x 1.25 A 212 245 B 17 19 C 10.5 12.5 CH 41.5 47.0 G 27.0 29.5 GA 25.0 27.5 GB 37.5 39.5 H 124 149 K 28 32 L 250
75 MXS25-50 MXS25-40 MXS25-30 MXS25-20 MXS25-10 0.06 MXS25-125 MXS25-100 MXS25-125 MXS25-150 MXS25-100 0.04 0.030 0.05 MXS2575 MXS2575 Table deflection mm Table deflection mm Table deflection mm 0.025 MXS2540 MXS2550 0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 0.01 0.01 0.005 0 100 200 300 400 0 100 200 300 400 50 100 150 200 250
MXY12max. stroke 400 mm ERIES VARIATION ERIES VARIATION SERIES VARIATION S Series Variation Piping and Switch mounting options Stroke Stroke adjuster options Bore (mm) Switch rail, centralized piping on one side. 50 100 400 350 250 150 Shock absorber Metal stopper Rubber stopper 300 200 6 8 12 Scale:100% % Scale:100% S S l 100% S l 100% Scale:100% Scale:100% Scale:100% Scale:100% Scale:100%
8 lrg , L1 2.28 (58) 2.91 174) 3.54 (90) (06) 4.80 112.) 5.43 (38) 6.06 054) 6.69 (170) 086) t,n2) 8.58 (a8) 9.21 (234) 9.84 (250) 10.47 (266) 1110 1282) 11.73 (298) (3|4) 12.99 (330) 13.62 (346) L2 1.57 \40) 2.20 (561 2.43 (72) 3.,16 (88) 4.09 (ta) 4.72 0n) 036) 5.98 ,.152) 068) 7.24 (184) 7.87 8.50 (2oo) (26) 9.'13 1232) 9.76 \248) 10.39 l2u) 11.02 \2fi) 11.65 (296) 12.24 \312) 12.91 (328
current of 80mA) PNP open collector Max. load current: 80mA; Internal voltage drop: 1.5V or less (with load current of 80mA) Switch output Note 4) Output specifications NPN or PNP open collector Flow rate per pulse: 100l/pulse, 10.0ft3/pulse Pulse width: 50msec Accumulated Note 4) pulse output Output voltage: 1 to 5V; Load impedance: 100k or more Output current: 4 to 20mA; Load impedance: 250
air temperature [F/C] +100 (+115) / +37.8 (+45) Nominal inlet air pressure [psig / bar] 34 / 7 Max. inlet air pressure [psig / bar] 232 / 16 Exit pressure drop p [psig / bar] 2.9 / 0.2 Inlet outlet connections NPT-F 1/2 3/4 1 Type of refrigerant HFA 134.a Refrigerant loading [oz / gr] 7.1 / 200 9.7 / 7.1 / 11.5 / 325 275 200 Nominal electric absorption [A / W] 2.2 / 170 2.7 / 210 3.3 / 250
Less Than 0.64 SCFM (18 Nl/min) at 70 psi (5 kgf/cm'Z) Supply Output Flow Rate 8.8 SCFM (250 Nl/min) at 70 psi (5 kgf/cm':) Supply Ambient Temperature and Temperature of Working Air 14" 140"F (-10 60"C) Range of Angular Adjustment 0'-90'CW or 0"-90" CCW (adjustable range 0 -60 to 0q95') Port Size 1/4" (all ports) Raw lvlaterial of l\4ain Parts Aluminum Die-cast, Stainless Steel, Brass, Nitrile
= 3000 L1 (mm) L2 (mm) L3 (mm) Pitching Rolling Yawing m : Transfer load (kg) L : Overhang to work piece center of gravity (mm) a : Work piece acceleration (mm/sec) Me: Dynamic moment 1000 m L1 5 10 0 Transfer load m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 250
Straight type Stroke Air supply unit Note 1) 200 250 300 350 400 450 500 600 1000 200mm 250mm 300mm 350mm 400mm 450mm 500mm 600mm 1000mm Qty. None 1 set 2 sets Description Symbol Nil AS AW A unit (Air system 1) Note 1) Air supply unit, 1 set breakdown: Supply block (slide table side) 1pc. Supply ring (plate side) 2pcs. The maximum produceable stroke is 5000mm.
Acting Guide/Ball Bushing Series LXP Series LXS Lead screw lead mm Series Brake Page Model Motor type Ball screw Slide screw Guide type LXF LXFH5 2 5 6 12 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250
outside of this range may cause excessive impact, which may result in the damage to the devices. 6 10 Bore size (mm) 6 Operating piston speed (m/s) 0.05 to 0.5 L Allowable kinetic energy (J) 0.012 0.035 100 5st 10st 15st W 100 80 Load weight W (g) 10 10 60 6 Load weight (kg) L 40 1 W 20 0.1 00 5 10 15 20 0.01 0.01 1.0 0.1 Eccentric distance L (mm) Maximum speed (m/s) 10 300 5st 10st 15st 20st 250
F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 1 2 3 4 5 6 8 9 7 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg
, B port 43.5 58 P = 11.5 Dimensions Formulae L1 = 11.5n + 55.5 L2 = 11.5n + 73 n: Stations (max. 16 stations) L n 1 67 84.5 112.5 123 2 78.5 96 125 135.5 3 90 107.5 137.5 148 4 101.5 119 150 160.5 5 113 130.5 150 160.5 6 124.5 142 162.5 173 7 136 153.5 175 185.5 8 147.5 165 187.5 198 9 159 176.5 200 210.5 10 170.5 188 212.5 223 11 182 199.5 225 235.5 12 193.5 211 237.5 248 13 205 222.5 250
Outlet pressure 0 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 Time sec Test circuit/Conditions P1 P2 Pump SRF30-m 2 Clean Room Regulator/Fluoro Resin Type Series SRF30 Flow-through Characteristics Particulate Generation Characteristics Particle concentration (particles/ml) Particle diameter: 0.1m or larger 400 1000 Value of specific resistance to that of supplied DI water 350 300 Resistivity (km) 100 250
For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) MPa Downstream pressure of valve (P2) MPa 0.8 Subsonic Critical pressure 0.9 0.6 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 VX211 VX22 VX23 VX2 4 VX2 5 VX2 60-02 VX2 602 50 100 150 200 250 300 350 3 100 200 300 400 500 600 4.5 200 400 600 800 1,000 1,200 3 2 3 2 3 2 3 2 03 04 6 500 1,000 1,250 8 500