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For critical applications use A at 2 PSI P . A 10 PSI P will save money and mounting space. Method 2: Chart Index Cv against Bore Size vs. Inches of stroke per second. Assuming 80 PSI and P = 80%.

For critical applications use A at 2 PSI P . A 10 PSI P will save money and mounting space. Method 2: Chart Index Cv against Bore Size vs. Inches of stroke per second. Assuming 80 PSI and P = 80%.

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

(Port indication: P: supply port; V: vacuum port; E: exhaust port.) Matching the ejector to the vacuum circuit Refer to technical data on page 13-110 to 19 for precautions on the vacuum circuit.

*sure dlsplay Accuracy J3% (lull span) Minimum unit [ i l P a : 0 . 0 1 . k a f / c m ' : 0 . 0 1 , b a r : 0 . 0 1 .

Sumitomo 3M Limited Manufacturer's part no. 1-1473562-4 1-1473562-4 1473562-4 1-1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 2-1473562-4 2-1473562-4 2-1473562-4 D-A9 D-M9 D-Y D-Z73 D-Z76 D-Z80 Z/ISE1 Note 1) ZS-28-C ZS-28-C ZS-28-C ZS-28-C ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-

Flow characteristics Operating pressure range (MPa) Weight (g) 4/2 5/3 (A/B R1/R2) Port size 1 4/2 (P A/B) Valve model C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet 0.12 0.10 0.10 0.10 0.12 0.37 0.33 0.34 0.38 0.12 0.43 0.40 0.40 0.35 0.54 0.12 0.19 0.09 0.11 0.14 0.37 0.10 0.30 0.11 0.10 M5 x 0.8 0.45 0.84 0.38 0.48 0.63 VK3120 Used as a 3 Port Valve 1 8 Body ported 90 VK3120Y (For

Type 21P Single base/B mount Common SUP/Common EXH 3 to 12 stations Valve Rc 1 8 M5 x 0.8 Model Manifold type P(SUP), R(EXH) Valve stations A, B port location 1(P), 3(R) port 4(A), 2(B) port Port size Valve (1) effective area (mm2) (Cv factor) 1 4: 0.48, 4 3: 0.85 VZ1120 Socket: 26 pins MIL, with strain relief (Conforming to MIL-C-83503) Applicable flat ribbon cable connector Internal wiring

C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37 64 5 27.5 125 128.5 88.6 135 56 44 105 13-11-95 14 Series ZPT/ZPX How

IN High pressure IN Low pressure IN P IN P OUT OUT OUT IN High pressure IN Low pressure OUT IN P IN P JIS symbol JIS symbol IN P OUT IN P SMC Pneumatics, Inc.

When the IDF100F-30 is provided with options C, R and V and specified to have the ventilation direction to the right side, the part number will be IDF100F-30-CRV1. NIL IDF 100 F 30 NIL C 1 K 2 Size P 3 Air compressor size Note) 100kW 125kW 150kW Note) The value is referential. Confirm the capability of the compressor used.

Description 1 DC (+) 18 6.5 2 N.C. 24 Supply port ISA3-C: Rc1/8 ISA3-F: G1/8 1 Detection port ISA3-C: One-touch fitting ISA3-F: G1/8 1 3 DC () 36 4 OUT1 Unit: mm 1: Conforming to ISO1179-1 Stations 1 2 3 4 5 6 (49) 47 L1 38 76 114 152 190 228 18 2 Piping type C (4 One-touch fitting) C (6 One-touch fitting) F (G thread) H 13 13.6 19 ISA3-mm (DIN rail mounting) 2 1 3 1.8 L1 (23) 7 (41.1) 38

ZH--X185 Series Dimensions ZH10 20--X185 Fluid passage dia.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28

1 4/5 Port Air Operated Valve Series VSA420 Model Flow characteristics P A/B A/B EA/EB Valve model Port size Rc Note) Weight (kg) Body size Pilot port size Function SA C [dm3/(sbar)] 4.2 5.1 5.6 4.2 5.1 5.6 4.1 5.0 5.4 4.3 4.7 5.1 C [dm3/(sbar)] 4.1 5.9 6.5 4.1 5.9 6.5 4.0 6.0 6.6 4.0 5.8 6.4 Cv 0.95 1.3 1.5 0.95 1.3 1.5 0.95 1.4 1.5 0.96 1.3 1.5 b 0.30 0.30 0.33 0.30 0.30 0.33 0.31 0.28

IZF ZVB Without maintenance alarm function IZD IZE Nozzle Variations (P.459) IZH Various nozzles are available according to the installation conditions or applications.

186 q Installation Distance and Discharge Time p. 182 Alarm p. 186 w Static Neutralization Range p. 183 Mode Switch Setting p. 187 e Pressure Flow Rate Characteristics p. 184 Wiring p. 187 Dimensions p. 188 How to Order p. 185 Accessories (for Individual Parts) p. 185 Related Products p. 189 Specifications p. 186 AC Adapter Specifications p. 186 Specific Product Precautions p. 190 Parts