Solid State Vacuum Regulator

0.5 70 80 90 1.0 100 80 60 40 20 50 100 150 VAC side pressure (supply pressure) (kPa) Flow rate (l/min) (ANR) SMC Pneumatics, Inc.

α PneuAlpha HARDWARE MANUAL

Item Description 15 4.5.1 AC Input Wiring Diagram 4.5 AC Input Wiring PneuAlpha Wiring 4 Table 4.2: AC Input Typical Wiring 6 Circuit Protection Device Limit to 1.0 Amps 5 Digital Input Switches 4 Input Terminals 3 Unused Terminals 2 AC Power Terminals 1 AC Power Supply, 100 240V AC~ 50 60 Hz Ref.

TL/TIL

Max. operating pressure (at 20C) Burst pressure (at 20C) Min. bending radius (mm) Max. operating temperature (Fixed use) Material Note 1) 1 MPa 1 MPa 0.7 MPa 0.9MPa 0.7 MPa 0.6 MPa 0.5 MPa 4.9 MPa 6.9 MPa 4.7 MPa 3.6MPa 2.9 MPa 2.6 MPa 6.4 MPa 9.9 MPa 6.7 MPa 7.9 MPa 6.7 MPa 4.6 MPa 2.8 MPa 2.0 MPa Note 2) 20 40 65 110 12 20 6 30 60 160 160 290 260C Super PFA Note 1) The maximum operating

VXA21/22

Temperature conditions Water (Standard) Air (Standard) Oil (Standard) Vacuum (3) (V, M) Maximum Minimum 40 1 60 5(1) 40 5 40 40 5 5(2) Pilot port Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

V

s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section Air Preparation Accessories n 1 2 3 4 5 6 7 8 9 10 L1 28 44 60

Series VQ Metal Seal/Rubber Seal Body Ported

Stations 1 station 01 16 VVQ1000FPG066 stations of manifold VQ1000FPGC4M5D, 3 sets VQ1000FPGC6M5D, 3 sets Double check block 16 stations } 1.10-60 Precautions Be sure to read before handling. Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

Series VQ Base Mounted Metal Seal/Rubber Seal

S Kit (Terminal box) Kit (Lead wire) Kit (Serial transmission unit) Kit (Flat cable with terminal block) Number of pins: 20 1.10-111 Valve Specifications Configuration Voltage Electrical entry Manual override Effective area mm2 (Cv factor) Push-locking slotted style Non-locking push style Push-locking lever style M plug connector L plug connector 12V 24V DC 100V 110V AC 200V 220V AC 50/60

lPSMt

Supply Ambient Temoerature and Temperature of Working Air 14' 140"F (-10 60'C) Range of Angular Adjustment 0"-90' CW or 0o-90o CCW (adjustable range 0'-60" to 0'-95') Port Size 1/4' (all porls) Raw Material of Main Pafts Aluminum Die-cast, Stainless Steel, Brass, Nitrile Rubber Weight 2.2lbs. (1 kgf) Without Gauges Dimension 4.9' x 3.6" x3.2" (25mm x 92mm x 80mm) Withort Gauqe TE Use clean

lPSMt

Supply Ambient Temoerature and Temperature of Working Air 14' 140"F (-10 60'C) Range of Angular Adjustment 0"-90' CW or 0o-90o CCW (adjustable range 0'-60" to 0'-95') Port Size 1/4' (all porls) Raw Material of Main Pafts Aluminum Die-cast, Stainless Steel, Brass, Nitrile Rubber Weight 2.2lbs. (1 kgf) Without Gauges Dimension 4.9' x 3.6" x3.2" (25mm x 92mm x 80mm) Withort Gauqe TE Use clean

Title not found

Ambienr rempeErure 10-60"C(14'-140'F) . Proleclion slruclure IEC spec 1P67, WaleFPrcof(Jlscog2o) x fi 114ln lead wire is r6quned, L is pd at rhe end of model number. (Example) D-r7A1L o (.)

0.10.45/0.65 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.76/7Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ001-L1Water-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHAqueous solution of 60% ethylene glycol?

Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ004-L1Water-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHAqueous solution of 60% ethylene glycol?

0.10.25/0.38 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.718/23Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

0.10.45/0.65 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.713/14Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ004-L1Water-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHAqueous solution of 60% ethylene glycol?

Special Applications: 10-AR (Clean Series), Body Size: 60, Reverse Flow: No, Thread: N (NPT), Port Size: 10 [1 (Size 50, 60)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: NRYZ (N+R+Y+Z)

Body Size: 60, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 10 (1), Mounting: None, Semi-Standard, Body Size 10: 2 (Metal Bowl), Semi-Standard, Body Size 20: 3 (Drain Cock), Semi-Standard, Body Size 30, 40, 50 & 60: R (Flow Direction: Right to Left)

Style: Pressure Switch with Piping Adapter, Body Size: 60 (AC50, AC60), Thread Type: Rc, Port Size: 06 (3/4), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 60, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port thread