Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 NA 2 2 2 2 2 4 4 N 4 4 4 4 6 6 6 GA 15 15 15 42 51 61 111 KA 125.5 179.5 HA 40 40 40 25 36 72 76 13-/22-MXS12L-10 13-/22-MXS12L-20 13-/22-MXS12L-30 13-/22-MXS12L-40 13-/22-MXS12L-50 13-/22-MXS12L-75 13-/22-MXS12L-
(kPa) Pressure loss (kPa) 0.8 0.25 0.6 0.20 0.15 0.4 0.10 0.2 0.05 1 2 4 6 8 10 0 5 10 15 20 25 0 Flow rate (l/min) Flow rate (l/min) PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 4 14 12 Pressure loss (kPa) Pressure loss (kPa) 3 10 8 2 6 4 1 2 5 10 20 30 40 50 0 10 20 40 60 80 100 0 Flow rate (l/min) Flow rate (l/min) Flow Characteristics PFM710, 510 / For 10 (l/min) PFM725
, 15, 20, 25 5, 10, 15, 20, 25, 30, 35, 40 5, 10, 15, 20, 25, 30, 35, 40 CJP2 CJP Note 1) A stroke of 20 is available with a standard product only.
to 10V] [-100 to 100deg C:-10 to 10V] +15V 100 + ANALOG CIRCUIT 10 10 Output DI PV Analog Output*3 DI PV Analog Output*3 -15V 22 22 Output ANALOG COM [0 to 20 M:0 to 10V] [0 to 20 M:0 to 10V] +15V 12 Intput Temp.SP Analog Input*3 Temp.SP Analog Input*3 12 + -15V 1M 24 Intput [-100 to 100 deg C:-10 to 10V] [-100 to 100 deg C:-10 to 10V] 24 ANALOG COM 13 Output EMO signal EMO signal 13 25
One-touch fitting (C12: 12 One-touch fitting) Output connector 8 Station 7 6 5 4 3 2 1 U side n D side DIN rail clamping screw C10: 10 One-touch fitting C10 [3(R) EXH port] DIN rail clamping screw 56.6 30 R R 8 11.5 76.5 3 3 X X 49.5 B B B B B B B B 12 P12 P 30 25 1 A 1 A A A A A A A 13.5 10 (12) 25 (7.5) C10: 10 One-touch fitting C10 [1(P) SUP port] 45 P = 16 C4, C6, C8 [4(A), 2(B) port
13 7 6 9 8 11 10 3 Connector B terminal no.
2-DR CZ 2-CR DH CH DI CI DE DF CE CF DL CL DA DB CA CB CDH10 (mm) DDH10 (mm) CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 Size 25 32 40 50 Size 25 32 40 50 Part no.
1 i o w Mounting e Bore size r Port thread type t Cylinder stroke [mm] q With auto switch 12 12 mm 16 16 mm 20 20 mm 32 32 mm 40 40 mm 50 50 mm B Through-hole A Both ends tapped Nil M thread 12, 16 Rc 20 to 50 TN NPT TF G F Built-in One-touch fittings*2 Nil Without magnet for switch*1 12 10 16 10, 15 20 10, 15, 20 32 10, 15, 20 40 20, 25, 30 50 20, 25, 30 D With auto switch (Built-in magnet
Flange style Foot style 1 MPa or less 3.5 MPa or less 10-19-2 C J G5-S CV Heavy load Series JAH 7 MPa or less 40, 50, 63 80, 100 MVGQ Basic style Flange style Foot style CC 10-19-7 RB J For compact cylinders Series JB 1 MPa or less D12, 16, 20, 25 32, 40, 50, 63 80, 100 Basic style (Female thread) -X 10-19-10 20Data Stainless steel type Series JS 10, 16, 20, 25 32, 40, 50, 63 Basic style
Flange style Foot style 1 MPa or less 3.5 MPa or less 10-19-2 C J G5-S CV Heavy load Series JAH 7 MPa or less 40, 50, 63 80, 100 MVGQ Basic style Flange style Foot style CC 10-19-7 RB J For compact cylinders Series JB 1 MPa or less D12, 16, 20, 25 32, 40, 50, 63 80, 100 Basic style (Female thread) -X 10-19-10 20Data Stainless steel type Series JS 10, 16, 20, 25 32, 40, 50, 63 Basic style
54 56 61 74.5 84 9 10 11 13.5 15.5 19 25 25 29 35.5 45.5 55.5 15 21 27 33 37 40 2 2 2 2 2.5 2.5 1 1 1 1 1.5 1.5 5 10 10 10 15 15 11 11 12.5 15 18 21 M8 x 1.25 M8 x 1.25 M8 x 1.25 25, 50 75, 100 125, 150 175, 200 124 106 48 122 90 110 M8 x 1.25 M8 x 1.25 M8 x 1.25 140 120 56 138 100 124 M10 x 1.5 M10 x 1.5 M10 x 1.5 150 130 69 148 110 132 M10 x 1.5 M10 x 1.5 M10 x 1.5 188 160 88 185 140 166
stroke 25, 50, 75, 100, 125, 150 94 69 15 6 25 42.5 M5 x 0.8 16 5.2 25 15.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5 M8 x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod nut and accessory bracket, refer to page 10-12-20.
25mm CCW CW 0 5 10 15 20 25 Stroke [mm] Origin 25mm CCW CW 10 15 20 25 30 35 Stroke [mm] Origin 25mm CCW CW -25 -20 -15 -10 -5 0 Stroke [mm] Origin 25mm CCW CW -15 -10 -5 0 5 10 Stroke [mm] Origin 25mm CCW CW -35 -30 -25 -20 -15 -10 Stroke [mm] 31 - Initial setting for the ORIG parameters Refer to the controllers (LEC series) operation manual for detail.
Low power consumption: 0.6 W SZ (Current draw: 25 mA at 24 VDC) SY SYJ SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Compact design with large flow Sonic conductance: C [dm3/(sbar)] Body width [mm] 10 15 18 1.1 2.8 4.5 Response time 10 ms (Representative value
258-9200-www.stevenengineering.com 2-N through 4-O thread depth R Metal connector 500 or 3000 M14 x 1 B + Stroke A + Stroke A B C D E G H I K L M Bore size (mm) 12 20 Standard stroke 25, 50, 75, 100, 125, 150 94 M5 x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4
2-DR CZ 2-CR DH CH DI CI DE DF CE CF DL CL DA DB CA CB CDH10 (mm) DDH10 (mm) CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 Size 25 32 40 50 Size 25 32 40 50 Part no.
Cable VCTF 24 cores x 0.75 mm2 Plug: ML standard D type connector 25 terminals Cable: 25 core wire, 0.3 mm2 VVFS2000-30A-5 10 m VVZS3000-21A-5 10 m made by Tyco Electronics AMP K.K. VVFS2000-30A-6 15 m VVZS3000-21A-6 15 m VVFS2000-30A-7 20 m VVZS3000-21A-7 30 m VVZS3000-21A-8 20 m Option Option Cable Color List of Each Terminal No.
16 26 8.3 O.D. holding:18.0 (80) I.D. holding :19.3 (86) MHK2-25D 25 14 19 33 15.5 MHK2-12S 120 12 2.0 (9) 4 9 13 2.7 Normally open Normally closed MHK2-16S 16 5.2 (23) 6 14.6 20.6 4.0 MHK2-20S 20 7.6 (34) 10 16 26 8.4 L1 MHK2-25S 25 13.0 (58) 14 19 33 15.6 Single acting L2 MHK2-12C 12 2.7 (12) 4 9 13 2.7 MHK2-16C 16 5.6 (25) 6 14.6 20.6 4.1 MHK2-20C 20 9.9 (44) 10 16 26 8.4 MHK2-25C 25
dia. 4.3 6-7.5 counter bore depth 4.4 Plug for port (hexagon socket head set screw) 4-M5 x 0.8 x 4l Guide rail width 9 4-M4 x 0.7 Depth 10 4-M4 x 0.7 Depth 6 2-M5 x 0.8 9 5.5 17 21.5 52.5 53.5 25 25 27 5.5 26 27 6.5 6.5 16 17 5 NS 10 12.5 25 14 42 + Stroke 56 + Stroke 4-M4 x 0.7 Depth 6 12 10 + Stroke Stroke (mm) LT NS LB J LA 5 58 20 4 10 10 58 20 10 4 15 68 30 20 4 20 68 30 4 20 25