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/32 Bulkhead Fittings 25/32 10-32 10-32 5/16 1/4 1/4 1/4 1/4 57/64 10-32 1/4 Hex Typ. 57/64 10-32 5/16 Hex 1/4-28 68 10 BK-1 or 10BK-2 10 BK-2 1/2 10 RBK4-2 1/4 BK-3 10 RBK4-2 1/2 Page 17 Distributed by Power Aire, Inc.

Tamper Proof and Flat Head Screw

/32 10-32UNF 6, 10, 16, 20 Universal type AS221F-N01 AS231F-N01 NPT1/8 20, 25, 32 AS221F-N02 AS231F-N02 NPT1/4 20, 25, 32, 40 AS321F-N02 AS331F-N02 NPT1/4 40, 50, 63 AS321F-N03 AS331F-N03 NPT3/8 40, 50, 63 AS421F-N04 AS431F-N04 NPT1/2 63, 80, 100 Note 1) Elbow type only.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

17 140 14.5 10 17 160 13 10 17 180 14 10 17 200 14.5 10 17 D-Z7/Z80 D-A3/A44/A5/A6 D-A59W D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5/F5W/J59W D-F5BAL/F5NTL/F59F D-G39/K39 12 13 7 7.5 8 6 6 7 7 7 6 6 5 5.5 5 11 11 10 10 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

Rotary Cylinder Series MRQ Size: 32, 40 1

Size/Standard stroke (mm) Rotating angle 32 40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 A B 80 to 100 170 to 190 Refer to pages 11-10-18 to 11-10-19 for middle and long strokes other than standard stroke.

4/5 Port Air Operated Valve Series SYJA3000

11 17.5 1 (Bleed port) VA 1.5 A B M3 x 0.5 (Piping port) 1.5 1.5 33 36 SA Manual override B P R R (35) 7 7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2

MXW Series Long Stroke Slide Table

moment 70 MXW25 70 100 50 30 40 N m 50 MXW20 Pitch moment Yaw moment Roll moment 25 30 40 MXW20 Model 20 Moment N m Moment N m Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 5 5 3 MXW 8 10 15 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 110 110 65 2 1.5 MXW25 50 100 200 300 500 700 50 100 200 300 500 Piston speed mm/s Piston speed mm/s (Graph3) (Graph2

Flow Control Equipment

AS42l1FE AS43l1FE Model 8 10 6 8 10 12 12 10 6 8 10 Tube O.D.

High Power Cylinder:

Composed effective area So (mm2) 6 2000 h=0.7 10 1/4, 3/8 7.5 2500 REC 0.5 10 10 1/4, 3/8 0.1 0.3 9 3000 RHC 6 1/4, 3/8 2.5 500 8 1/4, 3/8 MTS 5 1000 0 1,000 2,000 3,000 25 (1/4) 10 1/4, 3/8 Max. speed Vmax (mm/s) 7.5 1500 CC Graph 3:32 10 1/4 10 2000 12.5 15 2500 3000 30 1/4 1/4 h=0.7 6 10 1/4, 3/8 20 4 500 0.5 0.1 0.3 10 32 (3/8) 10 1/4, 3/8 8 1000 0 1/4, 3/8 3/8 3/8 3/8 12 16 20 24 1500

Cylinder with Lock Series MNB

38 245 10.5 11.5 M22 x 1.5 3/8 61 72 33 14 69.5 341 100 177 26 M10 x 1.5 5 10 38 265 10.5 17 M26 x 1.5 1/2 68 72 37.5 15 With rod boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Dimensions Foot type: MQMLL 6 25 14 33 42 18.5 2.3 6 9 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke 10, 16, 20, 25 LY LH X X Y Y LX LZ Z 4-LC S + Stroke LS + Stroke ZZ + Stroke LT (mm) Bore size (mm) LS LC LT LH LX LY S Z LZ ZZ Y X 10 5.5 83 2.3 14 33 25 65 19 42 108 9 6 16 5.5 92 2.3 18 42 30 74 21 54 119 9 6 20 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 25 6.8 142.5 3.2 28 40 47 102.5

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed

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(mm) (mm) F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 12 FW F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 16 FW 56 10 49 6.5 53.5 6 33 13 10 57 8.5 57.5 6 43 17 20 46 20 12 61 8.5 67 6 43 17 12 74 11.5 73 8 57 22 25 16 56 25 22 74 15 76 9.5 81.5 6 43 17 15 82 12 87 8 57 22 31 16 56 31 22 74 h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 a 4.5

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Including insulating material) 1.27 mm 2.35 mm Connection type Screw tightening Rated current 4 A 8 A 9 A Rated voltage 60 V 600 V 250 V Contact resistance 5 mW or less Insulation resistance 100 MW or more Withstand voltage 1.0 kV 1.4 kV 4 kV Rating/Performance temperature Connector 25 to +90C 25 to +80C 25 to +85C Cable 25 to +80C 10 to +105C Ambient Min. bending radius (Fixed) 59 mm

HRX-OM-W060

temperature C 2 to 45 Circulating fluid CH1 : Clear water / CH2 : Clear water,DI water (pure water) 1 Set temperature range C CH1 : 15 to 25 / CH2 : 20 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.5 1 6.5 1 Temperature stability 4 C CH1 0.1 CH2 0.5 Rated flow rate (Outlet) L/min 45 10 45 10 125 10 (0.43MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

Rotary Table/

range Actuation range A B Rotation range m 190 40 10 20 10 1 2 3 7 20.9 22.8 24.4 28.7 16.9 18.8 20.4 24.7 A A 190 35 10 20 10 190 30 10 15 10 When D-F9 is used 190 25 10 15 10 Rotation range m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

CC

Compact hydraulic cylinder conforming to JIS Series CHKDB Nominal pressure (MPa) Bore size (mm) Stroke (mm) Action Fluid Series CHKDB CHKGB 20 5, 10, 15, 20, 25, 30 35, 40, 45, 50 Compact hydraulic cylinder Series CHKGB 25 RE A B Hydraulic fluid 5, 10, 15, 20, 25, 30 35, 40, 45, 50, 75 32 Standard mineral hydraulic fluid W/O hydraulic fluid O/W hydraulic fluid REC Light and compact alminum

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

58 25 or less 33 or less VQZ2551lC Pressure center 25 or less 33 or less VQZ2551SlC VZ 9 8 7 6 5 4 3 2 1 Fully open Number of needle rotations (turns) 10 Note 1) Valve for sub-plate and maximum diameter.

Vacuum Unit

Release valve 23 Supply valve 11 Supply valve 21 22 10 stations 24 Release valve 10 stations Release valve 12 23 24 25 13 25 26 (+) () COM. 25 () () COM. 26 (+) (+) Positive common specification Positive common specification () Negative common specification () Negative common specification (*) The valve installed onto the product is non-polar type.

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14 10 14 10 14 12 14 17 14 17 22 14 17 22 14 17 22 14 17 22 19 22 16.1 19.9 16.1 19.9 17.2 21 20.1 23.3 24.7 25 26.4 30.6 25 26.4 30.6 25 26.4 30.6 25 26.4 30.6 29.3 33.3 17.4 19.6 17.4 19.6 19.6 21.8 24.7 26.3 27.3 29.6 30.6 33.5 29.6 30.6 33.5 29.6 30.6 33.5 29.6 30.6 33.5 36.3 39 9 18 9 18 12 21 22 30 42 37 47 74 36 46 73 38 49 75 40 51 77 75 96 4 2.5 1.8 1.4 7 8 14.5 5 KG 4 3 2.3 2.3