Refrigerated Air dryer Series IDU/IDF

Refrigerant Air connection 300 2.2 IDU3D 350 Series IDU High inlet air temperature type Rated temperature of 50 to 60C Rc 3/8 60C 430 3.7 IDU4D 500 Small Medium Small Medium Large R134a 1 to 4 R 1/2 640 5.5 IDU6D 750 55C R 3/4 Air cooled Air cooled 850 7.5 IDU8D 1000 IDU11D R134a 1300 11 R 3/4 1500 IDU11C 1300 55C 2400 IDU15C 15 2050 R 1 3700 IDU22C/22C1 22 3150 R22 5 to 8 6100 IDU37C/37C1

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

3

If the failure cannot be solved after the above instructions are performed, please contact SMC for investigation. 11 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

300 600 600 D L1 Note) When a copper extension nozzle is ordered separately, a self-align fitting will also be required for connection with the blow gun.

XL-OMV0002

C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55 11 134 130 102 139 58 9 XLC-160 138 339 200 65 11 190 180 153 124 62 12.5 10 XL-OMV0002 5. 200 1680 100 100,160[ ]18 12 Assy O XLC-16,XLC-25,XLC-40,XLC-50,XLC-63,

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

ANR: 20C atmospheric pressure, relative humidity 65% 200 300 , 0.2 AMC-EL3 BE30 1,000 1 4 3 8 1 4 , 3 4 1 2 0.12 AMC-EL2 BE20 0.5 AMC-EL5 BE50 5-10-11 12 Series AMC Flow Characteristics (Initial conditions) Construction/Dimensions Male thread Inlet pressure (MPa) (3 equipartions of circumference) Bracket Port size Air flow (l/min (ANR)) R, NPT, G How to read the graph: If the AMC510 is operated

Pneumatic Transfer System Series MF

MF32-SA Stroke 4-M6 x 1.0 thread depth 12 288 + Stroke 2 x 2-6.9 through, 2 x 2-11 counter bore, depth 6.5 35 (cylinder tube O.D.)

Fieldbus system Ethernet POWERLINK compatible SI unit

Value x 0.01 (mA or V) 0 Value (-32767.. 32767 ) Lower limit AD value of Analog Range. 10 Lower Limit Value*1 True Output will be fault value. 11 Fault Mode Analog False Output will be held last state. Set output per channel when communication error is occurred.

AMF

Maintenance Caution Model Connection (Flange) 2B 8B C 2B/3B/4B 500 A 330 B 300 D 1070 E 1200 F 1290 G 20 H 720 M16 X l 400 Anchor bolt M20 X l 500 AMF800 AMF900 400 550 560 745 300 300 1070 1090 1230 1320 1335 1450 24 24 q It is not possible to indicate a definite replacement interval for the element because it varies with the odor concentration of the compressed air.

VQC

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VQC2000 800 700 600 500 400 300 200 100 0 VQC4000 Values at extension of a directly coupled cylinder when meter-out speed controllers are used with the needle full open.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Circuit example/Built-in solenoid valve Ball valve FLUID OUT Regulator AIR EXH Filter AIR SUP FLUID IN Air supply Process pump PB1011 Transfer fluid 19 Process Pump Built-in Solenoid Valve Type/Air Operated Type Series PB1000 Dimensions/Built-in Solenoid Valve Type/Air Operated Type PB1000 FLUID OUT Rc 1/8 11 OUT 11 84 72 Mount with this surface (OUT port side) on top 7.5 41 60 45 UP SIDE

PA3000/5000/PAX1000

Circuit example/Built-in solenoid valve Ball valve FLUID OUT Regulator AIR EXH Filter AIR SUP FLUID IN Air supply Process pump PB1011 Transfer fluid 19 Process Pump Built-in Solenoid Valve Type/Air Operated Type Series PB1000 Dimensions/Built-in Solenoid Valve Type/Air Operated Type PB1000 FLUID OUT Rc 1/8 11 OUT 11 84 72 Mount with this surface (OUT port side) on top 7.5 41 60 45 UP SIDE

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

IR1000/2000/3000

Conditions: Supply pressure 0.7MPa Set pressure 0.2MPa Flow rate 0 l/min (ANR) Conditions: Back pressure 0.5MPa Conditions: Supply pressure 0.5MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure MPa Set pressure MPa Set pressure P2 MPa 0.4 0.202 Setting point 0.15 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 100 200 300 400 0 100 200 300 400

Series SY100 3 Port Solenoid Valve Rubber Seal

Station L1 L2 2 33.5 27.5 11 128 122 12 13 149 143 14 15 170 164 16 17 191 185 18 19 212 206 3 44 38 20 4 54.5 48.5 5 65 59 6 75.5 69.5 7 86 80 8 96.5 90.5 9 107 101 10 117.5 138.5 159.5 180.5 201.5 222.5 111.5 132.5 153.5 174.5 195.5 216.5 2.1-13 Series SY100 S41 Type Manifold: Side Ported/SS3Y1-S41Station -M3/M5 Grommet (G), (H) 11.5 P=10.5 (Pitch) 5 Manual override 5 G: 300 H: 600 28 (

Ejector Valve Unit Series ZYY/ZYX 1

(Length 300 mm) Without lead wires Without connector Misc.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

(mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S T CD LH LT LX LW X1 Y1 SS Z e f Q 32 M10 x 1.25 58 62 38 16 32 15 11 37 31 3/8 39 141 11 11 40 8 40 30 32 13 203 205 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 69 45 12 32 15 11 36 30 3/8 42 141 11 11 43 8 46 33 32 13 203 205 52 12 15 25 to 1400 50 M10 x 1.25 76 85 52 15 40 19 11 43 35 1/2 46 155

ML1

switches S n 25 32 40 25mm 32mm 40mm 2 1 n Standard stroke Bore size (mm) Max. stroke (mm) Standard stroke* (mm) 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to

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Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.