CEx-OMG0106

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5 Port Solenoid Valve, Series VQC

B 23 () (+) Gray Red 11 () (+) White Red AXT100-DS25-050 SOL. A When using a standard commercial connector, use a type 25P female connector conforming to MIL-C-24308. Station 11 SOL. B 24 () (+) Black White 12 () (+) Yellow Red SOL. A Station 12 SOL.

AC Servo Motor Driver (Pulse input type/Positioning type)

Servo amp lifier Driver (Note 7) (Note 7) CN1 CN1 (Note 2) 24VDC RA1 (Note 4, 9) 2 OPC 9 ALM Trouble (Note 6) 1 DICOM Travel completion 10 MEND RA2 13 DOCOM (Note 9, 11) (Note 13) Ready EM1 SON MD0 8 4 3 (Note 3, 5) Forced stop 11 RD RA3 Servo-on Electromagnetic brake interlock 12 MBR RA4 Automatic/manual selection DOG (Note 9, 10, 12) 25 Proximity dog 10m max. Point table No.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

2 position single: VSA4140 2 position double: VSA4240 3 position closed center: VSA4340 3 position exhaust center: VSA4440 4-9 (11) Mounting hole 4-9 (11) Mounting hole 4-9 (11) Mounting hole ( ): Valve for Rc 3/4 5-3-36 7 Series VSA40 Manifold Specifications Specifications Valve manifold with the same body size Valve manifold with the same body size Value manifold with the different body

Series VQ Metal Seal/Rubber Seal Body Ported

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

MHY2/MHW2

0.062 Depth 4 0 27 30 4-M6 X 1 Depth 7 (Thread for mounting attachment) Rc(PT)1/8 (Finger closing port) 45 MHR Auto switch mounting groove position MHK MHS 32.9 20 20 51 O S 11 11 Rc(PT)1/8 (Finger opening port) MHC2 25 13 MHT2 5 MHW2-32D1 MHY2 6.45 5.5 Right angle finger MHW2 MRHQ Auto switch 44 21 14 MHW2-32D.SMHW2, #3 MHW2-32D1.SMHW2, #6 20 18 7 27 4-M6 X 1 (Thread for mounting attachment

MIW/MIS

Supply port 2-M5 x 0.8 FC FA FE FH GD GC GB FG FF EB EA D FB B MIS12-10 A C FD GA Model 72 92 112 86.5 106.5 126.5 33 43 53 38.5 48.5 58.5 48 38 28 165 135 105 18 185 155 125 MIS12-30 MIS12-20 19 9.5 6 (Effective depth 3) 4.5 8 -0.1 0 8 -0.1 0 10 M3 x 0.5 5 3.3 23 26 21 MIS20-30 MIS20-20 MIS20-10 52 42 32 11-0.1 0 11-0.1 0 29.5 35 25.5 13 12.5 10 (Effective depth 4) M5 x 0.8 6.5 28.5 7 5.1

MRQ

/2 70.5 ( 40 stroke) /2 75.5 ( 50 stroke) /2 75.5 ( 65 stroke) /2 80.5 ( 75 stroke) /2 78 ( 90 stroke) /2 83 (100 stroke) /2 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 12.5 3 15 20 32 15 17.5 20 4 25 30 30 12.5 15 3 (mm) L Max

Escapements Series MIW/MIS

Supply port 2-M5 x 0.8 FC FA FE FH GD GC GB FG FF EB EA D FB B MIS12-10 A C FD GA Model 72 92 112 86.5 106.5 126.5 33 43 53 38.5 48.5 58.5 48 38 28 165 135 105 185 155 125 MIS12-30 MIS12-20 18 19 9.5 6 (Effective depth 3) 4.5 8 -0.1 0 8 -0.1 0 10 M3 x 0.5 5 3.3 23 26 21 MIS20-30 MIS20-20 MIS20-10 52 42 32 11-0.1 0 11-0.1 0 29.5 35 25.5 13 12.5 10 (Effective depth 4) M5 x 0.8 6.5 28.5 7 5.1

Compact Guide Cylinder

9.5 16.5 15 20 33 12.5 9.5 9.5 12.5 78 M5 16.5 16.5 23 M5 x 0.8 13 M5 x 0.8 5.4 9.5 5.5 Rc1/8 NPT1/8 G1/8 15.5 8.5 25 18 25 38 11.5 9.5 12.5 11.5 90 M5 19 19 27 M6 x 1 15 M6 x 1 5.4 9.5 7 Rc1/8 NPT1/8 G1/8 12.5 11 30 22 Bore size [mm] R S T U VA VB WA WB X XA XB YY YL Z 10 st or less Over 10 st 30 st or less Over 30 st 100 st or less Over 100 st 10 st or less Over 10 st 30 st or less Over

IDX-OM-W023

) (17)(30) 2 2 Rc1/2 10-4 1-1 IDU Series 10-3 10 3 IDX-OM-W023 11 R 11 R 11-1 11-2 1 AC100V AC200V INOUT IDU8E15E1-10-R IDU15E1-20/23-R IDU8E/11E-20/23-R (A) 10 5 (mA) 30 11-3 M5 9.5mm 2 1.25mm L ,N N L () () IDU Series 11-1 11 1 IDX-OM-W023 11 R AC100V M4 () AC200V (M3) 17 11-4 () () ONOFF 11-5 1-1 IDU Series 11-4 11 2 IDX-OM-W023 12.S 12 S 12-1 IDU8E15E1

VZ100/300/500

Note) Apparent power (VA) [Current mA] AC Holding 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Surge voltage suppressor Indicator light DC: Diode, AC: ZNR DC: LED (Red), AC: Neon bulb Option Part no.

IDX-OM-W014

10-3 10 3 IDX-OM-W014 11 R 11 R 11-1 11-2 1 AC100V AC200V, AC230V INOUT IDU3E/4E/6E-10-R IDU3E/4E/6E-20/23-R (A) 10 5 (mA) 30 11-3 M5 9.5mm 2 1.25mm L ,N N L () () IDU Series 11-1 11 1 IDX-OM-W014 11 R AC100V M4 () AC200V, AC230V (M3) 11-4 () () ONOFF 11-5 1-1 IDU Series 11-4 11 2 IDX-OM-W014 12.S 12 S IDU3E/4E/6E-10 12-1 IDU Series 12-1 12-1 IDX-OM-W014 12

Digital Flow Switches

Pin description PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc

4/5 Port Air Operated Valve Series SYJA3000

override (30) 24.5 (37) 23 11.5 20 3 3.5 4 11 2-2.6 (For mounting) (18) 1.8 (Bleed port) With fiflter (80 mesh) (Piping port) 1/8 46.5 19.5 (25) 33.5 21.5 (2.3) (46.5) 8.5 M5 x 0.8 (Piping port) 6 6 15 17 17 R1 P 45.5 24 32 1.8 (Bleed port) With fiflter (80 mesh) R2 21 2 position double: SYJA5220-M5 2 position double: SYJA5240-01 2-4.3 44 2-M5 x 0.8 (Pilot port) 2-M5 x 0.8 (Pilot port) (

HEC-OM-S008

31 30 33 42 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 34 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 41 34 0D 0A Byte Count Read Data1 Hi Lo 30 32 30 39 34 4D HECR 5-6 MODBUS communication function 5.6 Function codes The table berow function codes to read or write register.

44

Width across flat Width across flat Effective area (mm2) Weight (g) L M d 3 x Applicable tubing Model H1 H2 I.D. 2.5 3 4 6 7.5 8 9 10 13 d 4 4 6 8 10 10 12 12 16 KFG2T0425-00 KFG2T0403-00 KFG2T0604-00 KFG2T0806-00 KFG2T1075-00 KFG2T1008-00 KFG2T1209-00 KFG2T1210-00 KFG2T1613-00 1.6 2.6 6 17 30 35 45 57 101 1.8 2.3 3.3 5.3 6.8 7.3 8 9 12 11 10 18 39 67 65 71 67 122 7 8 13.3 5 H2 H2 H2 H1 M

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 40.9 40.3 27.6 27 15.5 15.2 1.5 1.6 13 17 23 22 KFH04-00 KFH06-00 KFH08U-00 KFH08N-00 KFH10U-00 KFH10N-00 KFH12U-00 KFH12N-00 2.5 4 5 6 6.5 7.5 8 9 4 6 8 10 10 12 6 11 17 21 30 35 45 3 4 5 5.5 6.5 7 8 8 16.2 41.3 28 12 14 36 10 18.8 17 17 44.6 30 42 41 12 19.3 17 19 45.5 32 Male elbow: KFL Applicable tube (mm) Thread R(PT) Part No. H1 (Hex.) H2 (Hex.)

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Add 10 g for conduit type, 30 g for DIN terminal type, 60 g for conduit terminal type respectively. Refer to Glossary of Terms on front matter 10 for details on the max. operating pressure differential and the max. system pressure. 3.0 4.5 0.46 0.61 2.3 3 8 (10A) 6 0.3 1.1 4.1 8 0.3 1.6 6.4 1.0 10 0.3 2.2 11 1 2 (15A) 10 0.3 2.2 11 Note) Weight of grommet type.

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

(F: Thrust of one finger) 50 50 Pressure 0.6MPa MHS Pressure 0.6MPa 40 40 Holding force (N) 0.5MPa 0.5MPa Holding force (N) 30 30 0.4MPa 0.4MPa MHC2 0.3MPa 0.3MPa 20 20 MHT2 0.2MPa 0.2MPa 10 10 MHY2 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 MHW2 Holding point L (mm) Holding point L (mm) MRHQ MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 F F Auto switch 80 80 Pressure 0.6MPa 0.6MPa Pressure 70 70