MRQ

11 12 2 wire 3 wire 56 Solid state switch D-F7 4 wire 56 14 Write "L" at the end of the part number for 3 meters of lead wire.

VNB

7 12 11 18 11 18 19 28 19 28 29 43 29 43 130 220 210 320 210 320 330 500 330 500 520 770 520 770 1.4 1.5 VX 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 4 1 2.5 2.6 VX3 5.7 5.8 32 JIS Symbol VXA Valve type Type N.C.

Angle Seat Valve /

Fluid Nil No L Yes Thread type*1 5 Steam Nil Rc A G B NPT Body material/Port size/Orifice diameter Symbol Body material Port size Orifice diameter A Bronze (CAC) *1 The thread type for the main piping and pilot piping is the same. 3/8 11 B 1/2 14 C 3/4 18 D Stainless steel 316L equivalent Pressure type 3/8 11 E 1/2 14 F 3/4 18 Nil Standard H High pressure Other Special Options Special Entry

MGQ

For details, refer to page 8-30-32. 8-20-11

Modular Type Lubricators Series AL

If unit is to be used in a washdown application, avoid directing fluid into the exhaust port. 10 Accessories Spacer Dimensions mm Epoxy Coated Aluminum, Stainless Screws, NBR Seals Model A Y20-T4 Y30-T4 Y40-T4 10 11 14 F.R.L. center Interface With T Bracket Interface with T-type bracket T-type bracket Epoxy Coated Aluminum, Stainless Screws, NBR Seals G F.R.L.

Low Differential Pressure Sensor

to 500 kPa 50 to 500 kPa A sensor may be unconnected or mis-wired.

VXF

Flow rate Q (Nl) Flow rate Q (Nl) Tube 2,000 Tube 2,000 mm 500 mm 6 x 8 pcs. 6 x 8 pcs. 500 mm 500 mm mm 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. Time T1, T2 (ms) Without tube (VXF2150) Without tube Without tube (VXF2150) PM: Raised up to 0.48 MPa PM: Raised up to 0.48 MPa PA=0.5 MPa 6 x 6 pcs. PA=0.5 MPa A=0.5 MPa 6 x 6 pcs.

0.4

Flow rate Power consumption Operating frequency 100 Hz 500 Hz 1000 Hz 80 W 1200 Hz Low flow type 50 L/min 40 W 1000 Hz 10 W 550 Hz 4 W 350 Hz 80 W 650 Hz Medium flow type 100 L/min 40 W 550 Hz 10 W 300 Hz 4 W 200 Hz 80 W 600 Hz High flow type 150 L/min 40 W 500 Hz 10 W 250 Hz 4 W 150 Hz VCH VDW SX10 SX10 Select a model according to applications and purposes.

ZSE30A(F)/ISE30A

Available response time settings 20 ms, 100 ms, 500 ms, 1000 ms, 2000 ms This function averages pressure values measured during the response time set by the user and then compares the average pressure value with the pressure set point value to output the result on the switch.

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 500mm, Motor Option: B (w/Lock)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 800mm

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 150mm

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 250mm

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 550mm, Motor Option: B (w/Lock)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 600mm, Motor Option: w/o Lock, Vacuum Port: R (Right)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 700mm, Motor Option: B (w/Lock)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 100mm

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 100mm, Motor Option: B (w/Lock)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 400mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 200mm, Motor Option: B (w/Lock)