Thomas Oil-less Diaphragm Compressor / Vacuum Pump Flow Rate: 11 LPM , 11 LPM, Max Pressure: 11.6 PSIG / 800 mbar , 11.6 PSIG / 800 mbar, Max Vacuum: 21.6 in HgV / -730 mbar , 21.6 in HgV / -730 mbar, Voltage (DC): 24, DC Motor Type: Standard, Item Dimensions: Length: 5.91 in / 150 mm Width: 3.43 in / 87 mm Height: 2.44 in / 62 mm , Length: 5.91

Thomas Oil-less Diaphragm Compressor / Vacuum Pump Flow Rate: 11 LPM , 11 LPM, Max Pressure: 11.6 PSIG / 800 mbar , 11.6 PSIG / 800 mbar, Max Vacuum: 21.6 in HgV / -730 mbar , 21.6 in HgV / -730 mbar, Voltage (DC): 12, DC Motor Type: Standard, Item Dimensions: Length: 5.91 in / 150 mm Width: 3.43 in / 87 mm Height: 2.44 in / 62 mm , Length: 5.91

Vacuum Pad

14 18 30.5 37 47 11 14.5 20.5 11 14 18 30.5 37 47 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Modular Design with Uniform Body Style

*11 *11 *11 *11 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options B, G, H, and M are not assembled and supplied loose at the time of shipment. *3 The assembly consists of a bracket and set nuts (applicable to the AR20(K)-D to AR40(K)-D).

7ND9071en

CSA C22.2 No. 0-M91, CSA C22.2 No. 94-M91, CSA C22.2 No. 142-M1987, CSA C22.2 No. 157-92, CSA C22.2 No. 213-M1987, CSA C22.2 No. 60079-0:11, CSA C22.2 No. 60079-11:11, CSA C22.2 No. 60079-15:12, CSA C22.2 No. 60529:05, ANSI/ISA 60079-0: 2009, ANSI/ISA 60079-11: 2012, ANSI/ISA 60079-15: 2012, FM 3600 November 1998, FM 3610 October 1999, FM 3611 October 1999, FM 3810-2005, ANSI/ NEMA 250:1991

HRX-OM-X084

9.5.1 HRR010-A-10. 9-11 9.5.2 HRR010-W-10. 9-11 9.5.3 HRR010-A-20. 9-12 9.5.4 HRR010-W-20. 9-12 9.6 Pump capacity. 9-13 9.6.1 HRR010-A/W-10 . 9-13 9.6.2 HRR010-A/W-10-T1 . 9-13 9.7 Required facility water flow (for water-cooled type) . 9-14 9.7.1 HRR010-W-10/20. 9-14 9.8 Types of Hazard Labels . 9-15 9.8.1 Locations of Hazard Labels . 9-15 9.9 Daily Check . 9-16 Chapter 10 Product Warranty

IDX-OM-W020

T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 12 V 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 13 13-1 . 13-1 IDFB Series 2 IDX-OM-W020 i i i 1 () OFF 3 ON OFF i 1 1 3 i-1 IDFB Series i 1 IDX-OM-W020 i i 2 5 i 2 1 i-2 IDFB Series i 2 IDX-OM-W020 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 i-2-2 IDFB Series i 3 IDX-OM-W020 i i 2 6 WARNING !

IDX-OM-W035

T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 11-6 . 11-4 12 V 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 12-4 . 12-2 13 13-1 . 13-1 -2 IDX-OM-W035 i i i-1 () 3 i-1-1 3 IDFB Series i-1 i-1 IDX-OM-W035 i i-2 5 . i-2-1 i-2 IDFB Series i-2 IDX-OM-W035 i i-2-2 i-2-3 50 i-2-4 i-2-5 0 i-2 IDFB Series i-3 IDX-OM-W035 i i-2-6 WARNING !

MGP

B + Stroke A + Stroke E MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q GC 59.5 37.5 12 12 16 16 10 10 12 12 48 54 64 78 12.5 12.5 112 120 148 162 24 27 32 39 M8 x 1.25 20 20 22 22 M8 x 1.25 6.6 6.6 8.6 8.6 15 34 38 47 55 16 16 20 20 9 M6 M6 M8 24 27 32 39 11 11 14 14 30 30 40 50 34 40 46 58 7.5 7.5 9 9 Rc

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

2 e (1 pc.) @0 10-11-11 11 Series MIW/MIS Dimensions: Double Finger Type MIW-D 2-P Supply port 3-LA Scraper mounting thread EB FB NB ME PE GD LB JA B FA FC GC GB JB Mounting hole 4-GA LC C EA D 2-P Attachment mounting thread 4-FD through Supply port PD NA FF FE PC PA A Mounting threads 4-MA thread depth MB Groove position for auto switch mounting HB depth HC HD (2 pcs.)

CRB2/CRBU2/CRB1

Note) These items (No. 11, 13, and 14) consist of auto switch unit and angle adjuster. Refer to pages 84 and 85 for detailed specifications.

JXCx-OMT0005CN

(P.23) 10.1 (P.33) 3.4 (P.16) 11.(P.42) (CN1: EMG 3.(P.12) ) INP ON 10.1 (P.33) (INP PLC ) 5 3.(P.12) PLC (PLC) 2 12.4 (P.50) 11.(P.42) 3.(P.12) 83 - 5.(P.23) 10.1 (P.33) 3.(P.12) PLC (PLC) 2 12.4 (P.50) () () (LED() 3.2 (P.13) ) 11.(P.42) 5 11.(P.42) 11.(P.42) 3.(P.12) (CN1: EMG 3.

C95

12 14 18 20 21 24 33 37 47 55 7 9 11 11 12.5 13.5 18 22 30 35 40 50 26 28 32 40 50 60 31 35 45 50 60 70 32 36 45 50 63 71 8 10 12 12 14 15 10 11 12 15 15 19 32 40 50 63 80 100 11 11 15 15 18 18 10 12 16 16 20 20 21 24 33 37 47 55 8.5 8.5 10.5 10.5 11.5 12.5 10 10 12 12 14 15 6.6 6.6 9 9 11 11 38 41 50 52 66 76 18 22 30 35 40 50 31 35 45 50 60 70 15 18 20 23 27 30 51 54 65 67 86 96 32 36

IDX-OM-W032

T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 11-6 . 11-3 12 V 12-1 . 12-1 12-2 . 12-2 12-3 . 12-3 12-4 . 12-3 13 13-1 . 13-1 2 IDX-OM-W032 i i i 1 () OFF 3 ON OFF i 1 1 3 IDFA Series i-1 i 1 IDX-OM-W032 i i 2 5 i 2 1 IDFA Series i-2 i 2 IDX-OM-W032 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDFA Series i-2 i 3 IDX-OM-W032 i i 2 6 WARNING !

MGP

(Plug) PA+stroke S G FA FB C+stroke B+stroke A+stroke E MGPM, MGPL/Common Dimensions Standard stroke (mm) Bore (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q GC 59.5 37.5 12 12 16 16 10 10 12 12 48 54 64 78 12.5 12.5 112 120 148 162 24 27 32 39 M8 X 1.25 20 20 22 22 M8 X 1.25 6.6 6.6 8.6 8.6 15 34 38 47 55 16 16 20 20 9 M6 M6 M8 24 27 32 39 11 11 14 14 30 30 40 50 34

Precision Regulator

0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) 817 IR1000/2000/3000 Series IR3000 Series The operating conditions or external disturbance may affect each of the characteristics.

TM

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com No. of connecting tubes (Max.) 8 6 12 Applicable tubing O.D.

Drain Separator for Vacuum Series AMJ 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc. Removes water droplets from air by simply installing in vacuum equipment connection lines.

HRX-OM-X071

9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.7.1 HRR050-W-20. 9-15 9.7.2 HRR050-W-40. 9-15 9.8 Types of Hazard Labels

Fieldbus System

Bottom Ported How to Order Manifold SS5Y S6 10 3 Q C6 2 05 U Refer to the SY3000/5000 series catalog (CAT.ES11-103) for Type 11/Bottom ported dimensions.