Thermo-chiller type 0.1 5 to 40 V V V HRS090 Standard type 0.5 5 to 35 V Indoor use (400 V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V HRSH090 Inverter type 0.1 5 to 40 V Indoor use (400 V as standard, 200 V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (400 V as standard, 200 V as an option
0 -0.05 11 Auto switch mounting groove dimensions 5.7 3 9 6.2 Auto switch mounting groove 19 5 In the case of single action, the port on one side is a breathing hole.
4 3 4 5 3 4 5 3 2 2 2 1 1 1 1 5 10 20 10 5 1 20 30 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) Transfer speed (m/min) Lever-type weight of transferred object and transfer speed graphs (graphs (2) and (3)) show the values at room temperature (20 to 25C).
E Bore (mm) TX 0 -0.033 20 33.5 5 6 5 18 15.5 26 13 10.5 10 41 8 13 20 NANote) 0 -0.033 0 -0.033 0 -0.039 25 37.5 5.5 8 6 22 19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.
E Bore (mm) TX 0 -0.033 20 33.5 5 6 5 18 15.5 26 13 10.5 10 41 8 13 20 NANote) 0 -0.033 0 -0.033 0 -0.039 25 37.5 5.5 8 6 22 19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.
460 460 460 460 460 460 1/8 C6 13/64 VX210 1 5/64 1/8 C8 13/64 5/32 9/32 5/32 9/32 C8 VX220 2 C10 13/64 5/16 C10 25/64 13/64 VX230 3 5/16 C12 25/64 Note) Weight of grommet type.
to 60 (High temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure Pa Conductance l/s Note 1) 14 45 80 160 200 5 1.3 x 10-10{1 x 10-10} at ambient temperatures, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperatures, excluding gas permeation External Operating time s 0.15 0.35 0.4 0.54 0.7 0.08 KF (NW), CF KF (NW) KF (NW),
5 C C *Applicable stroke Standard produced upon receipt of order *produced upon receipt of order (Only Robotic type cablecan be selected) 100 100 200 200 300 300 400 400 500 500 600 600 700 700 800 800 900 900 1000 1000 Actuator cable type 11-LEFS16 11-LEFS16 Without cable Nil Without cable Nil 11-LEFS25 11-LEFS25 Robotic type cable R Robotic type cable R 11-LEFS32 11-LEFS32 Standard
08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.
175 185.5 5 77.5 88 162.5 173 4 67 77.5 150 160.5 3 56.5 67 150 160.5 2 46 56.5 137.5 148 VQ4 25 35.5 112.5 123 L1 L2 L3 L4 VQZ Dimensions/Top entry connector [FU] (mm) VQD n L 1 100 110.5 16 15 250 260.5 14 237.5 248 13 237.5 248 12 225 235.5 11 212.5 223 10 200 210.5 9 187.5 198 8 175 185.5 7 162.5 173 6 162.5 173 5 150 160.5 4 137.5 148 3 125 135.5 2 112.5 123 L3 L4 100 110.5 VZS How
to 55C (23 to 131F) Note 1) 5 to 55C (23 to 131F) 5 to 55C (23 to 131F) Note 1) 5 to 50C (23 to 122F) Inlet air temperature Ambient temperature 5 to 50C (23 to 122F) 5 to 50C (23 to 131F) Outlet air atmospheric pressure dew point Inlet air flow rate l/min (ANR) (SCFM) Note 2) Standard performance 25C (68F) 62 (2.2) 125 (4.4) 250 (8.8) 375 (13.2) 625 (22.1) 900 (31.8) 1190 (42.0) 725 (25.6
08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.
6-8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective
) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S
25 (6, 1/4") 5 5 2 2 2 OUTxport (4, 5/32") Note) 3.7 Breathing hole (M3 x 0.5) Note) For dimensions of the cable connector, refer to single unit on page 14-8-8.
4@3 #5 t @7 $5!5@4 !8@0!7 !9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.
L1-(3 x P) X = L1 = X = Q2 = M CRJ CRA1 [mm] Size CRB2, CRBU2 Y L2 max Q2 10 5.5 to 8 Y-1 3 15 7.5 to 9 Y-1.5 3, 4 20 9 to 10 Y-1.5 3, 4, 5 30 11 to 13 Y-2 3, 4, 5, 6 40 14 to 15 Y-4.5 3, 4, 5, 6, 8 [mm] CRQ2 Size CRB2 CRBU2 X L1 max Q1 X L1 max Q1 10 7.5 to 14 X-3 3 5.5 to 14 X-1 3 15 10 to 18 X-4 3, 4 7.5 to 18 X-1.5 3 20 12 to 20 X-4.5 3, 4, 5 9 to 20 X-1.5 3, 4 30 14 to 22 X-5 3, 4, 5
(0.2) 10 (0.4) Note) 15 (0.6) Note) 20 (0.80) Note) 5 (0.2) 5 (0.2) 1 pc.
Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9