TABLE OF CONTENTS

T orque 4 : 4.4 LB . in 1 .39 (9.9) RECEPTACLE WITH .37 (9.4) SPACING 1.02 (25.9) .13 (3.3) DIA.

V

for Main & Pilot Pilot Exhaust Internal Pilot Individual Exhaust for Pilot Valve External Pilot Free Mounting Position 0.3 0.7 1.2 Cv Factor M O D E L R E S P O N S E T I M E S E R I E S S Y 3 / 5 / 7 0 0 0 Response Time ms 71 PSI / 0.5MPa Model Configuration W/O Indicator Light With Indicator Light & Surge Suppressor & Surge Suppressor 12 or less 15 or less 2 Position Single 10 or less 13

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Inch Size Holder for speed controller Applicable tubing 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002FS TMH-01J TMH-03J TMH-07J AS2002FS AS2052FS TMH-07 TMH-09 AS3002FS TMH-10 AS4002FS TMH-13 Tubing size Applicable model Dimensions D2 through Part no.

Solid State Auto Switches

Weight (g) D-F79F Auto switch model 0.5 m (Nil) 13 3 m (L) Lead wire length 56 5 m (Z) 90 Diagnostic Output Operation The diagnostic output signal is output within the red display area (where indicator light is Red), and it is not output within the proper operating range (where indicator light is Green).

Brake mechanism added

Bore size (mm) Nut Width across flats Socket Width across flats Socket Mounting bracket nut Unit holding tie-rod JIS B 4636 2 point angle socket 10 10 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 With connector: Within 20.5 mm 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 13 How to Manually Disengage the Lock and Change from the Unlocked to the Locked State Manual unlocking 1.

•

71 43 19 14 190 230 15 M14x1.5,15 13 0125 Up to 1000 50 47 143 145 17 15 27 171 27 . t3 128 20 212 112 255 '15 'UpJo.1 QOO 50 47 157 1060 32 19 15 43 M14n.. ?

New

9/32 5/32 9/32 C8 VX220 2 C10 13/64 5/16 C10 25/64 13/64 VX230 3 5/16 C12 25/64 Note) Weight of grommet type.

MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

CLQ

6 Spring pin Carbon steel Carbon steel #1 #2 #3 Unit holding bolt Nickel plated JIS B 1354 Parallel pin Stainless steel Aluminum alloy Piston Chromated Nickel plated Rod end nut Carbon steel Lead-bronze casted Bushing For 50 or larger only 9-10-13 13 Series CLQ Dimensions: 20, 25 Basic style (Through-hole/Both ends tapped common): CLQB20/25 Extension locking LOCK M5 x 0.8 Rod side cylinder

Fluoropolymer Piping Equipment

136 127.5 49 22 13 50 55 (E, E) (E, E) L1, L1 L2, L2 Panel hole diameter K Inch Size Model Applicable tubing O.D.

EXxx-OMY0006CN

EX245-DX1EX245-DY1 EX600-ZT1 1 88 EX600-ZT1 Fig. 13-1 EX600-ZT1 80 No.EX##-OMY0006CN 13.2. Y Y (EX245-DX1EX245-DY1) Y 2 2 x M12 M12 2 x M8 M12 PCA-1557785 Y (2 x M12 M12) Fig. 13-2 PCA-1557785 81 No.EX##-OMY0006CN PCA-1557798 Y (2 x M8 M12) Fig. 13-3 PCA-1557798 13.3. EX245-FPS1/2/3EX245-DX1EX245-DY1 M12IP65 EX9-AWTS (M12 10 ) Fig. 13-4 EX9-AWTS 0.2Nm 82 No.EX##-OMY0006CN 14. 14.1.

HRX-OM-W038

Press the [SEL] key 13 times. The set screen of data reset is displayed on the digital display. PV SV 3. Select from the table below with [] key or [] key, and confirm by pressing SEL. Select , then all data returns to default setting. The display returns to the main screen.

HRX-OM-O021

Fig. 3-12 Tightening of piping Recommended piping circuit Fig. 3-13 Recommended piping circuit No. Description Size Recommended part no. Note 1 Valve Rc1/2 2 If foreign objects with a size of 20 m or more are likely to enter, install the particle filter.

HRX-OM-R005

Fig. 3-12 Tightening of piping Recommended piping circuit Fig. 3-13 Recommended piping circuit No. Description Size Recommended part no. Note 1 Valve Rc1/2 2 If foreign objects with a size of 20 m or more are likely to enter, install the particle filter.

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

JXCx-OMT0061CN

PLC 5 (PLC) 15ms30ms ->/P.55 12.4 () () (LED() ->/P.13 3.2 ) ->/P.47 11. ->/P.47 11. ->/P.47 11. ->/P.12 3. (CN1: EMG ->/P.12 3. ) 92 - 22. 10.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

26 5 8 22.3 34 M8 X 1.25 M20 X 1.5 41 8 15 116 18 13 28 5 15 24 62 20 Up to 300 7.5 10 33.5 M10 X 1.25 19.5 17 32 6 8 25.3 37 M26 X 1.5 45 8 15 120 22 13 5.5 15 30 62 26 Up to 300 7.5 12 37.5 M10 X 1.25 19.5 17 32 6 8 27.6 M26 X 1.5 39.3 34.5 45 8 15 122 22 13 5.5 15 64 26 Up to 300 14 22 41 8 10 33.6 46.5 21 10.7 47.8 M14 X 1.5 21.5 42.5 M32 X 2 50 11 154 24 16 7 19 88 32 With rod boot

ZU

Pmax P1 Vacuum pressure Qmax Q1 Suction flow rate 13-6-4

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, 25MM MXS CLEAN ROOM, ACTUATOR, MXS/MXJ GUIDED CYLINDER, I5, 25MM MXS CLEAN ROOM, 5.40979 lb

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS22l1FSl-U01-01 1/8" 7.2 12 19.1 26.1 (26) 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS22l1FSl-U01-03 5/32" 8.2 AS22l1FSl-U01-07 1/4" 11.2 20.8 27.8 (27.7) 14 (13) AS22l1FSl-U01-09 5/16" 13.2 22.4 29.4 (29.3) 14.2 15 (14) AS22l1FSl-U02-01 1/8" 1/8 13 (12.7) 7.2