Table of Contents

22 13.5 22 6 63 15.5(14) 24.5 24.5 17 24.5 9.5 RS H A 80 22(20.5) 37 37 23.5 37 16 The values inside ( ) are for D-Z73.

Hydraulic

22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 17 20 1/4 stroke 80 65 25 to 1800 100 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122 85 19 15 100 80 25 to 1800 Rod series Tolerance (mm) B-series rod C-series rod Bore size (mm) Bore size (mm) LH LX E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34 M16 x 1.5 25 22 18 7 14 66 220 -0.025 -0.064 0.15

F

21 41.5 5/16 1/8 KQH09-U01 14.29 25.5 21.5 18.5 6 10 38 KQH10-U03 17 24 18 21 41.5 5/16 1/4 KQH09-U02 14.29 21.5 15.5 18.5 6 10 12 KQH10-U04 22 22 14 21 41.5 5/16 3/8 KQH09-U03 17.46 21 15 18.5 6 12 14 KQH12-U02 19 30.5 24.5 22 58.3 3/8 1/4 KQH11-U02 17.46 28 22 21 7 12 38 KQH12-U03 19 25.5 19.5 22 58.3 3/8 3/8 KQH11-U03 17.46 28 22 21 7 12 12 KQH12-U04 22 24.5 16.5 22 58.3 3/8 1/2 KQH11

Smooth Cylinder/Low Speed Cylinder

A A1 E1 L1 MM RR1 U1 NZ L 42 56 71 79 14 18 21 21 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 I-G04 I-G05 I-G08 I-G10 10 14 18 22 18 22 28 32 +0.058 0 0.3 0.5 36 42 56 71 79 16 20 23 24 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 41.6 Y-G04 Y-G05 Y-G08 Y-G10 10 18 22 28 32 IY-G04 IY-G05 IY-G08 IY-G10 +0.5 +0.3 +0.058 0 M18 x 1.5 +0.070 0 0.3 0.5 44 M18 x 1.5 50.6

Air Fittings & Tubing

Kl 9.8 19.5 20 16.5 21 11 KQ2ZF04-M5 8 21 24 47 32 49 54 M5 X 0.8 8 10.4 16 10.4 4 13.4 1 8 1 8 1 4 1 8 1 4 1 4 3 8 3 8 1 2 15.5 29.5 25.5 KQ2ZF04-01S 14 Ml 15.5 22 17 22 22 29.5 25.5 35 27 35 35 39 39 42 KQ2ZF06-01S 13.4 22 14 6 12.8 17 12.8 41 KQ2ZF06-02S 20.6 25.5 19 31 41 41 17 KQ2ZF08-01S 17.6 25.5 Hl 8 15.2 15.2 18.5 19 19 22 22 24 KQ2ZF08-02S 20.6 27 KQ2ZF10-02S 20.6 29 Dl

Fluoropolymer Piping Equipment

25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 12 x 10 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 19 x 16 19 x 16 6 x 4 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1/8" x 0.086" 3/8" x 1/4" 3/8" x 1/4" 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 1/4" x 5/32" 1/2" x 3/8" 1/2" x 3/8" 1/8" x 0.086" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3

Table of Contents

Manifold Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit VVX21/22/23 17-3-25 N.C./N.O. Manifold 17-2-74 VDW200/300 C.O. 3 port Single unit Pilot operated Diaphragm operation VXD21/22/23 17-3-33 N.C./N.O. Single unit Pilot operated Disk operation VXP21/22/23 17-3-43 N.C./N.O. Single unit 2 port Pilot operated (Water hammer relief type) VXR21/22/23 17-3-53 N.C./N.O.

Table of Contents

82 30 64 18 15 M6 x 1.0 1/8 1/4 3/8 7 to 9 0.5 mm or less 32 98 34 78 22 18 M8 x 1.25 12 to 14 1 mm or less 40 M8 x 1.25 106 40 86 22 18 22 to 24 1 mm or less 50 M10 x 1.5 130 46 110 27 22 a Plug M10 x 1.5 63 142 58 124 27 22 M12 x 1.75 80 180 54 156 33 28 M14 x 2.0 100 210 62 188 39 33 8-19-6 Series MGP/ In the Case of With End Lock Specific Product Precautions Be sure to read before handling

5

22 32 +0.5 +0.3 64 72 IY-G10 Part no.

Made to Order

104 6 22 20 77 43 250, 300 0 0.074 102.5 M12 x 1.75 80.5 27 30 M20 x 2.5 3/8 23 22 123.5 25 117 6.5 27 22 94 59 Note 1) For 125 to 200 strokes, strokes are available in 25 mm increments.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

13 31 100 214.5 22 53.5 75, 100 125.5 192.5 214.5 125.5 192.5 RR CW L B + Stroke CZ -0.1 -0.3 CL + Stroke Bore size (mm) Standard stroke CW CX CZ N RR A + Stroke 32 20 18 36 M6 x 1.0 10 Rod end male thread 40 22 18 36 M6 x 1.0 10 10, 15, 20, 25 50, 75, 100 50 28 22 44 M8 x 1.25 14 63 30 22 44 M10 x 1.5 14 80 38 28 56 M12 x 1.75 18 25, 50, 75, 100 100 45 32 64 M12 x 1.75 22 Rod end nut L1

SMC

22 22 22 20 26 32 40 30 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 NA 2 2 2 2 2 2 4 4 4 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA 162 218 258 13-/22-MXS25L-10 13-/22-MXS25L-20 13-/22-MXS25L-30 13-/22-MXS25L-40 13-/22-MXS25L-50 13-/22-MXS25L-75 13-/22-MXS25L-100 13-/22-MXS25L-125 13-/22-MXS25L-150 151 MXS Air slide table 1322Specific Product Precautions Made

Stability of suction position,

22 22 19 19 19 34.6 61.1 86.1 25 9.5 9.5 9.5 Weights [g] Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-Y32BMl-AL14 60.4 59.9 64.0 ZP3E-Y40BMl-AL14 64.4 63.5 70.4 ZP3E-Y50BMl-AL14 78.5 77.0 89.0 ZP3E-Y63BMl-AL16 ZP3E-Y80BMl-AL16 Width across flats 22 M16 x 1.5 Width across flats 22 M16 x 1.5 Rc1/8 42.6 69.1 94.1 25 6

ISO Cylinder

105 16 16 M16 x 1.5 6 M5 x 0.8 17 8 6 38 14.2 5 M6 x 1 24 8 18.3 16 56 10 22 111 20 20 M22 x 1.5 8 G1/8 20 8 8 44 17 6 M8 x 1.25 32 11 24 22 62 13 24 126 25 22 M22 x 1.5 10 G1/8 22 8 8 50 20 8 M10 x 1.25 32 11 30 22 65 17 28 137 With Rod Boot [mm] Item AM C e f K KK h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 20 8 36 22 6 M8 x 1.25 71 84 96 109 134 159

Air Cylinder

22 8 27 5 28 5 6 M8 x 1.25 24 20 0 0.033 1/8 76 103 25 1 to 200 22 19.5 17 10 36.4 M6 x 1 depth 11 26 22 8 31 6 33.5 5.5 8 M10 x 1.25 30 26 0 0.033 1/8 76 107 32 1 to 200 22 19.5 17 12 42.4 M6 x 1 depth 11 30 22 8 31 6 37.5 5.5 10 M10 x 1.25 34.5 26 0 0.033 1/8 78 109 40 1 to 300 24 21 22 14 52.4 M8 x 1.25 depth 14 36 27 11 34 8 46.5 7 12 M14 x 1.5 42.5 32 0 0.039 1/4 104 138 Female Rod

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Nil TN TF Rc NPT 21 22 Relief type Vacuum suction type G Cylinder stroke (mm) Rubber bumper only Model Cushion Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 1/8 Relief type Vacuum suction type 25, 50, 75,

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25-40 13-/22-MXS25-50 13-/22-MXS25-75 13-/22-MXS25-100 13-/22-MXS25-125 13-/22-MXS25-150 795 MXS 1322Air Slide Table Dimensions: MXS25 1322Axial piping

KR

18 17 17 10 29.5 29.5 21 24 14 T 1 2 KAH10-U04 22 14 28 22 16 22 Connection thread 1 4 3 8 KAH12-U02 KAH12-U03 24.5 19.5 30.5 25.5 19 VMG 19 12 46.1 46.1 22 1 2 KAH12-U04 24.5 16.5 22 28 Reference dimensions after Uni thread installation.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

306 13-/22-MXQ2010 13-/22-MXQ2020 13-/22-MXQ2030 13-/22-MXQ2040 13-/22-MXQ2050 13-/22-MXQ2075 13-/22-MXQ20-100 13-/22-MXQ20-125 13-/22-MXQ20-150 Note) Note) 1322Note) Refer to the bottom view of MXQ20-50. 817 MXQ 1322Air Slide Table Dimensions: MXQ20 1322Axial piping (20): MXQ20-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure

CQ2

Rc(PT)3/8 66 6 21 22 25 20 98 77 43 250, 300 100 M20 X 2.5 132.5 M12 X 1.75 23 67.5 26 22 97.5 156 Rc(PT)3/8 75.5 6.5 27 27 30 22 117 94 59 Note 1) All the 125 to 200mm stroke types are in 25mm increments.