Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type/Double vane type CRBU2W40-S/D h 52 64 Keyway dimensions b l h (h9) l b (h9) Model CRBU2W400 0.030 4 20 0 0.030 4 85 38 2 x 5.5 through 2 x M5 x 0.8 through 25h9 0 0.052 10g6 0.005 0.014 11.5 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 2 20 30 2 x 5.5 through 2 x 5.5 through 38 20 3 5 5 16 14 (98) 53 B port A port 2 x

CV/MVGQ

50 53 24 16 7 77 21 22 41 8 76 46.5 21.5 42.5 M32 x 2 M14 x 1.5 Dimensions by Stroke Single Acting/Spring Extend MVGQ Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Q Symbol Bore (mm) 20 25 32 40 QY CC Z Z Z S S S Z S ZZ ZZ ZZ ZZ S Z ZZ 20 25 32 40 65.3 19.8 112 137 87 143 168 193 133 158 183 14 RB 70.5 22 112 137 87 147 172 197 137 162 187 14 76.5 25.8

XM, XY

87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 70 P.C.D 58.7 6 x 6.6 114 P.C.D 92.1 8 x 8.4 95 110 XYA/In-line type C D XLA G Fd C XL (K flange) XLQ XM XY XM XY B DXSA XVD H 45 XGT A CYV E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53

Ejector Valve Unit Series ZYY/ZYX

Note 1) Note 2) Max. vacuum pressure Manual override S L 84 kPa 53 kPa Nil D E Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nozzle diameter 07 10 0.7 mm 1.0 mm 1082 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYX3000 ZA Lead wire/ Voltage suppressor specifications ZX Plug-in type Serial transmission type LOZ ZR LOZ 10 X3 ZY 5 M Z

SJ3A6

-1A-N VZ1000-11-1-l SJ3000-53-2A End block assembly DIN rail End block assembly For U side Refer to page 61.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

JA/JAH/JB/JS

nominal size M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1 M8 x 1.25 M10 x 1 M10 x 1.25 M10 x 1.5 M12 x 1.25 M12 x 1.5 M12 x 1.75 M14 x 1.5 M16 x 1.5 M16 x 2 M18 x 1.5 d: Thread nominal size M20 x 1.5 M20 x 2.5 M22 x 1.5 M24 x 1.5 M24 x 2 M24 x 3 M26 x 1.5 M27 x 1.5 M27 x 2 M30 x 1.5 M30 x 2 M33 x 2 M36 x 1.5 M39 x 1.5 M42 x 3 M48 x 1.5 D C B B H H C D CE1 29 29 31 34 34 34 39 39 39 44 44 48 53

CA2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Ht Ht Bore size (mm) Ht 44 52 59 Ht Hs 53 60 67 Hs 30 34 41 48.5 56 Ht 34 38.5 46.5 55 63 Hs 30 34 41 48.5 56 Ht 30.5 35 42.5 51 59 Hs 30 34 41 48.5 56 40 50 63 80 100 30 34 41 49.5 58.5 B 32 A Operating Range Bore size Auto switch model 40 8 50

70astamb1

53 73 73 MB-B03 MB-B05 11 11 MB-B08 Rotating Angle Method for longitudinal mounting of clevis pivot bracket When there is no air cushion, the unit is equipped with rubber bumpers.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

depth 4.5 (Piping port) IN 2-M3 x 0.5 (Through-hole) 2-M3 x 0.5 CX (Through-hole) D2-M5 x 0.8 thread depth 4.5 2-M3 x 0.5 thread depth 4.5 (Opposite side: Same) S (13 + ST) 10 (Piping port) (Opposite side: Same) -X 3 208 6 Data 22.5 11 Z (10 + 1/2 ST) (13) 4 (mm) Z S SS ZZ Stroke Model CXS6-10 CXS6-20 CXS6-30 CXS6-40 CXS6-50 68.5 10 15 23 55 78.5 20 20 33 65 88.5 30 25 43 75 98.5 40 30 53

MG

49 MGPM (Slide bearing) A, DB, E Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB A E DB Over 200 st Over 50 st to 200 st Over 50 st to 200 st Bore size (mm) Bore size (mm) Over 200 st Over 30 st to 100 st Over 30 st to 100 st Over 200 st Over 100 st to 200 st Over 100 st to 200 st 50 st or less 50 st or less Over 200 st 30 st or less 30 st or less 104 104.5 51 51 20 25 53

MTS

(N) Backlash Manual release Head end only 125 211 29 53 82 329 Bore size (mm) Standard stroke (mm) 1 mm Non-lock type only 8 5, 10, 15, 20, 25, 30 12, 16 25, 50, 75, 100 Theoretical Output 25, 50, 75, 100, 125, 150, 175, 200 20, 25, 32, 40 (N) Strokes other than the above are produced upon receipt of order.

EXxx-OMO0027

XML file 53 Setting using TwinCAT System Manager 53 I/O Map 62 Diagnostic 63 Details of diagnostic data 66 Parameter settings using TwinCAT (SDO communication) 68 Accessories 100 -1No.EX-OMO0027-A Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

EXxx-OMW0014CN

No.EX-OMW0014CN-A PROFINET SI / / EX245-SPN1A/2A/3A(SI ) EX245-DX1() EX245-DY1() EX245-LA1/LB1(IO-Link ) EX245-EA2-() 1. 11 1.1. 11 1.2. 12 2. 13 3. 14 3.1. 14 3.2. 16 4. 22 4.1. 22 4.2. 26 5. 30 5.1. 30 5.2. 34 6.SI 35 6.1. 35 6.2. 37 6.3. 39 6.4.LED 40 6.5. 43 7.EX245-DX1 46 7.1. 46 7.2. 47 7.3. 48 7.4. 48 7.5 LED 49 7.6. 50 8.EX245-DY1 51 8.1. 51 8.2. 52 8.3. 53 8.4. 53 8.5.LED

EXxx-OMU0020CN

EX245-DX1 . 51 7.1. . 51 7.2. . 52 7.3. . 53 7.4. . 53 7.5. LED . 54 7.6. . 55 8. EX245-DY1 . 56 8.1. . 56 2 No.EX-OMU0020CN 8.2. . 57 8.3. . 58 8.4. . 58 8.5. LED . 59 8.6. . 60 9. EX245-EA2-1/2 . 61 9.1. . 61 9.2. . 62 10. . 63 10.1. . 63 10.2. Y . 64 10.3. (M12 ) . 66 11. . 67 11.1. . 67 12. . 68 12.1. EX245-SPN1 . 68 12.2. EX245-DX1 . 70 12.3.

EXxx-OMY0004

Wiring . 53 10.4. Safe digital I/O Safe digital inputs . 53 10.5. Safe digital I/O Safe power supply (outputs). 54 10.6. Safe parameter values . 54 10.7. Process data for valves . 59 10.8. Output status unit . 59 10.9. LED indicators . 61 10.10. Production label . 65 2 No.EX##-OMY0004 10.11. DIP Switches . 65 10.12. Block diagram . 68 11. Digital Input Module EX245-DX1 . 70 11.1.

EXxx-OMY0006CN

SI . 49 10.1. . 49 10.2. . 51 10.3. . 53 10.4. I/O . 53 10.5. I/O . 54 10.6. . 54 10.7. . 59 10.8. Output status unit . 59 10.9. LED . 61 10.10. . 65 10.11. DIP . 65 2 No.EX##-OMY0006CN 10.12. . 68 11. EX245-DX1 . 70 11.1. . 70 11.2. . 71 11.3. . 72 11.4. . 72 11.5. LED . 73 11.6. . 74 12. EX245-DY1 . 75 12.1. . 75 12.2. . 76 12.3. . 77 12.4. . 77 12.5.

Digital Flow Switch ( compatible)

[Measurement mode] 29 Flow Setting (set value only) of OUT1 OUT2 [3 step setting mode] 30 Default settings 34 Simple Setting Mode 32 Function Setting [Function selection mode] 33 Default settings 34 F0 Selection of reference condition, unit selection function, switch output specifications 36 F1 Setting of OUT1 39 F2 Setting of OUT2 46 F3 Digital filter setting 52 F10 Sub screen setting 53

PFxx-OMS0001CN

( (53 )) f. -46No.PF-OMS0001CN-A [F20] [---] =00 = ON EEPROM 100 +100 OFF <> [F20] [iNP][] [iNP][-] [inP] [] [F20] GND 30 msec.

PFxx-OMY0005

selection mode 31 Default setting 32 F0 Reference condition/Units selection function/Switch output function/ Output object/Display colour 33 F1 Setting of OUT1 37 F2 Setting of OUT2 44 F3 Select digital filter 45 F6 Fine adjustment of display value 46 F13 Setting for reverse display mode 47 F14 Zero cut-off setting 48 F16 Measurement display setting 52 F30 Setting of accumulated value hold 53