2-Color Display Digital Flow Switch Series PFM

/min 30% 70% 40% 60% 8% 92% 1.0 to 52.5 l/min 1.0 to 50.0 l/min 20.0 mA 5.00 V 0 to 52.5 l/min 10% 90% PFM750 20% 80% 1.0 to 42.0 l/min 1.0 to 40.0 l/min 16.8 mA 4.20 V 0 to 42.0 l/min 30% 70% 40% 60% 8% 92% 2 to 105 l/min 2 to 100 l/min 20.0 mA 5.00 V 0 to 105 l/min 10% 90% PFM711 2 to 95 l/min 2 to 90 l/min 18.4 mA 4.60 V 0 to 95 l/min 20% 80% 30% 70% 2 to 84 l/min 2 to 80 l/min 16.8 mA

EXxx-OMZ0016

number. *2: Select a protocol before performing pairing (V.2.0: 1 Mbps, V.1.0: 250 kbps).

Compact Cylinder

5 V, 12 V 100 V or less M9NV M9N 3-wire (NPN) IC circuit 5 V 12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V 2-wire F9NWV F9NW 3-wire (NPN) Diagnostic indication 2-color indication IC circuit 5 V 12 V Relay, PLC F9PWV F9PW 3-wire (PNP) Yes Grommet 24 V F9BWV F9BW Water resistant 2-color indication 2-wire 12 V F9BA Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5

Compact Vacuum Unit

Note 2) M-type plug connector is not available with the model with pressure sensor. 13A Table 3 Supply valve/release valve accessories Manual override Note 3) Supply valve/release valve model Accessories ZB1-VQ110UZB1-VQ110U-B ZB1-VQ110LZB1-VQ120UZB1-VQ120U-B ZB1-VQ110ZB1-VQ110-B Nil B Mounting screw (M1.7 x 0.59 inch (15 mm)) 2 pcs.

Compact Rotary Actuator Series CRQ2

(PNP) 2-wire 5 V, 12 V Reed switch Solid state switch 12 V IC circuit Diagnostic indication (2-color display) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9BAV 12 V 3-wire (NPN equiv.)

Digital Flow Switch

Connector pin numbers (lead wire) Connector pin numbers Wire colour Description 1 Brown DC(+) 2 White OUT2/Analogue output/External input 3 Blue DC(-) 4 Black OUT1 -18No.PF-OMS0002-B Internal circuit and wiring examples NPN (2 outputs) type PFMC7--AMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop: 1 V or less NPN (1 output) + Analogue (1 to 5 V) output type

Compact Cylinder/Guide Rod Type Series CQM

V 16 12 2 x 2 x OB counterbore with depth RB 2 x M5 x 0.8 Auto switch 2 x HB through F Q 2 x HA through KA IB IA 2 x N through T EB EA M KA (KB) 2 x 2 x OA V (RB) Note) 2 x 2 x RA L M Flat washer 4 pcs W B + Stroke EB A + Stroke EA 20, 25 (mm) Without auto switch A With auto switch HA Stroke range (mm) Bore size (mm) EA EB F OA HB IA IB A B B 12 16 20 25 +0.2 0 3 26.5 17 31.5 22 25 24 5 M3

Compact Type Dual-Rod Cylinder Series CXSJ

-color display) 5 V,12 V 2-wire 12 V Water resistant (2-color display) . . .

Air Slide Table Series MXW

V 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equivalent) IC circuit A96V A96 5 V Yes 24 V Grommet A93V A90V A93 A90 100 V Relay, PLC 12 V 2-wire 100 V or less No IC circuit Solid state auto switches marked with are produced upon receipt of order.

CNA

stroke Z + l + 1/2 stroke MGP W V MGQ D E TY D e H1 MGG AL AL A A F BN TT K K 8 f l N lC h + l lB MGC ZZ + l + 2 stroke S + Stroke H + Stroke ZZ + 2 Stroke H TX TZ With rod boot at both ends ZZ + 2 l + 2 stroke MGF (mm) Bore (mm) Stroke range (mm) 40 50 63 80 100 MM N J K KA A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 P CY1 1/4 3/8 3/8 1/2 1/2 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 12 V 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC Diagnostic indication (2-color indication) 5 V, 12 V Grommet 24 V 2-wire 12 V Water resistant (2-color indication) Y7BA Solid state switches marked with are produced upon receipt of order.

SMC Wireless System PROFINET compatible

Signal name 1 24 V (Output) 2 0 V (Output) 3 24 V (Control and input) 4 0 V (Control and input) 5 F.E. (2) EX600-ED3-# PWR IN: 7/8 inch 5-pin Plug Configuration Pin No. Signal name 1 0 V (Output) 2 0 V (Control and input) 3 F.E. 4 24 V (Control and input) 5 24 V (Output) (3) EX600-ED4-# PWR IN: M12 4-pin Plug A-coded PWR OUT: M12 5-pin Socket A-coded Configuration Pin No.

Compact Manifold Regulator Series ARM5

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at handle locked) 55 (at handle locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side

CQ2

Foot Add foot bracket #2 to SCQ2 bore size B, #9. Front flange Add front flange #3 to SCQ2 bore size B, #9. Rear flange Add rear flange #4 to SCQ2 bore size B, #9.

10

A B C 2 3 5 Grommet Size 1 Resin A 24 VDC Size 2 B E N.C. N.O. A B 4 7 Resin B C D E F G H J K L M N P Q R S T U V W 100 VAC Grommet With surge voltage suppressor Size 3 C F N.C. N.O.

CXS

IC circuit A96V A96 5 V Reed switch Yes Yes Grommet 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 2-wire Relay, PLC 3-wire (NPN) IC circuit 5 V,12 V 2-wire 3-wire (PNP) 12 V Solid state switch Relay, PLC Grommet 5 V,12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 2-wire 12 V Water resistant (2-color

CXS

IC circuit A96V A96 5 V Reed switch Yes Yes Grommet 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 2-wire Relay, PLC 3-wire (NPN) IC circuit 5 V,12 V 2-wire 3-wire (PNP) 12 V Solid state switch Relay, PLC Grommet 5 V,12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 2-wire 12 V Water resistant (2-color

3 Position Cylinder Series RZQ

12 V 2-wire REC Reed switch Solid state switch Connector 5 V, 12 V 12 V 5 V, 12 V 12 V 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 4-wire IC circuit Diagnostic indication (2-color indication) Relay, PLC CY 24V Yes CX Grommet IC circuit Water resistant (2-color indication) IC circuit MQ With diagnostic output (2-color indication) 5 V, 12 V Magnetic field resistant

rep-filter-e

Loosen the tightening bolts of the V-band and remove the stopper. (The tightening bolts can be loosened with a hexagon wrench [width across flats 6 mm].) Element Cloth handle Hexagon wrench V-band Tightening bolt (a) (b) (a) (b) (c) 2. Mounting of the Element Check the O-ring and the V-band, and if there is any abnormality, replace it with a new one.

Industrial Filters Replacement Procedure

Loosen the tightening bolts of the V-band and remove the stopper. (The tightening bolts can be loosened with a hexagon wrench [width across flats 6 mm].) Element Cloth handle Hexagon wrench V-band Tightening bolt (a) (b) (a) (b) (c) 2. Mounting of the Element Check the O-ring and the V-band, and if there is any abnormality, replace it with a new one.