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Millirrfeter size 1{1' Q I1'SiZeJ' , 0.6' r'~ '" 0Ur 0~ '2. , ~1/4' a!;'16" 03/4" 'ol/2~ AsP330F'!U R(PT)1/8 M5 X 0.8 J\SP. 4;JOF~02 R(PT)I /4 Rc(PD1 /8 IIS'P530F:03 R(PT)318 Rc(PT)lIS 'ASi"!)30l"'lJ4 " R(PT)1!2 Rc(PT)1I4 ASP;l3OF:,FO~ RIPT)114 G(PF)1I8 I\Sps:ioFf;03' R(PT)318 G(PF)118 ),I'SPsJOF;;04: R(PT)1 /2 G{PF)1/4 A~P33!1F" 'l Il1 NPT1 /8 10-32UNF ,~Sp430FNO,?

70pvpump

discharge rate of 6 l/min and a total lifting range of 25 m.

EXxx-OMQ0015CN

DC24 V108 A DC24 V+10/-5 Class22 A DC24 V+10/-58 A IP67() -1050 -2060 3585RH() AC500 V1 FE DC500 V10M FE CE UL(CSA)RoHS 170 g 175 g : EX600-ED2-23No.EX-OMQ0015CN EX600-ED3-24No.EX-OMQ0015CN (DC24 V10%) -25No.EX-OMQ0015CN LED LED 1 Yes No SI 2 3 4 ST(M) 5 6 7 SI -26No.EX-OMQ0015CN SI ST(M) 8 ST(M) 9 / PWR PWR(V) 10 L/A IN L/A OUT 11 SF/BF 12 13 14 15 -27No.EX-OMQ0015CN

VP300/500/700

Y: 4.5 to 7 D: 6 to 8 47.5 2(A) 2(A) 13.5 Rc 3/8 (A port) Stations L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 10 359 344 9 326 311 8 293 278 7 260 245 6 227 212 5 194 179 4 161 146 3 128 113 2 95 80 : With light/surge voltage suppressor ( ): Dimensions for external pilot Individual exhaust: VV3P5-42Stations 3-03 28.5 3(R) 3(R) Rc 3/8 (G) (E) (T) (D, Y) (R port) N.C. N.O.

A

A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7

3 Port Air Operated Valve

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

Speed Controller with

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

For details, please contact SMC. 3-11-17 18 Manifold Specifications Standard Specifications ISO Size 1 ISO Size 2 ISO Size 1 Maniflod block size VSR/S8-6 VSR/S8-8 VSR/S8-6 Applicable solenoid valve 1 to 10 Number of stations 1/4, 3/8, 1/2, 3/4, 1 A, B port Port size 1/4, 3/8, 1/2, 3/4, 1 P , EA, PB port VV82-P-03/04/06 VV81-P-02/03/04 Individual SUP spacer VV82-R-03/04/06 VV81-R-02/03/04

ZP

4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model Model Model ZP2-3507W ZP2-4010W ZP2-5010W ZP2-6010W ZP2-4020W ZP2-5020W ZP2-6020W ZP2-8020W

Modular Type Regulator Series AR

Note 5) Consult P/A for detailed dimensions and available attachments and options. Note 6) Refer to P/A catalog CAT.ES100-42 for detailed specifications and instructions of digital pressure switch.

VXP21/22/23

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

OMU0023

(Example) When Step Data No. 1 is used for a positioning operation: Recommended set value Set value for pushing speed = 6 (Thus, positioning speed of Return to Origin: 6 mm/s, Pushing speed for Step Data No. 1 positioning operation: 0 mm/s) 45 - (Example) When Step Data No. 1 (Step Data No. 0) is used for a pushing operation and the speed is set to 6 mm/s: Recommended set value Set value

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

1.5 22.5 9.5 2-5.5 (Mounting holes) 71.2 (GZ, GS: 71.9) [72.9] 6 21.5 26 50.3 X R A A A A P SY 43 SYJ 4-Rc (PT)1/4 (Lead wire length) VK (P/R port) G: 300 H: 600 VZ (Pitch) L1 L2 P=19 15 6 VT Manual override Depress and turn to operate and lock override.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

V

48.5 63.6 25 89.5 79.5 10 15 ZPR40D 40 43 29 42.5 53.3 71.1 25 97 87 17 15 A P P L I C A B L E T U B E A P P L I C A B L E T U B E Applicable Tube OD P Q R S Applicable Tube OD P Q R S 4 4 23.3 15.8 10.4 6 6 24.3 16.8 12.8 H O W T O O R D E R Z P R P A D H O R I Z O N T A L T Y P E W I T H O U T B U F F E R 6 6 24.3 16.8 12.8 8 8 26.2 18.7 15.2 8 8 26.2 18.7 15.2 ZPR P A D D I A M E T E

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

-06SK 17 25.2 18.4 34 6 12.8 37 42.6 14 R 1/4 14 41.2 46.2 47.2 52.2 18.5 AS231FE-02-08SK 12.9 18.5 28.2 18.3 35.2 8 15.2 39 45.6 AS231FE-02-10SK 21 31 20.2 38.7 10 18.5 42 48.4 AS331FE-03-06SK 17 25.2 38.5 6 12.8 57 46.1 20.6 12.9 AS331FE-03-08SK 18.5 28.2 39.7 8 15.2 60 49.1 14 R 3/8 19 46.5 51.5 52.8 57.8 23 AS331FE-03-10SK 21 32.6 43.7 10 18.5 62 53.5 23 16.2 AS331FE-03-12SK 22 34.4 44.9

Industrial Filters

Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4). 108 108 AIR VENT M6 x P1 G1/2 AIR VENT M6 x P1 2 x RcD 2 x RcD C B A B OUT IN OUT IN C A DRAIN G1/4 DRAIN G1/4 (mm) (mm) A B D C A B D C Model Element length Model Element length A (L250) A (L250) 314 70 374 314 70 407 FGDC FGDE FGDC FGDE B (L500) B (L500)

33

x Depth 580 HRSE018-A-23 HRSE024-A-23 HRSE012-A-23-T 48 Height 790 x Width 470 x Depth 580 HRSE018-A-23-T HRSE024-A-23-T IDH Selection Warning 1.