LJ1H

Work piece mounting reference plane Rc 1/4 Vacuum suction port Rc 1/4 Vacuum suction port 80 Stroke + 115 (table movement range) 7.5 194 (249) 41 46 58 2-T-slot 1 57 65 69 90 95 9.3 44 40 (T-slot pitch) 2-T-slot 2 Stroke + 350 (405) 17 28 23 (78) 40 36 Body mounting reference plane 3-5H10 depth 5 3.3 5.8 1.7 5.3 T-slot 1 dimensions (switch groove) 11.5 45 27 (82) 40 80 Stroke + 145 9.4 4.5

CRB2/CRBU2/CRB1

(mm) Q1 = M Q1 = M Size Q1 = M Q1 = M 50 63 80 100 (mm) Shaft type Size K T K T K T K T L1 = L1 = 50 63 80 100 Thread L1 = Shaft type M5 x 0.8 L1 = J X Z J X Z J X Z J X Z 4.2 4.2 4.2 4.2 Thread M6 x 1 M5 x 0.8 5 5 5 5 4.2 4.2 4.2 4.2 M8 x 1.25 M6 x 1 6.8 6.8 L1 5 5 5 Q1 Q1 L1 M10 x 1.5 J axis Z axis Q1 Q1 M8 x 1.25 8.6 6.8 L1 L1 K axis T axis 81 Series CRB1 (Sizes: 50, 63, 80, 100)

Table of Contents

(mm) Q1 = M Q1 = M (mm) Size Q1 = M Q1 = M 50 63 80 100 Size Shaft type Shaft type 50 63 80 100 K T K T K T K T L1 = L1 = Thread L1 = L1 = J X Z J X Z J X Z J X Z M5 x 0.8 Thread 4.2 4.2 4.2 4.2 M5 x 0.8 4.2 4.2 4.2 4.2 M6 x 1 5 5 5 5 M6 x 1 5 5 5 M8 x 1.25 6.8 6.8 L1 M8 x 1.25 Q1 Q1 K axis T axis Q1 Q1 6.8 L1 L1 L1 M10 x 1.5 8.6 J axis Z axis 11-4-17 83 Series CRB1 (Size: 50, 63, 80,

Rotary Actuator

Size * T, J, K are made to order. 50 63 80 100 Type Nil Standard U Angle adjustable Applicable Auto Switches/Refer to pages 797 to 850 for further information on auto switches.

Table of Contents

2 u t o !3 q !1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

High Vacuum Angle Valve

How to Order [Option] XLGV M9N 16 A 1 G L Flange size 16, 25, 40 1 q e u r t XLGV M9N 50 A 1 G L Flange size 50, 63, 80 i w y o !0 !

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

Hydraulic

6.5 118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100 340 34 125 38 6.5 140 112 35.5 80 35 27 19 M14 x 2 27 24 34 M27 x 2 35 1/2 77 140 12 20 16 100 340 34 160 42 9 174 140 45 100 38 36 22 M16 x 2 28 27 38 M33 x 2 40 3/4 94 159 12 24 20 108 375 43 108 Series CHAW Dimensions Foot type: CHAWL H + Stroke H K F T T V V 2-Rc P Cushion adjustment screw 4-J GA F GA

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) Q1 = M Q1 = M (mm) Size Q1 = M Q1 = M 50 63 80 100 Size Shaft type Shaft type 50 63 80 100 K T K T K T K T L1 = L1 = Thread L1 = L1 = J X Z J X Z J X Z J X Z M5 x 0.8 Thread 4.2 4.2 4.2 4.2 M5 x 0.8 4.2 4.2 4.2 4.2 M6 x 1 5 5 5 5 M6 x 1 5 5 5 M8 x 1.25 6.8 6.8 L1 M8 x 1.25 Q1 Q1 K axis T axis Q1 Q1 6.8 L1 L1 L1 M10 x 1.5 8.6 J axis Z axis 11-4-17 83 Series CRB1 (Size: 50, 63, 80,

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) Q1 = M Q1 = M (mm) Size Q1 = M Q1 = M 50 63 80 100 Size Shaft type Shaft type 50 63 80 100 K T K T K T K T L1 = L1 = Thread L1 = L1 = J X Z J X Z J X Z J X Z M5 x 0.8 Thread 4.2 4.2 4.2 4.2 M5 x 0.8 4.2 4.2 4.2 4.2 M6 x 1 5 5 5 5 M6 x 1 5 5 5 M8 x 1.25 6.8 6.8 L1 M8 x 1.25 Q1 Q1 K axis T axis Q1 Q1 6.8 L1 L1 L1 M10 x 1.5 8.6 J axis Z axis 11-4-17 83 Series CRB1 (Size: 50, 63, 80,

Made to Order

50 mm 63 mm 80 mm 100 mm Only for D and T mounting types.

Table of Contents

LQ K P 88 97 108.5 113.5 VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 60 60 62 62 48 48 50 50 72 80 95 100 LVN TI/ TIL PA Conduit terminal: T N.C.Normally closed N.O.Normally open PAX PB Model N N.C. N.O. N.C. N.O.

Battery-less

5 r t w q y !6 !

MG

5 2032 to 63 Over 50 to 100 stroke 80, 100 Over 50 stroke to 200 stroke Data Over 50 stroke @0 t 50 stroke or less 32 to 63 Over 100 stroke 80, 100 Over 200 stroke 50 stroke or less 50 or more Component Parts Description Material Note No. q w Description Material Note No. !2 !3 !

Electric Actuator/Slider Type

1396.5 1006 1070 14 5 1000 80 LEJS63V -1200 1556.5 1596.5 1206 1270 16 6 1200 80 LEJS63V -1500 1856.5 1896.5 1506 1570 18 7 1400 180 55 Electric Actuator/High Rigidity Slider Type Belt Drive Series LEJB AC Servo Motor RoHS LEFS LEFB LEJS LEJB LEY LEYG LECYM/LECYU Model Selection How to Order q w e r t y u i o V6 LEJB 40 500 T e Lead [mm] q Size w Motor type 1 40 63 Symbol LEJB40 LEJB63 T

MGP

Order a seal kit according to applicable bore size. 3.17-32 Compact Guide Cylinder Series MGPS MGPS50/80 XAH7 depth XL T slot dimension 4-YY depth YL b a CL MLGC X 0.02 XB RB RA CNA X c d XAH7 e CB XC XAH7 (mm) XL CV/MVG T slot dimension Bore size (mm) 50 80 a 11 13.3 b 17.8 20.3 c 10 12 d 6 8 e 17.5 22.5 XX details CXW 8-RR depth RL XX section CXS WB Z QA WA QB CXT XX section Through 4-OA

LJ1H

5H10 depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 201 60 50 Z section 43 Stroke + 125 (table movement range) 192 3.3 30 90 A section 83 5.8 1.7 4.8 80 Stroke + 360 A section detail (Switch groove) 11.5 40 (T-slot pitch) 36 45 3-5H10 depth 5 9.4 18 4.5 10 Stroke + 145 80 40 30 T-slot dimensions The body mounting

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

14 5 1000 80 LEJS63V-12001556.5 1596.5 1206 1270 16 6 1200 80 LEJS63V-15001856.5 1896.5 1506 1570 18 7 1400 180 718 AC Servo Motor Electric Actuator/High Rigidity Slider Type Belt Drive LEJB Series LEJB40, 63 LEF How to Order LEJ LEL q w e r t y u i o V6 LEJB 40 500 T LEM LEY e Lead [mm] q Size w Motor type *1 LES 40 63 Symbol LEJB40 LEJB63 T 27 42 Symbol Type Output [W] Actuator size Compatible

Aluminum High Vacuum Angle Valve

w, r, t e 1.3 x 10-11 (FKM) 1.3 x 10-9 DSeal material 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 XSA 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

MGP

80 80 100 100 Load weight m (kg) 50 50 50 50 40 40 30 30 20 20 10 50 100 200 10 10 50 100 200 10 46 Compact Guide Cylinder: Heavy Duty Guide Rod Type Series MGP Horizontal Mounting Slide Bearing MGPS50, 80 5 l = 50mm V = 200mm/s 6 l = 100mm V = 200mm/s 100 100 80 50 50 80 80 80 Load weight m (kg) Load weight m (kg) Load weight m (kg) Load weight m (kg) 40 40 30 30 50 50 50 20 20 50 10 10