2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

) 5% F.S. (0 to 50C) 0.5% F.S. 0.5% F.S. 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. 5% F.S. (0 to 50C) (0 to 50C) (0 to 50C) (0 to 50C) Repeatability 1% F .S.

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

3 Way,3 Port Solenoid Valve NVZ Series

w l Body ported type Base mourfied type With subplate R Port %,%NPTF X Port P Port (Extemal 3 Port Solenoid Valve Series NVZ100/300/500 NV2100 Gffir,rsn NVZ300 GU@ W f m NVZ500-GEIED I Power Consumption 1.8WDC (2.r wDC MrEol I Response Time NVZ100: 15 mSec or less N\2300/500:20 mSec or less Optimal Accessory/Bracket N\rz100-ooo .t 5.F itvz3020-o8o .u5f Nvz5020-ooo -01T-F Top ported/Nw4a

NVZseies

w l Body ported type Base mourfied type With subplate R Port %,%NPTF X Port P Port (Extemal 3 Port Solenoid Valve Series NVZ100/300/500 NV2100 Gffir,rsn NVZ300 GU@ W f m NVZ500-GEIED I Power Consumption 1.8WDC (2.r wDC MrEol I Response Time NVZ100: 15 mSec or less N\2300/500:20 mSec or less Optimal Accessory/Bracket N\rz100-ooo .t 5.F itvz3020-o8o .u5f Nvz5020-ooo -01T-F Top ported/Nw4a-2Goi

ZQ

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

Series KV2 Fittings

Green Gray Tan Symbol B R G BU W Y YR N S PU BR GD GR T S S S S S S S S S S = Standard, all other length color combinations are available by special order Tube Sizes 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 3/4 21 Series KV2 KV2 Instructions Installation Features Insert the KV2 series fitting into port and rotate until hand tight.

A

ON OFF IN SMC OUT R 7 Spacer L type bracket Spacer with L type bracket T type bracket Spacer with T type bracket Spacer with L type bracket Spacer with T type bracket T type bracket L type bracket L type bracket Spacer with L type bracket Applicable model T type bracket Spacer with T type bracket Applicable model Applicable model Model Y20T AV2000 B210T Y20L AV2000 AV2000 Y20 B210L Y30T AV3000

Body Size: 40, Pipe Thread: G, Port Size: 1/2, Mounting: w/o Mounting Option, Nominal Filtration Rating: 5µ, Water Removal Type: Water Drop Removal Type, Semi-standard: Flow Direction: Right to Left

Body Size: 40, Pipe Thread: F (G), Port Size: 04 (1/2), Mounting: w/o Mounting Option, Nominal Filtration Rating: 5 (5µ), Water Removal Type: S (Water Drop Removal Type), Semi-standard: R (Flow Direction: Right to Left)

Body Size: 40, Pipe Thread: Rc, Port Size: 03 (3/8), Mounting: w/o Mounting Option, Nominal Filtration Rating: 5 (5µ), Water Removal Type: S (Water Drop Removal Type), Semi-standard: R (Flow Direction: Right to Left)

3

Basic (mm) (mm) A B C D E F Yh9 H 25 29 32 38 15.5 20 5 7 M3 x 0.5 M5 x 0.8 5.5 6.5 6 8 MKB12-Z MKB16-Z Clamp stroke Model 11 14 Rod state Model 0 0.043 0 0.043 20 mm Q R 88 115.5 88 115.5 30 mm Q R 108 145.5 108 145.5 10 mm Q R 68 85.5 68 85.5 Retracted Extended Retracted Extended MKB12-Z 45.5 55.5 65.5 MK MK MKB16-Z 45.5 55.5 65.5 MK2T Note) The above figure is with the auto switch (D-M9

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type (A) 4 (B) 2 S D Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24 VDC FIG 12 VDC Nil Z None 1 (P) 5 (R1) 3 (R2) Voltage other than above (50 VDC or less) Light/Surge voltage suppressor 9 A02 VS1 01 Sub-plate Thread type Size Rc Nil F T 01 02 Size 01 G Size 02 NPTF Port size

Refrigerated Air Dryer

Combination of R and S (Because S function is also included in R.) Combination of S and T (Because S function is also included in T.) Combination of K and V (Only one or the other may be attached.) Note 2) Standard specification is the power cable with plug.

MNB

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !

MNB

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.

Compact Type

2 @4 @5 !5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

Suction Guard (Produced upon receipt of order) FHG Series

Port size q Seal order no. r Seal order no. t Seal order no.

Rotary Table

P391060-5 P391070-5 Seal kit No.

One-touch Fittings

Chamfer dimension of R and NPT thread with sealant, and Uni thread Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 D Rz 12.5 45 2. Insufficient tightening may cause seal failure, or loosen the threads. 3.

AR20-B to AR60-B

e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.