Compact Vacuum Ejector Series ZQ ) Note 4) PE (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-J2 L-F.
D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away
x 0.8) 66.9 Vacuum port (V port) Note 4) PE SMC (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 107 3.5 10 Note 1) The above dimensions are for ZQ11U-G2 L-DC.
Gripper Cam Type MHY2-20D 2 x M5 x 0.8 thread depth 8 Pin hole positioning (Mounting thread) 14 5 19 42 4H9 + 0.030 depth 4 0 4 x M4 x 0.7 through (Thread for mounting attachment) 8 4 x M5 x 0.8 thread depth 10 10 0.005 0.025 (Mounting thread) 5 9 2 x 5.5 through (Mounting hole) 2 x M5 x 0.8 thread depth 10 18 (Mounting thread) (Limted area for mounting attachment) 38 48 36 36 37 25 21H9
23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 154 158 182 182 228 228 164.5 169 197 197 251 251 Data U CX to 1000 L CZ Z + Stroke RR Without Air Cushion Center trunnion Model without air cushion is designed to include rubber bumpers.
size (mm) RSQ/RSG Double acting, Single acting (spring extend), Double acting with spring Action RSH Lever with built-in shock absorber Rod end configuration Air Fluid CE1 1.5MPa Proof pressure 1.0MPa Max. operating pressure CE2 10 to +60C (No freezing) Ambient and fluid temperature Not required Lubrication ML2B Rubber bumper Cushion +1.4 0 ML1C Stroke length tolerance Flange Mounting REA M5
BB 30 35 40 AA 106 133 164 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 F 93.5 107.5 130.5 II 16 19 23 I 76.5 91 110 Model ML2B25 ML2B32 ML2B40 MM 16 21.5 24.5 MA M5 x 0.8 M6 x 1 M8 x 1.25 NN 22 26 37.5 LC 9.5 12 12 LB 9.5 16 15 LD 5.5 6.5 8.5 MC M5 x 0.8 M6 x 1 M8 x 1.25 PA Rc 1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 ND 5.6 6.8 8.6 MB M6 x 1 M8 x 1.25 M10 x 1.5 LL 28 30.5 37.5
BB 30 35 40 AA 106 133 164 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 F 93.5 107.5 130.5 II 16 19 23 I 76.5 91 110 Model ML2B25 ML2B32 ML2B40 MM 16 21.5 24.5 MA M5 x 0.8 M6 x 1 M8 x 1.25 NN 22 26 37.5 LC 9.5 12 12 LB 9.5 16 15 LD 5.5 6.5 8.5 MC M5 x 0.8 M6 x 1 M8 x 1.25 PA Rc 1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 MB M6 x 1 M8 x 1.25 M10 x 1.5 ND 5.6 6.8 8.6 LL 28 30.5 37.5
acting, Double acting spring, Single acting (Spring extended) Action Lever with built-in shock absorber type Style of rod end Air Fluid 1.5MPa Proof pressure 1.0MPa Max. operating pressure 10 to 60C (with no condensation) Ambient and fluid temperature RSH Not required (non-lube) Lubrication Rubber bumper Cushion +1.4 0 Stroke length tolerance Flange Mounting Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5
10.5 13 10 14 162 172.5 40 23 11 13 10 14 171 182 50 30 15 17 14 20 194 209 63 30 15 17 14 20 194 209 80 42 23 26 22 30 246 269 100 42 23 26 22 30 246 269 170 180.5 184 195 206 221 206 221 264 287 264 287 Double clevis: (D) / Locking at head end: (-Hl) Cushion valve Port CDH10 ZZ + Stroke Z + Stroke RR U L CX CZ -Wl -Hl/-Rl [mm] Bore size [mm] L RR U CDH10 CX +0.3 +0.1 CZ Z ZZ Z ZZ 32 23
23 Series CXSJ Dimensions: 10 Standard Piping 4-M3 x 0.5 thread depth 4.5 16 12 + Stroke 3.5 8 7.5 2-M5 x 0.8 thread depth 4 (Piping port) 28.5 8 Stroke 15 56 + Stroke 8 3.5 13 1 44.5 + Stroke M5 x 0.8 x 4l (Hexagon socket head set screw) 4 16 8 + Stroke M8 x 1.25 x 7.5l (Bolt holder) 1 40 33 0.2 33 0.2 20 42 8 8 3.4 through 6.5 counterbore with depth 5.5 (Opposite side: Same) 2-M3 x 0.5
P PL M ML C H D L XT661-4C-X321 M5 x 0.8 5 M4 x 0.7 8 32 6 39 XT661-6C-X321 M5 x 0.8 6 M4 x 0.7 6 47 11 59 XT661-8C-X321 M5 x 0.8 6 M4 x 0.7 6 47 17 79 XT661-10C-X321 Rc 1/8 M4 x 0.7 6 47 23 99 XT661-120E-X322 Rc 1/8 M5 x 0.8 7 72 30.5 120 XT661-150E-X322 Rc 1/8 M5 x 0.8 7 72 37.5 150 744 Non-contact Gripper XT661 Series Dimensions [Bernoulli Type] With guide assembly Size: 120 Size
23 Series CXSJ Dimensions: 10 Standard Piping 4-M3 x 0.5 thread depth 4.5 16 12 + Stroke 3.5 8 7.5 2-M5 x 0.8 thread depth 4 (Piping port) 28.5 8 Stroke 15 56 + Stroke 8 3.5 13 1 44.5 + Stroke M5 x 0.8 x 4l (Hexagon socket head set screw) 4 16 8 + Stroke M8 x 1.25 x 7.5l (Bolt holder) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)
M5 thread With 3.2 One-touch fittings With 4 One-touch fittings With 6 One-touch fittings M5 thread 2(B) (A)4 Side ported 5 (R1)5 1 (P) 3(R2) Note) For double solenoid specification, the function symbol below is D.
2 2-8 counterbore with depth 4.3 2 2-5.5 through 2 2-9.5 counterbore with depth 5.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2-M4 0.7 with depth 6 15 2-M5 0.8 54 19 70 52 17 8.5 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 0.7 with depth 6 20 2-M5 0.8 62 24 84 60 22 11 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 0.8 with depth 7.5
-ASD330F-01-08 10-ASD230F-M5-06 2.
(mm) Applicable fitting size Model KJY02-M3 KJY02-M5 2 M3 x 0.5 M5 x 0.8 KJR02-04 4 2 KJU02-00 2 KJU02-23 KJU02-04 2 Bulkhead union KJE Plug KJP Applicable tubing O.D. (mm) Model Applicable fitting size Model KJE02-00 2 KJP-02 2 2 Polyurethane tubing Series TU 2 Miniature fittings Series M
mounting) G1/4, Rc1/4 OUT(2) port 48 6 22 22 6 25 25 43 15 15 M5 leakage detection port 23 30 22 Part number for sub-base VCC12-S02 02F [Rc1/4] [G1/4] 60 0.5 to 2 Sub-base material is aluminum + hard anodized containing PTFE.
(Refer to Front matter 23 "Particle generation measuring method"and Front matter 24 "Comparison of cleanliness standards" for details.)
73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5 66 72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread depth M A Q Grommet: GS Flat terminal: F Conduit: C 11 G F 300 G F 280 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1