REC

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 20 mm n n pcs.

LG1H

Refer to pages starting with 181 for mounting. 3-8H10 depth 10 30 A B Stroke Model LG1H202PC-500-F LG1H202PC-600-F LG1H202PC-700-F LG1H202PC-800-F LG1H202PC-900-F LG1H202PC-1000-F 350 450 550 650 750 850 370 470 570 670 770 870 500 600 700 800 900 1000 95 B 100 95 8-6.2 110 95 20 95 A Positioning Time Guide Positioning time Positioning time (sec.)

Series IDG

0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet air flow rate l/min (ANR) Outlet air flow rate

3 Port Solenoid Valve Series VQ100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Option VT External non-leak Latching Negative COM AC Normally open Vacuum VP VG VP S070 VQ VKF VQZ VZ VS VFN Copper-free The fluid contacting section is copper-free and the standard style can be used as it is.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(Value in the initial state) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Caution For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series AN03 100 m 25 dB (A) Page 5-10-3 Metal case type Exhaust in only one direction. Prevents scattering of mist and noise.

MLU

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Built-in magnet 2 pcs. 1 pc.

JA/JAH/JB/JS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com The installation time is dramatically reduced. RHC It is compact and is suitable for high tensile stresses.

RB/RBL/RBQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Example of comparison for drag characteristics Usable without a stopper nut The strong body can be positioned directly.

Support Guide/11-LEFG Series

800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mep 1500 1500 1500 1500 L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 1000 1000 1000 1000 L3 Z 500 500 500 500 0 0 0 0 0 10 20 30 40 50

CY1

25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 1500 32 Note) Contact SMC if the maximum stroke is exceeded.

3 Port Solenoid Valve Rubber Seal Series SY100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT 100 million cycles or more (By SMC life test data) VP VG VP S070 VQ VKF VQZ Available in vacuum applications VZ (Up to 100 kPa) VS Copper-free VFN No copper used for sections in contact with fluids.

VP300/500/700

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 8 standard 7 1 2 In the case of external pilot type of body ported type, A is only available.

Pressure Gauge Guide

(Black) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com The arrow in the diagram indicates the direction of the pressure increase.



.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR VEX Manifold capable Rich line-up AMR VVEXB/Rc 1/8Up to 10 stations VVEX2/Rc 1/4Up to 8 stations Port sizes available from M5 to Rc 2, most flow rates and pipes can be accommodated.

ZSE30/ISE30

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data With One-touch fittings are newly introduced.

ZPT/ZPX

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY Type Without buffer With buffer Page ZQ Mounting Vacuum entry port Mounting Vacuum entry port ZF Male thread Female thread Series ZPT ZP Buffer body (Male thread) 13-11-72 to 13-11-76 Vertical vacuum entry Female thread ZCU Female thread Common

ZPT/ZPX

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc.

Guide Table Series MGF ø40, ø63, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DMounting height -X Reduction by 15 to 20% (Compared to SMC Series MGQ) 20Data Guide table Series MGF 40, 63, 100 Built-in non-rotating mechanism Internal guide pin prevents rotation.

MLGC

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted. For detailed specifications, refer to page 9-15-1.