Series VKF300

#$% 2,,#3 #3 4 0 ' ' & & ' ( % # ( ./, 01 /% & )# * %+ )% , 7 (% & )# *+ & 2% , & & ,( 5 #$ 6 # 7% & ' 5 #$ 6 ( % " #$ % , . / &'()* ! * + ! + ,! !"#$% & )# * % , 2,,#3 #3 4 0 ' ' & # ( ./, 01 /% & ' ( % & )# * % , 7 (% & )# *+ & 2% , & )# * )% , Series VKF300 " . / 0 1+ ++ )*+ ! "#$ ! %&'( )*+ , ' $ / !&+ !& , !"# $%& 0,, $6 $6 7 4 ( ( ' 1 $ ) !

C95Series

IN 46226 October 1996 Tel: (317) 899-4440 ' FAX: (31 7) 899-3102

ZP

Pad typePad diameter Pad diameter (Symbol) Pad type B04 03 05 06 B06 07 B08 U (Flat) C (Flat with rib) UT (Thin flat) B (Bellows) Dimensions: Pad Unit ZP2-03U ZP2-B04U ZP2-05UT ZP2-06UT ZP2-B06B ZP2-B08B 7 7 7 7 7 7 12 12 12 12 13 13 4 4 0.8 0.5 0.3 0.3 0.8 1.2 1.6 1.6 2.5 2.5 5 6 4 3 4.7 3.3 4.7 6 3.5 8 9 7 9 10 ZP2-B06C ZP2-07C ZP2-B08C Adapter Mounting Dimensions 7 7 7 If an adapter will

LEC-OM069xx

Monitor Displays.7-2 7.1 Monitor Displays.7-2 7.1.1 System Monitor.7-2 7.1.2 Status Monitor.7-2 7.1.3 Motion Monitor.7-2 7.1.4 Input Signal Monitor.7-2 7.1.5 Output Signal Monitor.7-3 8.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

REA/REB

0 @4 w @7 !7 !6 RHC MK(2) Component Parts Material No. Description No.

REA/REB

M3 x 0.5 4.5 M5 x 0.8 26 68 8 80 9 38 4 REAR15 18 21 25 18 54.5 4.3 M4 x 0.7 6 M5 x 0.8 32 84 7 98 14 53 5 REAR20 17 20.5 40 22 64 5.6 M4 x 0.7 7 Rc 1/8 38 95 7 107 11 62 5 REAR25 20 21.5 40 28 72 5.6 M5 x 0.8 6.5 Rc 1/8 43 105 7 117 15 70 6 REAR32 26 24 50 35 79 7 M6 x 1 8.5 Rc 1/8 54 116 7 130 13 76 7 REAR40 34 26 60 40 93 7 M6 x 1 11 Rc 1/4 64 134 7 148 15 90 8 10-2-22 22 Sine Rodless

Secondary Batteries

01 90-VQ2000 Series compatible with secondary batteries For blanking manual specification 90 Material restriction OUT side port size Rc 1/8 01 IN side port size Rc 1/8 01 *Specifications and dimensions for the 90-series are the same as standard products. 7 3 Port Solenoid Valve Pilot Operated Poppet Type Rubber Seal 90-VP300/500 Series How to Order A 2 4 3 VP D Z 5 90 02 Series compatible

•

N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

•

Calculation of suction flow rate OCalculation 01 Ejector/ average suction flow rate. 01 = ( ~ ~'3) 0 max.

REA/REB

M5 x 0.8 26 68 8 80 14 19.5 20 15 39.5 9 38 4 REAR15 4.3 M4 x 0.7 6 M5 x 0.8 32 84 7 98 18 21 25 18 54.5 14 53 5 REAR20 5.6 M4 x 0.7 7 Rc 1/8 38 95 7 107 17 20.5 40 22 64 11 62 5 REAR25 5.6 M5 x 0.8 6.5 Rc 1/8 43 105 7 117 20 21.5 40 28 72 15 70 6 High Precision Guide Type REBH Order Made Auto Switches REAR32 7 M6 x 1 8.5 Rc 1/8 54 116 7 130 26 24 50 35 79 13 76 7 REAR40 7 M6 x 1 11 Rc 1/

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

-23SD 12 18.3 23.1 13.5 1/4" 3.2 8.4 20 12.7 AS221F-N01-01SD AS221F-01-04SD 1/8" 8.4 27.5 20.4 4 9.3 20 5/32" 9.3 20.4 27.5 12.7 21 13.4 AS221F-N01-03SD AS221F-01-06SD R 1/8 12 14.2 7.2 1.2 31.6 13.5 6 11.6 34.7 21 AS221F-N01-05SD AS221F-01-08SD NPT 1/8 12.7 14.2 7.2 1.2 31.6 3/16" 13.2 24 31.1 16.5 32.4 18.5 25.3 8 15.2 23 13.4 34.7 AS221F-N01-07SD AS221F-01-10SD 1/4" 13.2 23.9 31 17 21

ARJ1020F

ARJF310F-01 y e !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 7 to 8) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 7 to 8) 1 setBlanking plate part no.

REC

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

Shock Absorbers and Rate Controls

6 6.4 ,7 f9.9 ( o E SC!

VQ4000

7 () (+) Blue None SOL.A SOL.B 20 20 () (+) Red White 7 stations SOL.B Stations are counted starting from the first station on the D side.

Booster Regulator/Air Tank

SRH VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN20-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer SRP G N S L G36-10-01 AN30-03 ANA1-03 KT-VBA22A-7 AN30-03 ANA1-03 G36-10-01 AN40-04 ANA1-04 G27-20-01 AN40-

Fieldbus system (PROFIBUS DP compliant)

(Only for EX510-S 01 ) -34No.EX-OMI0032-G No.